Development of vacuum ultraviolet Ar_2 excimer laser by laser-heated plasma pumping
| Project/Area Number |
12450034
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Applied optics/Quantum optical engineering
|
|---|
| Research Institution | Kyushu University |
|---|
Principal Investigator |
OKADA Tatsuo Kyushu University, Graduate School Of Information Science And Electrical Engineering, Professor, 大学院・システム情報科学研究院, 教授 (90127994)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
TAKAHASHI Akihiko Kyushu University, School Of Health Science, Associate Professor, 医療技術短期大学部, 助教授 (30187992)
UCHINO Kiichiro Kyushu University, Interdisciplinary Graduate School Of Engineering Sciences, Professor, 大学院・総合理工学研究院, 教授 (10160285)
|
|---|
| Project Period (FY) |
2000 – 2001
|
| Project Status |
Completed (Fiscal Year 2001)
|
| Budget Amount *help |
¥9,900,000 (Direct Cost: ¥9,900,000)
Fiscal Year 2001: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 2000: ¥7,800,000 (Direct Cost: ¥7,800,000)
|
|---|
| Keywords | Ar_2 excimer laser / laser-heated plasma / pre-ionization / vacuum ultra-violet / excimer / Ar_2 excimer / UV予備電離 / 光リソグラフィー / アルゴンエキシマー / 真空紫外レーザー / エキシマーレーザー / レーザープラズマ |
|---|
| Research Abstract |
In order to realize a practical Ar_2 excimer laser, we have proposed a new pump scheme to deposit a high power density into a high pressure Ar gas without discharge instability[7-9], In this scheme, a pre-ionized high-pressure Ar gas is irradiated by an intense CO_2 laser beam. The initial electrons are accelerated and heated by the electric field of the CO_2 laser, and an Ar gas is effectively ionized. The advantage of this scheme is that a rapid and intense energy deposition into the gas plasma is possible without being limited by discharge instability. In this paper, we report the vacuum ultraviolet emission characteristics from such a laser-heated high pressure Ar plasma.
As the results, a 100 mm-long linear plasma was successfully produced in an Ar gas at a pressure of 20 atmospheres by heating the pre-ionized Ar gas with a TEA CO_2 laser. The VUV emission at 126 nm from the Ar_2 excimers was observed. Although no clear evidence of the stimulated emission has been observed yet, the results indicate that the plasma was produced by a proposed mechanism, not by a simple laser-breakdown. In the present experimental setup, the main components such as pre-ionizer and a set of focusing mirror are installed in a high-pressure gas chamber. This causes some problems in terms of the purity of gas, the pre-ionization and an optical alignment. We are further optimizing the system for the realization of the stimulated emission at 126 nm.
|
Report
(3 results)
Research Products
(12 results)
