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Ultra-Precision Machining of Replicated Aspherical Optical Components

Research Project

Project/Area Number 12450063
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionCHUBU UNIVERSITY

Principal Investigator

NAMBA Yoshiharu  Chubu University, Dept. Mech. Engg., Prof., 工学部, 教授 (40029129)

Co-Investigator(Kenkyū-buntansha) SAEKI Morihiko  Chubu University, Dept. Mech. Engg., Assoc. Prof., 工学部, 助教授 (10284738)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥15,100,000 (Direct Cost: ¥15,100,000)
Fiscal Year 2002: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2001: ¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2000: ¥8,700,000 (Direct Cost: ¥8,700,000)
KeywordsUltra-precision machining / Replication / Aspherical mandrel / Laser scattering microscope / Measurement of nose radius / Single-point diamond turning / Space X-ray telescope / Surface roughness / レプリカ
Research Abstract

The aim of this research is to establish the manufacturing technology of ultra-precision aspherical light optics for next-generation X-ray telescopes by the following methods ; making ultra-precision aspherical mandrels, putting heavy metal coating on mandrels, pressing or forming the substrates on the mandrels, removing the substrates from the mandrels and making replicated aspherical light optics. This technology is the key manufacturing technology of the grazing incident X-ray telescope that will be intended to launch in space in 2010. And this technology will be also the base manufacturing technology of X-ray microscopes for biotechnology and medical applications.
The outlines of research results are as follows :
1. We have developed a new scanning laser scattering microscope that can measure the nose radius of sharp diamond cutting tools in high precision in cooperation with Dr. S. F. Scares of US & A in U. S. A. The apparatus can detect the edge of sharp and transparent diamond too … More ls in tens of nm resolution by scanning optical fiber connected with ultra-stable semiconductor laser, ultra-fast semiconductor sensor and piezo accelerator. The microscope is superior in resolution to a SEM and laser microscope.
2. The aspherical-shape light mirrors having less than 100nm in figure error and less than 0.5nm rms in surface roughness are needed in an X-ray telescope. Electroless nickel is the only one material that can be diamond-turned and also optically polished. The electroless nickel was diamond-turned for obtaining X-ray telescope mirror mandrels instead of glass mandrel, and the surface roughness of 0.344nm rms was obtained only by diamond-turning process on the material.
3. We tried to make replicated X-ray mirrors having Pt/C multilayers for the next-generation X-ray telescope. We can remove thick Pt or Au layers from electroless nickel mandrel, however we could not remove replicated Pt/C super mirrors from the electroless nickel mandrel. This problem has to be solved in future. Less

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (29 results)

All Other

All Publications (29 results)

  • [Publications] Y.Namba: "Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning"Annals of the CIRP. 52・1. 1-4 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Okajima: "Characterization of the supermirror hard X-ray telescope for the InFOCμS balloon experiment"Appl. Opt.. 41,25. 5417-5426 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] L.He: "Wavelength Optimization for Machining Metals with the Harmonic Generations of a Short Pulsed Nd : YAG Laser"Prec. Eng.. 24,3. 245-250 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] L.He: "Spectroscopic Analysis for Machining of Inorganic Materials with the Harmonics of a Nd : YAG Laser"Prec. Eng.. 24,4. 357-363 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Namba: "Modeling and Measurements of Atomic Surface Roughness"Appl. Opt.. 39,16. 2705-2718 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Ogasaka: "Hard X-ray Imaging Observations : Science and Technology"Adv. Space Res.. 25,3/4. 911-914 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] I.Inasaki: "Initiatives of Precision Engineering at the Beginning of a Millennium"Kliwer Academic Publishers. 977 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Ogasaka, K. Yamashita, Y. Namba and et al: "Hard X-ray Imaging Observations : Science and Technology"Adv. Space Res.. 25, 3/4. 911-914 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Namba, J. Yu, J. M. Bennett and K. Yamashita: "Modeling and Measurements of Atomic Surface Roughness"Appl. Opt.. 39, 16. 2705-2718 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Okamoto, Y. Uno, K. Ohta, T. Shibata, S. Kubota and Y. Namba: "Study on Precision Laser Forming of Plastic with YAG Laser"J. JSPE. 66, 6. 891-895 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] L. He, Y. Namba and Y. Narita: "Wavelength Optimization for Machining Metals with the Harmonic Generations of a Short Pulsed Nd : YAG Laser"Prec. Eng.. 24, 3. 245-250 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] L. He and Y. Namba: "Spectroscopic Analysis for Machining of Inorganic Materials with the Harmonics of a Nd : YAG Laser"Prec. Eng.. 24, 4. 357-363 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Namba, H. Takehara and Y. Nagano: "Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50, 1. 239-242 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Namba: "Precision Machining of Optical Materials for UV Applications"Japanese Journal of Optics. 30, 12. 801-807 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Uno, Y. Okamoto, Y. Namba and et al: "Study on Laser Forming of Plastic by YAG Laser-Effect of Specimen Thickness on Deformed Characterlstics-"J. JSPE. 68, 3. 466-471 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Okajima, K. Tamura, Y. Namba and et al: "Characterization of the supermirror hard X-ray telescope for the InFOCmS balloon experiment"Appl. Opt.. 41, 25. 5417-5426 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Namba and M. Saeki: "Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning"Annals of the CIRP. 52, 1. 1-4 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Okajima: "Characterization of the supermirror hard X-ray telescope for the InFOCμS balloon experiment"Appl. Opt.. 41・25. 5417-5426 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Namba: "Optical fabrication of organic nonlinear DAST crystals for high frequency modulation"Proc. SPIE. 4829. 749-750 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Namba: "Optical Surface Generation of Organic Nonlinear Crystals by Single-Point Diamond Turning"Annals of the CIRP. 52・1. 1-4 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.NAMBA: "Fracture Strength of Zero-Thermal Expansion Glass-Ceramics for Ultra-Precision Components"Annals of the CIRP. 50・1. 239-242 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 難波義治: "紫外光学材料の精密加工技術"光学. 30・12. 801-807 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 宇野義幸: "プラスチックのレーザフォーミングに関する研究 -試料厚さが変形特性に及ぼす影響-"精密工学会誌. 68・3. 466-471 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Ekkard Brinksmeier: "Initiatives of Precision Engineering at the Beginning of a Millennium"Kliwer Academic Publishers. 977 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Namba: "Modeling and Measurements of Atomic Surface Roughness"Appl.Opt.. 39巻16号. 2705-2718 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 岡本康寛: "プラスチックの精密レーザフォーミングに関する研究"精密工学会誌. 66巻6号. 891-895 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] L.He: "Wavelength Optimization for Machining Metals with the Harmonic Generations of a Short Pulsed Nd : YAG Laser"Prec.Eng.. 24巻3号. 245-250 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] L.He: "Spectroscopic Analysis for Machining of Inorganic.Materials with the Harmonics of a Nd : YAG Laser"Prec.Eng.. 24巻4号. 357-363 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Namba: "Fracture Strength of Zero-Thermal-Expansion Glass-Ceramics for Ultra-Precision Components "Annals of the CIRP. 50巻1号. (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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