Development of an Ultraprecise and Ultrahigh-speed Rotating Mechanism by using a Micro Spherical Ultrasonic Motor
| Project/Area Number |
12450065
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
設計工学・機械要素・トライボロジー
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| Research Institution | Tokyo A&T University |
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Principal Investigator |
TOYAMA Shigeki Tokyo A&T University, Department of Technology, Professor, 工学部, 教授 (20143381)
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| Co-Investigator(Kenkyū-buntansha) |
NAGAI Masao Tokyo A&T University, Department of Technology, Professor, 工学部, 教授 (10111634)
KUWABARA Toshihiko Tokyo A&T University, Department of Technology, Associate Professor, 工学部, 教授 (60195609)
UMEDA Norihiro Tokyo A&T University, Department of Technology, Professor, 工学部, 教授 (60111803)
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| Project Period (FY) |
2000 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2002: ¥2,000,000 (Direct Cost: ¥2,000,000)
Fiscal Year 2001: ¥2,000,000 (Direct Cost: ¥2,000,000)
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| Keywords | Ultrasonic motor / Positioning stage / Micro mechanism / 超音波モータ |
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| Research Abstract |
We have developed a high precision and high speed rotary of a multi-degree-of ? freedom stage. The stage consists of a semi sphere rotor and three stators. Applying alternative voltage to the piezoelectric ceramics adhered to the stators, travelling elastic vibration is generated to drive the rotor. We can control the travelling wave number to rotate it precisely (less than 1/1000 degree). Furthermore we have found that the stage is possible to perform the positioning operation in three rotational degrees with 1/1000 degree or less in several micro seconds within ±3 degrees.
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Report
(4 results)
Research Products
(12 results)
