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Study on the Influence of Grain Boundary of Ferroelectric Thin Films on Elelectrical Properties and Its Application to Memory Devices

Research Project

Project/Area Number 12450131
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionHimeji Institute of Technology

Principal Investigator

SHIMIZU Masaru  Himeji Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (30154305)

Co-Investigator(Kenkyū-buntansha) FUJISAWA Hironori  Himeji Institute of Technology, Research Associate, 工学部, 助手 (30285340)
NIU Hirohiko  Himeji Institute of Technology, Professor, 工学部, 教授 (40047618)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 2001: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2000: ¥3,000,000 (Direct Cost: ¥3,000,000)
KeywordsMOCVD / Pb(Zr,Ti)O_3(PZT) thin films / grain size / grain boundary / ferroelectricity / piezoresponse / polarization reversal process / ultra thin PZT films / 強誘電体薄膜 / 強誘電体メモリ / Pb(Zr, Ti)O_3(PZT) / グレインサイズ制御 / 圧電応答顕微鏡 / エピタキシャルPZT薄膜 / 強誘電体PZT薄膜 / グレインサイズの制御 / PbTiO_3初期核 / 初期成長過程 / 二段階成長法 / エピタキシャル単結晶PZT薄膜 / 原子層ステップ
Research Abstract

1. Crystalline and electrical properties of polycrystalline Pb(Zr,Ti)O_3 (PZT) thin films on SrRuO_3/SiO_2/Si and epitaxial PZT thin films on SrRuO_3/SrTiO_3 were investigated. Increase in grain size and decrease in current density of polycrystalline PZT films were observed as film thickness increased. Decrease in current density was also observed as film thickness increased for epitaxial PZT films. Polycrystalline PZT films showed stronger thickness dependence of dielectric constant and remanent polarization than that of epitaxial PZT films due to thickness dependence of grain size and grain boundary.
2. The Volmer-Waber (V-W) growth mode for PZT thin films grown on Pt/SiO_2/Si by MOCVD, the V-W growth mode for PZT on SrO plane of SrTiO_3, the Stranski-Krastanov (S-K) mode for PZT on TiO_2 plane of SrTiO_3 and the S-K mode for PZT films on SrRuO_3/SrTiO_3 were observed, respectively. From piezoresponse measurements using scanning probe microscopy(SPM), it was found that nano-size PbTiO_3 and PZT islands showed ferroelectricity.
3. PZT thin films were successfully obtained at 395 ℃ by two step growth rocess using seeds. Increase in grain size and improvements in crystalline and electrical properties were observed for PZT films by two step growth process.
4. Polarization reversal process of PZT thin films was observed by piezoresponse measurements using SPM. Velocity of polarization reversal in in-plane direction and out-of plane direction were measured.
5. Planer and three dimensional PZT capacitors with Ir/PZT/Ir/SiO_2/Si structure were successfully fabricated solely by MOCVD only at 400 ℃.
6. The 20nm-thick ultra thin PZT films which showed ferroelectricity were successfully obtained on SrRuO_3/SrTiO_3.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (41 results)

All Other

All Publications (41 results)

  • [Publications] M.Shimizu et al.: "Effects of Film Thickness and Grain Size on the Electrical Properties of Pb(Zr, Ti)O_3 Thin Films Prepared by MOCVD"Ferroelectrics. 241. 183-190 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu et al.: "Preparation of Ir-Based Thin Film Electrodes by MOCVD"Materials Research Society Symposium Proceedings. 596. 259-264 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Observations of Domain Structure at Initial Growth Stage of PbTiO_3 Thin Films Grown by MOCVD"Materials Research Society Symposium Proceedings. 596. 321-326 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Observations of Island Structures at the Initial Growth Stage of PbZr_xTi_<1-x>O_3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition"Japanese Journal of Applied Physics. 39. 5446-5460 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu et al.: "Preparation of Ir-Based Thin Film Electrodes by MOCVD"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Observation of Polarization Reversal Processes in Pb(Zr, Ti)O_3 Thin Films Using Atomic Force Microscopy"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu et al.: "MOCVD of Ir and IrO_2 Thin Films for PZT Capacitors"Materials Research Society Symposium Proceedings. 655. CC10.4.1-CC10.4.6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Low Temperature Growth of PZT Thin Films and Its Application to Ir/PZT/Ir Capacitors"Materials Research Society Symposium Proceedings. 655. CC10.10.1-CC10.10.10 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Low-Temperature Fabrication of Ir/Pb(Zr, Ti)O_3/Ir Capacitors Solely by Metalorganic Chemical vapor Deposition"Japanese Journal of Applied Physics. 40. 5551-5553 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu et al.: "Low Temperature Growth Of Pb(Zr, Ti)O_3 Thin Films by Two Step MOCVD Using Seeds"Ferroelectrics. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu et al.: "Growth of Ferroelectric PbZr_x Ti_<1-x>O_3 Thin Films by MOCVD"Journal of Crystal Growth. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Fujisawa et al.: "Low-Temperature Fabrication of Ir/Pb(Zr, Ti)O_3/Ir Capacitors Solely by Metalorganic Chemical vapor Deposition"Journal of Crystal Growth. (in press). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 清水勝(分担執筆): "誘電体材料の特性と測定・評価および応用技術"技術情報協会. 11 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "Effects of Film Thickness and Grain Size on the Electrical Properties of Pb(Zr, Ti)O_3 Thin Films Prepared by MOCVD"Ferroelectrics. 241. 183-190 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "Thickness Dependence of Crystalline and Electrical Properties of Ultrathin PZT Films Grown on SrRuO_3/SrTiO_3 by MOCVD"Materials Research Society Symposium Proceedings. 596. 321-326 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Observations of Domain Structure at Initial Growth Stage of PbTiO_3 Thin Films Grown by MOCVD"Materials Research Society Symposium Proceedings. 596. 321-326 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Observations of Island Structures at the Initial Growth Stage of PbZr_xTi_<1-x>O_3 Thin Films Prepared by Metalorganic Chemical vapor Deposition"Japanese Journal of Applied Physics. 39. 5446-5450 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "Preparation of Ir-Based Thin Film Electrodes by MOCVD"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Observation of Polarization Reversal Processes in Pb(Zr, Ti)O_3 Thin Films Using Atomic Force"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "MOCVD of Ir and IrO_2 Thin Films for PZT Capacitors"Materials Research Society Symposium Proceedings. 655. CC10.4.1-6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Piezoresponse Measurements for Pb(Zr, Ti)O_3 Island Structure Using Scanning Probe Microscopy"Materials Research Society Symposium Proceedings. 655. CC10101-10 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Low Temperature Fabrication of Ir/Pb(Zr, Ti)O_3 /Ir Capacitors Solely by Metalorganic Chemical vapor Deposition"Japanese Journal of Applied Physics. 40. 5551-5553 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "Low Temperature Growth Of Pb(Zr, Ti)O_3 Thin Films by Two Step MOCVD Using Seeds"Ferroelectrics. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Masaru Shimizu, Hironori Fujisawa, Hirohiko Niu et al.,: "Growth Of Ferroelectric PbZr_xTi_<1-x> O_3 Thin Films by MOCVD"Journal of Crystal Growth. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu et al.,: "Observations of Initial Growth Stage of Epitaxial Pb(Zr,Ti)O_3 Thin Films on SrTiO_3(100) Substrate by MOCVD"Journal of Crystal Growth. (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimizu: "MOCVD of Ir and IrO_2 Thin Films for PZT Capacitors"Materials Research Symposium Proceedings. 665. CC1.10.1-CC1.10.6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Fujisawa: "Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O_3/Ir Capacitors Solely by Metalorganic Chemical vapor Deposition"Japanese Journal of Applied Physics. 40. 5531-5553 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Shimizu: "Low Temperature Growth of Pb(Zr,Ti)O_3 Thin Films by Two Step MOCVD Using Seeds"Ferroelectrics. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Fujisawa: "Investigation of Polarization Switching Processes in Pb(Zr,Ti)O_3 Capacitors Using Piezoresponse Imaging"Ferroelectrics. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Shimizu: "Growth of Ferroelectric PbZr_xTi_<1-x>O_3 Thin Films by Metalorganic Chemical Vapor Deposition"Journal of Crystal Growth. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Fujisawa: "Observations of Initial Growth Stage of Epitaxial Pb(Zr,Ti)O_3 Thin Films on SrTiO_3(100) Substrate by MOCVD"Journal of Crystal Growth. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 清水 勝(分担執筆): "誘電体材料の特性と測定・評価および応用技術"技術情報教会. 11 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Shimizu et al.: "Effects of Film Thickness and Grain Size on the Electrical Properties of Pb (Zr,Ti) O_3 Thin Films Prepared by MOCVD"Ferroelectrics. 241. 188-190 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Shimizu et al.: "Thickness Dependence of Crystalline and Electrical Properties of Ultrathin PZT Films Grown on SrRuO_3/SrTiO_3 by MOCVD"Materials Research Society Symposium Proceedings. 596. 259-264 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Fujisawa et al.: "Observations of Domain Structure at Initial Growth Stage of PbTiO_3 Thin Films Grown by MOCVD"Materials Research Society Symposium Proceedings. 596. 321-326 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Fujisawa et al.: "Observations of Island Structures at the Initial Growth Stage of PbZr_xTi_<1-x>O_3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition"Japanese Journal of Applied Physics. 39. 5446-5450 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Kobune et al.: "Effects of Pt/SrRuO_3 Top Electrodes on Ferroelectric Properties of Epitaxial (Pb,La) (Zr,Ti) O_3 Thin Films"Japanese Journal of Applied Physics. 39. 5451-5455 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Shimizu et al.: "Preparation of Ir-Based Thin Film Electrodes by MOCVD"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (印刷中).

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Fujisawa et al.: "Observation of Polarization Reversal Processes in Pb (Zr,Ti) O_3 Thin Films Using Atomic Force Microscopy"Proceedings of the 12th IEEE International Symposium on the Applications of Ferroelectrics. (印刷中).

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Shimizu et al.: "MOCVD of Ir and IrO_2 Thin Films for PZT Capacitors"Materials Research Society Symposium Proceedings. 655(印刷中).

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Fujisawa et al.: "Piezoresponse Measurements for Pb (Zr,Ti) O_3 Island Structure Using Scanning Probe Microscopy"Materials Research Society Symposium Proceedings. 655(印刷中).

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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