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Development of the Microplasticity Theory of Internal Friction and its Application to the Evaluation of Thin-Film Mechanical Properties

Research Project

Project/Area Number 12450258
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionNagoya Institute of Technology

Principal Investigator

NISHINO Yoichi  Nagoya Institute of Technology, Department of Materials Science and Engineering, Associate Professor, 工学部, 助教授 (50198488)

Co-Investigator(Kenkyū-buntansha) ASANO Shigeru  Nagoya Institute of Technology, Department of Materials Science and Engineering, Professor, 工学部, 教授 (10024267)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 2002: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2000: ¥3,700,000 (Direct Cost: ¥3,700,000)
KeywordsInternal Friction / Microplasticity / Thin-Film Materials / LSI Interconnects / Metallic Films / Dislocation / Mechanical Properties / Plastic deformation / 金薄膜 / 薄膜 / 銅
Research Abstract

Internal friction in aluminum, copper and gold thin films on silicon substrates has been measured as a function of strain amplitude at various temperatures by means of a free-decay method of flexural vibration. According to the constitutive equation, the internal friction in the film can be evaluated separately from the measured damping of the composite system. The amplitude dependence for the aluminum and copper films is found in the strain range one or two orders of magnitude higher than that for the bulk. On the basis of the microplasticity theory, the amplitude-dependent internal friction can be converted into the plastic strain as a function of effective stress on dislocation motion. The stress-strain responses thus obtained for the aluminum and copper films show that the plastic strain of the order of 10^<-9> increases nonlinearly with increasing stress. The curves tend to shift to a higher stress with decreasing film thickness and also with decreasing temperature, both of which means a suppression of the microplastic deformation. The microflow stress at a constant level of the plastic strain varies inversely with the film thickness at all temperatures examined. The film thickness effect for the aluminum and copper films can be explained on the basis of a dislocation-bowing model. In contrast, the microflow stress for the gold films decreases with decreasing film thickness when the film thickness is less than 0.5 μm, which could be due to the stress relaxation caused by surface-grain boundary diffusion. It is found that, for the gold films covered by titanium films, the microflow stress varies inversely with the film thickness although the stress level is lower than that for the aluminum films.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (46 results)

All Other

All Publications (46 results)

  • [Publications] M.Kato: "Electronic, Magnetic and Transport Properties of (Fe_<1-x>V_x)_3Al Alloys"Journal of Physics : Condensed Matter. 12. 1769-1779 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Okamura: "Pseudogap Formation in the Intermetallic Compounds (Fe_<1-x>V_x)_3Al"Physical Review Letters. 84. 3674-3677 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Kato: "Temperature Dependence of Electrical Resistivity in (Fe_<1-x>Ti_x)_3Al Alloys"Journal of Physics : Condensed Matter. 12. 9153-9162 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G.A.Botton: "Microstructural Evolution and Stability of (Fe_<1-x>V_x)_3Al Alloys in Relation to the Electronic Structure"Intermetallics. 8. 1209-1214 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Unusual Electron Transport in Heusler-type Fe_2 VAl Compound"Intermetallics. 8. 1233-1241 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Soda: "Magnetic Circular Dichroism at Transition Metal L_<2,3> Edges in D0_3-type (Fe_<1-x>Mn_x)_3Al Alloys"Journal of Synchrotron Radiation. 8. 455-456 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 西野洋一: "LSI配線用の金属薄膜の力学特性評価"材料の微細組織と機能性-21世紀に向けて-. 319-324 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Ohde: "Effect of Gas Transport in Metals on Negative Pressures in Water in Mo/Cu Berthelot Tubes"Journal Physics D : Applied Physics. 34. 1717-1726 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Effect of Off-Stoichiometry on the Transport Properties of the Heusler-type Fe_2VAl Compound"Physical Review B. 63. 233303-1-233303-4 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Electronic Structure and Transport Properties of Pseudogap System Fe_2VAl"Materials Transactions. 42. 902-910 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 加藤英晃: "ホイスラー型Fe_2VAl合金の熱電特性に及ぼすSi置換の効果"日本金属学会誌. 65. 652-656 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 鷲見裕史: "ホイスラー型Fe_2VAlの電気抵抗異常と磁性"日本金属学会誌. 65. 771-774 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Microplasticity of Copper Thin Films on Silicon Substrates"Philosophical Magazine Letters. 81. 743-750 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Effect of Vanadium Substitution on Strength Properties of Fe_3Al-based Alloys"Materials Science and Engineering A. 319-321. 368-371 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 松浦 仁: "擬ギャップ系Fe_2VAl合金の熱電特性に及ぼす元素置換効果"日本金属学会誌. 66. 767-771 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Soda: "High-Resolution Photoelectron Spectroscopy of Heusler-type Fe_2VAl Alloy"Journal of Synchrotron Radiation. 9. 233-236 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Novel Physical Properties of Heusler-type Fe_2VAl Compound"Recent Research Developments in Materials Science and Engineering. (印刷中). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Amplitude-Dependent Internal Friction in Copper Thin Films on Silicon Substrates"Materials Science and Engineering A. (印刷中). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Kato: "Electronic, Magnetic and Transport Properteis of (Fe_<1-x>V_x)_3Al Alloys"J.Phys.: Condens.Matter. Vol.12. 1769-1779 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Okamura: "Pseudogap Formation in the Intermetallic Compounds (Fe_<1-x>V_x)_3Al"Phys.Rev.Lett.. Vol.84. 3674-3677 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Kato: "Temperature Dependence of Electrical Resistivity in (Fe_<1-x>Ti_x)_3Al Alloys"J.Phys.: Condens.Matter. Vol.12. 9153-9162 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G.A.Botton: "Microstructural Evolution and Stability of (Fe_<1-x>V_x)_3Al Alloys in Relation to the Electronic Structure"Intermetallics. Vol.8. 1209-1214 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Unusual Electron Transport in Heulser-type Fe_2 VAl Confound"Intermetallics. Vol.8. 1233-1241 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Soda: "Magnetic Circular Dichroism at Transition Metal L_<2,3> Edges in D0_3-type (Fe_<1-x>Mn_x)_3Al Alloys"J.Synchrotron Rad.. Vol.8. 455-456 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Evaluation of Mechanical Properties of Tnin Films for LSI Interconnects"Microstructures and Functions of Materials for the 21st Century. 319-324 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Ohde: "Effect of Gas Transports in Metals on Negative Pressures in Water in Mo/Cu Berthelot Tubes"J.Phys.D : Appl.Phys.. Vol.34. 1717-1726 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Effect of Off-Stoichiometry on the Transport Properties of the Heusler-type Fe_2VAl Compound"Phys.Rev.B. Vol.63. 23303/1-4 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Electronic Structure and Transport Properties of Pseudogap System Fe_2VAl"Mater.Trans.. Vol.42. 902-910 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Kato: "Effect of Silicon Substitution on Thermoelectric Properties of Heusler-type Fe_2VAl Alloy"J.Japan Inst.Metals. Vol.65. 652-656 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Sumi: "Electrical Resistivity Anomaly and Magnetic Properties of Heusler-type Fe_2VAl Alloy"J.Japan Inst.Metals. Vol.65. 771-774 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Microplasticity of Copper Thin Films on Silicon Substrates"Philos.Mag.Lett.. Vol.81. 743-750 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Matsuura: "Doping Effects on Thermoelectric Properties of the Pseudogap Fe_2VAl System"J.Japan Inst.Metals. Vol.66. 767-771 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Soda: "High-Resolution Photoelectran Spectroscopy of Heusler-type Fe_2VAl Alloy"J.Synchrotron Rad.. Vol.9. 233-236 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Nishino: "Amplitude-Dependent Internal Friction in Copper Thin Films on Silicon Substrates"Mater.Sci.Eng.A. (in press). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 西 野 洋 一: "LSI配線用の金属薄膜の力学特性評価"材料の微細組織と機能性-21世紀に向けて-(日本学術振興会). -. 319-324 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y. Nishino: "Effect off Off-Stoichiometry on the Transport Properties of the Heusler-type Fe_2VAI Compound"Physical Review B. 63・23. 2333030-1-4 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y. Nishino: "Electronic Structure and Transport Propeties of Pseudogap System Fe_2VAI"Materials Transactions. 42・6. 902-910 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 西 野 洋 一: "擬ギャップ系Fe_2VAIのゼーベック効果"熱電変換シンポジウム2001論文集. -. 150-151 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y. Nishino: "Microplasticity of Copper Thin Films on Silicon Substrates"Philosophical Magazine Letters. 81・11. 743-750 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y. Nishino: "Effect of Vanadium Substitution on Strength Propeties of Fe_3Al-based Alloys"Journal of Materials Science and Engineering A. 319-321. 368-371 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Kato: "Electronic,Magnetic and Transport Properties of (Fe_<1-x>V_x)_3Al Alloys."Journal of Physics : Condensed Matter. 12・8. 1769-1779 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Okamura: "Pseudogap Formation in the Intermetallics (Fe_<1-x>V_x)_3Al."Physical Review Letters. 84・16. 3674-3677 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Kato: "Temperature Dependence of Electrical Resistivity in (Fe_<1-x>Ti_x)_3Al Alloys."Journal of Physics : Condensed Matter. 12・43. 9153-9162 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] G.A.Botton: "Microstructural Evolution and Stability of (Fe_<1-x>V_x)_3Al Alloys in Relation to the Electronic Structure."Intermetallics. 8・9-11. 1209-1214 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Nishino: "Unusual Electron Transport in Heusler-type Fe_2 VAl Compound."Intermetallics. 8・9-11. 1233-1241 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Soda: "Magnetic Circular Dichroism at Transition Metal L_<2,3> Edges in DO_3-type (Fe_<1-x>Mn_x)_3Al Alloys."Journal of Synchrotron Radiation. 8・2. 455-456 (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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