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Establishment of novel microscale surface treatment/processing technology with ultra-small plasma beam

Research Project

Project/Area Number 12450288
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionThe University of Tokyo

Principal Investigator

TERASHIMA Kazuo  Graduate School of Frontier Sciences, Department of Advanced Materials Science, The University of Tokyo, Associate Professor, 大学院・新領域創成科学研究科, 助教授 (30176911)

Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 2001: ¥7,100,000 (Direct Cost: ¥7,100,000)
Fiscal Year 2000: ¥7,900,000 (Direct Cost: ¥7,900,000)
Keywordsmicroscale plasma / VHF plasma / plasma optical emission spectroscopy / thermal plasma / cold plasma / microscale fabrication / VEFプラズマ / プラズマ発光分光 / RFマイクロプラズマ / ピエゾシステム / 発光分光 / 非平衡プラズマ
Research Abstract

In this project, we performed an establishment of novel microscale surface treatment/processing technology with ultrta-small plasma beam as followed.
(1) We generated various type small beam plasmas ranging from 2mm to 25μmφusing dc, ac, and VHF plasma generator. Especially, thermoelectron enhancede micrometer-scale plasma (TEMP), which had been proposed and developed by our group made it easy to generate a small size plasma. Examples of typical performances were as follows: (A) small size (from 2mm to 25μmφ). (B) multi probes (six). (C) low sustain power (1W).
(2) The various plasmas (gas : N2, O2, Ar, power : 0.1-30W, gas flow : 0-1000sccm, preasure : 7600-40torr) were characterized by optical emission spectroscopy, which shows the various plasma conditions, such as typical plasma temperatures of three plasmas, namely as thermal, cold, and interface plasma. For instance, the gas temperature of Ar gas at 760torr was about 4000-5000K.
(3) Using these ultra-small plasma beam, we succeeded various micro-processing as follows : (A) melting of metal (Fe, Al, Cu). (B) oxidization. (C) deposition (C-system).
Especially, due to the advance of matching performance, far from the plasma generating electric source, we could generate such small plasma and performe surface-treatment as mentioned above.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] 寺嶋和夫, 伊藤剛仁: "マイクロメータからナノメーター領域のプラズマの生成とその材料科学への応用"プラズマ・核融合学会誌. 76巻・5号. 471-476 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 伊藤剛仁, 寺嶋和夫: "マイクロメーターからナノ領域での超微細プラズマ発生技術"応用物理学会誌. 70巻・4号. 140-141 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 寺嶋和夫: "メゾ空間プラズマの材料表面処理への利用-プラズマチップ(集積プラズマデバイスを例にして)-"表面技術. 52巻・12号. 841-842 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Ito, K.Terashima: "Micrometer-scale very-high-frequency(VHF)plasma generation supported by thermoelectrons"Proc. 15^<th> Int. Conf. on Plasma Chemistry. 4巻. 1497-1502 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Ito, K.Terashima: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. (In perss). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Ito and K. Terashima: "Generation techniques of micro-/nanometer-scale plasmas"Oyobuturi.. 70-4. 448-449 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Ito and K. Terashima: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. 80-15 (in press). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Terashima and T. Ito: "Production of Micro-/Nanometer-Scale Plasmas and Its Application to Materials Science"Journal of Plasma and Fusion research. 76-5. 471-476 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Terashima: "Application of Mezzo-Space Plasma to Material Surface Treatment-Development of Plasma Chip"Hyoumen-gijyutu. 52-12. 841-842 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T. Ito, H. Nishiyama, Y. Shimizu, and K. Terashima: "Micrometer-scale very-high-frequency (VHF) plasma generation supported by thermoelectrons"Proc. 15th International Symposium on Plasma chemistry (ISPC). 4. 1497-1502

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Ito, K.Terashima: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. 80/15(In press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 伊藤剛仁, 寺嶋和夫: "マイクロメーターからナノ領域での超微細プラズマ発生技術"応用物理学会誌. 70巻・4号. 140-141 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 寺嶋和夫: "メゾ空間プラズマの材料表面処理への利用-プラズマチップ(集積プラズマプロセスデバイス装置)を例にして-"表面技術. 52巻12号. 841-842 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Ito, K.Terashima: "Micrometer-scale very-high-frequency (VHF) plasma generation supported by thermoelectrons"Proc.15^<th> Int. Conf. on Plasma Chemistry. 4. 1497-1502 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 寺嶋和夫,伊藤剛仁: "マイクロナータからナノメータ領域のプラズマ生成とその材料科学への応用"プラズマ・核融合学会誌. 76巻・5号. 471-476 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 伊藤剛仁,寺嶋和夫: "マイクロメータからナノメータ領域での極微細プラズマ発生技術"応用物理. 70巻・4号(印刷中). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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