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Development and application of surface analysis apparatus using electron-ion coincidence spectroscopy

Research Project

Project/Area Number 12555007
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 表面界面物性
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

MASE Kazuhiko  High Energy Accelerator Research Organization, Institute of Materials Structure Science, Associate Professor, 物質構造科学研究所, 助教授 (40241244)

Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,100,000 (Direct Cost: ¥13,100,000)
Fiscal Year 2002: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2001: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2000: ¥8,000,000 (Direct Cost: ¥8,000,000)
KeywordsSurface analysis / Synchrotron radiation / Electoron-ion coincidence spectroscopy / Auger spectroscopy / X-ray Photoelectron spectroscopy / Ion mass spectroscopy / 電子-イオン・コインシデンス分光 / オージュ電子分光 / イオン質量分析
Research Abstract

In 2000-2001 fiscal year we have developed a new electron-ion coincidence (EICO) apparatus composed of a coaxial symmetric mirror electron energy analyzer proposed by Kai Siegbahn, a compact time-of-flight ion mass spectrometer and a positioning mechanism. Auger electron photoion coincidence (AEPICO) measurements of condensed H_2O at 4α_1 ← O 1s resonance showed that time required for a certain coincidence ioin counts is reduced by one order of magnitude in comparison with the previous EICO analyzer using a CMA. With the apparatus we studied fluorination of Si(111) surfaces by XeF_2 using Si 2p - F^+ photbelectron photoion coincidence (PEPICO) and Si 2p photoelectron sjpectroscopy (PES), and found that fluorination of the top-most Si layer proceeds after the initial XeF_2 exposures, while fluorination of the second Si layer starts in 6400-9600 L. In 2002 fiscal year, we have developed a new polar-angle-resolved compact time-of-flight ion mass spectrometer (TOF-MS). The TOF-MS consists of an electric field shield, an ion drift electrode with three meshes, and micro channel plates (MCP) with three concentric anodes. Using it we developed electron - polar-angle-resolved-ion coincidence analjyzer, which offers information on kinetic energy and desorption polar angle of coincidence ions. Its performance was evaluated by measuring H^+ yield spectra and Auger electron - H^+ coincidence spectra of a condensed H_2O. We have written three review articles on EICO spectroscopy. We also reported a PEPICO study on site-specific ion desorption of CF_3CD(OH)CH_3 chemisorbed on Si(100), and a EICO study on H^+ desorption induced by shake up and shake off ionizations of O 1s of H_2O dissociatively chemisorbed op Si(100).

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] 漁剛志, 吉田啓晃, 下條竜夫, 小林英一, 間瀬一彦, 長岡伸一, 田中健一郎: "高感度同軸対称鏡型電子エネルギー分析器の製作と評価、コインシデンス分光への応用"真空. 46. 377-384 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiichi Kobayashi, Kouji Isari, Kazuhiko Mase: "Excitation site-specific ion desorption study of Si(111) surfaces fluorinated by XeF_2 using photoelectron photoion coincidence spectroscopy"Surface Science. 528. 255-260 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kouji Isari, Ejichi Kobayashi, Kazuhiko Mase, Kenichiro Tanaka: "Construction and evaluation of an electron-ion coincidence apparatus using a large transmission coaxially symmetric mirror electron energy analyzer"Surface Science. 528. 261-265 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Nagaoka, K.Mase, A.Nakamura, M.Nagao, J.Yoshinobu, S.Tanaka: "Site-specific fragmentation caused by core-level photoionization : effect of chemisorption"Journal of Chemical Physics. 117. 3961-3971 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Tanaka, K.Mase, S.Nagaoka, M.Nagasono, K.Kamada: "Ion desorption induced by core-level excitation of H_2O/Si(100) : Evidence of desorption due to the multielectron excitation/decay"Journal of Chemical Physics. 117. 4479-4488

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Mase, M.Nagasono, S.Tanaka, T.Sekitani, S.Nagaoka: "Ion Desorption from Molecules Condensed at Low Temperature : A Study with Electron-Ion Coincidence Spectroscopy Combined with Synchrotron Radiation"Fizika Nizkikh Temperatur. 29. 243-258 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiichi Kobayashi, Kouji Isari, Masanobu Mori, Kazuhiko Mase, Koji Okudaira, Kenichiro Tanaka, Nobuo Ueno: "Construction and Evaluation of Polar-Angle-Resolved Compact Time-of-Flight Ion Mass Spectrometer, and Its Application for Electron-Ion Coincidence Spectroscopy"Journal of the Vacuum Society of Japan, submitted. (in Japanese).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kouji Isari, Hiroaki Yoshida, Tatsuo Gejo, Eiichi Kobayashi, Kazuhiko Mase, Shin-ichi Nagaoka, Kenichiro Tanaka: "Construction and Evaluation of Coaxially Symmetric Mirror Electron Energy Analyzer with High Sensitivity, and Its Application to Coincidence Spectroscopy"Journal of the Vacuum Society of Japan, submitted (in Japanese). 46. 377-384 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiichi Kobayashi, Kouji Isari and Kazuhiko Mase: "Excitation site-specific ion desorption study of Si(111) surfaces fluorinated by XeF_2 using photoelectron photoion coincidence Spectroscopy"Surf. Sci.. 528. 255-260 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kouji Isari, Eiichi Kobayashi, Kazuhiko Mase and Kenichiro Tanaka,: "Construction and evaluation of an electron-ion coincidence apparatus using a large transmission coaxially symmetric mirror electron energy analyzer"Surf. Sci.. 528. 261-265 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Nagaoka, K. Mase, A. Nakamura, M. Nagao, J. Yoshinobu, and S. Tanaka: "Site-specific fragmentation caused by core-level photoionization: effect of chemisorption"J. Chem. Phys.. 117. 3961-3971 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Tanaka, K. Mase, S. Nagaoka, M. Nagasono, and K. Kamada: "Ion desorption induced by core-level excitation of H_2O/Si(100) : Evidence of desorption due to the multielectron excitation/decay"J. Chem. Phys.. 117. 4479-4488 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Mase, M. Nagasono, S. Tanaka, T. Sekitani, and S. Nagaoka,: "Ion Desorption from Molecules Condensed at Low Temperature : A Study with Electron-Ion Coincidence Spectroscopy Combined with Synchrotron Radiation"Fizika Nizkikh Temperatur (Low Temperature Physics 29, 243-258 (2003)). 29. 321-341 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kazuhiko Mase: "X-ray stimulated photochemical reactions in X-ray absorption Spectroscopy -XAFS and its applicationsedited by Toshiaki Ohta (Industrial Publishing & Consulting, Inc., Tokyo, 2002) (in Japanese)."269-275

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin-ichiro Tanaka and Kazuhiko Mase: "Studies on the Core-level-excitatton-induced Ion Desorption from Solid Surfaces"Journal of the Surface Science Society of Japan (in Japanese).. 23. 753-758 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] E.Kobayashi, K.Isari, K.Mase: "Excitation site-specific ion desorption study of Si(111) surfaces fluorinated by XeF2 using photoelectron photoion coincidence spectroscopy"Surf.Sci.. 528. 255-260 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Isari, E.Kobayashi, K.Mase, K.Tanaka: "Construction and evaluation of an electron-ion coincidence apparatus using a large transmission coaxially symmetric mirror electron energy analyzer"Surf.Sci.. 528. 261-265 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Mase, M.Nagasono, S.Tanaka, T.Sekitani, S.Nagaoka: "Ion desorption from molecules condensed at low temperature : A study with electron-ion coincidence spectroscopy combined with synchrotron radiation"Fizika Nizkikh Temperatur. 29. 321-341 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 間瀬一彦: "「超高真空仕様CMA(円筒鏡面型電子エネルギー分析器)製作技術」"Kanae. 13. 18-29 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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