| Project/Area Number |
12555028
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Osaka University |
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Principal Investigator |
SHIBUTANI Yoji Osaka Univ., Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (70206150)
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| Co-Investigator(Kenkyū-buntansha) |
TOMITA Yoshihiro Kobe Univ., Faculty of Engineering, Professor, 工学部, 教授 (10031147)
SUGETA Atsushi Osaka Univ., Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (60162913)
KOYAMA Atsuhiro Osaka Univ., Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (40324800)
KAWAKAMI Takashi Toshiba Co., Corporate Research & Development Center, Research manager, システムラボラトリー, 研究主幹
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| Project Period (FY) |
2000 – 2001
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| Project Status |
Completed (Fiscal Year 2001)
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| Budget Amount *help |
¥8,700,000 (Direct Cost: ¥8,700,000)
Fiscal Year 2001: ¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2000: ¥5,400,000 (Direct Cost: ¥5,400,000)
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| Keywords | Scanning Electron Acoustic Microscopy / Ultrasonic Wave Signal / Nondestructive Internal Observation / Dislocation Network / Scanning Erection Microscope / Nano-indentation |
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| Research Abstract |
In order to investigate internal structures generated by self-organized dislocation network in various kinds of materials and loading states, we have developed a nondestructive observation system using acoustic wave by the electron beam. In this system, heat wave is firstly generated on the surface of the specimen by the irradiation of blanking and focused electron beam of the Scanning Electron Microscope (SEM). Then the heat wave is transferred into sound wave, and it propagates within the specimen as elastic wave. Difference of the local thermal property of the material is converted into an electric signal by a piezoelectric transducer (PZT) attached onto the back side of the specimen. This system is called the scanning electron acoustic microscopy (SEAM). It makes us enable to observe both the surface of the specimen by SEM mode and the nondestructive inside structure by SEAM. A commercial amplifier is not enough to detect the electric signals by the PZT, because these signals are very feeble and high frequency. We developed a newly head amplifier using transistors. This head amplifier transforms an impedance and amplifies the electric signals. And we used an instrumentation amplifier to eliminate the noises from detected signals. Then the detected signals are amplified by a lock-in amplifier synchronized to the blanking frequency of an electron beam. The performance of this developed head amplifier seems to be excellent and it makes us enable to detect the electron acoustic signals sufficiently.
We obtained ultrasonic signal by the SEAM using the Diamond Like Carbon (DLC) thin film laminated on single crystalline silicon wafer. And we developed a portrayal system that draws these signals as two dimensional phase-contrast images on the display.
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