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Fabrication of Si-based room temperature infrared light-emitting diodes using β-FeSi_2

Research Project

Project/Area Number 12555084
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Tsukuba

Principal Investigator

SUEMASU Takashi  University of Tsukuba, University of Tsukuba Institute of Applied Physics, Lecturer (40282339)

Co-Investigator(Kenkyū-buntansha) HASEGAWA Fumio  University of Tsukaba, Institute of Applied Physics, Professor (70143170)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥5,100,000 (Direct Cost: ¥5,100,000)
Fiscal Year 2002: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2001: ¥1,500,000 (Direct Cost: ¥1,500,000)
Fiscal Year 2000: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsIron disilicide / photoluminescence / light-emitting diode / electroluminescence / 透過型電子顕微鏡 / 電流注入
Research Abstract

The purpose of this work is to fabricate infrared light-emitting diodes (LEDs) using semiconducting β-FeSi_2 which operate at room temperature (RT). In the term of this project, we have realized RT 1.6μm electroluminescence (EL) from p-Si/β-FeSi_2 particles/n-Si LEDs for the first time. It was found that the luminescence from β-FeSi_2 particles embedded in Si was very sensitive to the following growth conditions.
1. The photoluminescence (PL) intensity of β-FeSi_2 strongly depends on MBE-Si growth temperature for embedding β-FeSi_2 in Si. When the Si overlayer was grown at lower temperatures of 400-500℃, the PL was intense. In contrast, the PL was very weak and was difficult to detect when it was grown at higher temperatures of 600-750℃. It was found that about 9% tensile strain was introduced into the particles in the [100] direction of β-FeSi_2, making the β-FeSi_2 a direct band gap semiconductor.
2. PL was found to be sensitive to the size of β-FeSi_2 particles embedded in Si matrix. The PL intensity increased with the size of β-FeSi_2, but the intensity of 1.2-1.4μm broad PL also increased for samples with β-FeSi_2 bigger than 200nm. Transmission electron microscopy observation revealed that dislocations were introduced around the particles for those samples.
3. PL was found to improve significantly by optimizing p-Si growth temperature and its boron concentration. Dislocation and point defects were found to be generated by oxygen incorporated in to the heavily boron-doped Si layer during the 14h of thermal annealing at 900℃, and are suggested to be responsible for the quenching of the PL.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (44 results)

All 2003 2002 2001 2000 Other

All Journal Article (22 results) Publications (22 results)

  • [Journal Article] Influence of boro-doped Si cap layer on the photoluminescence of β-FeSi_2 particles embedded in Si matrix2003

    • Author(s)
      C.Li
    • Journal Title

      Journal of Applied Physics Vol.94, No.3

      Pages: 1518-1520

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Influence of boron-doped Si cap layer on the photoluminescence of β-FeSi_2 particles embedded in Si matrix2003

    • Author(s)
      C.Li
    • Journal Title

      Journal of Applied Physics Vol.94, No.3

      Pages: 1518-1520

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Investigation of direct and indirect bandgaps of [100]-oriented nearly strain-free β-FeSi_2 films grown by molecular beam epitaxy2002

    • Author(s)
      K.Takakura
    • Journal Title

      Applied Physics Letters Vol.80,No.4

      Pages: 556-558

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Investigation of the energy band structure of orthorhombic BaSi_2 by optical and electrical measurements and theoretical calculations2002

    • Author(s)
      T.Nakamura
    • Journal Title

      Applied Physics Letters Vol.81,No.6

      Pages: 1032-1034

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Comparison of donor and acceptor levels in undoped, high quality β-FeSi_2 films grown by MBE and multi-layer method2002

    • Author(s)
      K.Takakura
    • Journal Title

      International Journal of Modern Physics B Vol.16,Nos.28&29

      Pages: 4314-4317

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] 環境に優しい光半導体β-FeSi_2の現状と将来展望2002

    • Author(s)
      末益崇
    • Journal Title

      まてりあ 第41巻,5号

      Pages: 342-347

    • NAID

      10010901576

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Investigation of direct and indirect bandgaps of [100]-oriented nearly strain-free β-FeSi_2 films grown by molecular beam epitaxy2002

    • Author(s)
      K.Takakura
    • Journal Title

      Applied Physics Letters Vol.80, No.4

      Pages: 556-558

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Investigation of the energy band structure of orthorhombic BaSi_2 by optical and electrical measurements and theoretical calculations2002

    • Author(s)
      T.Nakamura
    • Journal Title

      Applied Physics Letters Vol.81, No.6

      Pages: 1032-1034

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Comparison of donor and acceptor levels in undoped, high quality β-FeSi_2 films grown by MBE and multi-layer method2002

    • Author(s)
      K.Takakura
    • Journal Title

      International Journal of Modern Physics B Vol.16, Nos.28&29

      Pages: 4314-4317

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Present Status and Future Prospects of β-FeSi_2 : An Environmentally Friendly Semiconductors2002

    • Author(s)
      T.Suemasu
    • Journal Title

      Materia Vol.41, No.5

      Pages: 342-347

    • NAID

      10010901576

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Si結晶中に埋込まれたFeSi_2のTEM観察2001

    • Author(s)
      知京豊裕
    • Journal Title

      まてりあ 40巻、12号

      Pages: 1013-1013

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Direct Growth of [100)-Oriented β-FeSi_2 Films on Si(001) Substarates by Molecular Beam Epitaxy2001

    • Author(s)
      N.Hiroi
    • Journal Title

      Japanese Journal of Applied Physics Vol.40,No.10A

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Influence of Si growth temperature for embedding β-FeSi_2 and resultant strain in β-FeSi_2 on light emission from p-si/ β-FeSi_2 particles/n-Si liht-emitting diodes2001

    • Author(s)
      T.Suemasu
    • Journal Title

      Applied Physics Letters Vol.79,No.12

      Pages: 1804-1806

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Optical absorption spectra of β-FeSi_2 under pressure2001

    • Author(s)
      K.Takarabe
    • Journal Title

      physics status solidi (b) Vol.223

      Pages: 259-263

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] 鉄シリサイドβ-FeSi_2を活性領域とするSi系LEDの室温発光2001

    • Author(s)
      長谷川文夫
    • Journal Title

      真空ジャーナル 75号

      Pages: 5-9

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Direct Growth of [100]-Oriented β-FeSi_2 Films on Si(001) Substrates by Molecular Beam Epitaxy2001

    • Author(s)
      N.Hiroi
    • Journal Title

      Japanese Journal of Applied Physics Vol.40, No.10A

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Influence of Si growth temperature for embedding β-FeSi_2 and resulatant strain in β-FeSi_2 on light emission from p-Si/β-FeSi_2 particles/n-Si light-emitting diodes2001

    • Author(s)
      T.Suemasu
    • Journal Title

      Applied Physics Letters Vol.79, No.12

      Pages: 1804-1806

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Optical absorption spectra of β-FeSi_2 under pressure2001

    • Author(s)
      K.Takarabe
    • Journal Title

      physica status solidi (b) Vol.223

      Pages: 259-263

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Room Temperature 1.6μm Electrotuminescence from a Si-Based Light Emitting Diode with β-FeSi_2 Active Region2000

    • Author(s)
      T.Suemasu
    • Journal Title

      Japanese Journal of Applied Physics Vol.39,No.10B

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Room Temperature 1.6μm Electroluminescence from a Si-Based Light Emitting Diode with β-FeSi_2 Active Region2000

    • Author(s)
      T.Suemasu
    • Journal Title

      Japanese Journal of Applied Physics Vol.39, No.10B

    • NAID

      110004093435

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Conduction type and defect levels of β-FeSi_2 films grown by MBE with different Si/Fe ratios

    • Author(s)
      N.Seki
    • Journal Title

      To be pubiished in Materiais Science in Semiconductor Processing (刊行予定)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Journal Article] Conduction type and defect levies of β-FeSi_2 films grown by MBE with different Si/Fe ratios

    • Author(s)
      N.Seki
    • Journal Title

      To be published in Materials Science in Semiconductor Processing

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Takakura: "Investigation of direct and indirect bandgaps of [100]-oriented nearly strain-free β-FeSi_2 films grown by molecular beam epitaxy"Applied Physics Letters. Vol.80,No.4. 556-558 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 知京豊裕: "Si結晶中に埋込まれたFeSi_2のTEM観察"まてりあ. 40巻・12号. 1013-1013 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Hiroi: "Direct Growth of [100]-Oriented β-FeSi_2, Films on Si(001) Substarates by Molecular Beam Epitaxy"Japanese Journal of Applied Physics. Vol.40,No.10 A. L1008-L1011 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Suemasu: "Influence of Si growth temperature for embedding β-FeSi_2, and resultant strain in β-FeSi_2 on light emission from p-Si/β-FeSi_2 particles/n-Si light-emitting diodes"Applied Physics Letters. Vol.79,No.12. 1804-1806 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takarabe: "Optical absorption spectra of β-FeSi_2 under pressure"physics status solidi (b). Vol.223. 259-263 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 長谷川文夫: "鉄シリサイドβ-FeSi_2を活性領域とするSi系LEDの室温発光"真空ジャーナル. 75号. 5-9 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takarabe: "Optical porperties of β-FeSi_2 under pressure"Physical Review B. Vol.65. 165125 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] L Nakamura: "Investigation of the energy band structure of orthorhombic BaSi_2 by optical and electrical measurements and theoretical calculations"Applied Physics Letters. Vol.81,No.6. 1032-1034 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takakura: "Comparison of donor and acceptor levles in undoped, high quality (β-FeSi_2 films grown by MBE and multi-layer method"International Journal of Modern Physics B. Vol.6,No.28&29. 4314-4317 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takakura: "Investigation of direct and indirect bandgaps of [100]-oriented nearly strain-free β-FeSi_2 films grown by molecular beam epitaxy"Applied Physics Letters. Vol.80,No.4. 556-558 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 知京豊裕: "Si結晶中に埋込まれたFeSi_2のTEM観察"まてりあ. 40巻、12号. 1013-1013 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Hiroi: "Direct Growth of [100]-Oriented β-FeSi_2 Films on Si(001) Substarates by Molecular Beam Epitaxy"Japanese Journal of Applied Physics. Vol.40,No.10A. L1008-L1011 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Suemasu: "Influence of Si growth temperature for embedding β-FeSi_2 and resultant strain in β-FeSi_2 on light emission from p-Si/β-FeSi_2 particles/n-Si light-emitting diodes"Applied Physics Letters. Vol.79,No.12. 1804-1806 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takarabe: "Optical absorption spectra of β-FeSi_2 under pressure"physics status solidi(b). Vol.223. 259-263 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 長谷川文夫: "鉄シリサイドβ-FeSi_2を活性領域とするSi系LEDの室温発光"真空ジャーナル. 75号. 5-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Suemasu: "Room Temperature 1.6μm Electroluminescence from a Si-Based Light Emitting Diode with β-FeSi_2, Active Region"Japanese Journal of Applied Physics. Vol.39,No.10B. L1013-L1015 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Suemasu: "Dependence of photoluminescence from β-FeSi_2 and induced deep levels in Si on the size of embedded β-FeSi_2 balls in Si "Thin Solid Films. Vol.381. 209-213 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Suemasu: "Optimum annealing condiction for 1.5μm photoluminescence from reactive deposition epitaxy β-FeSi_2, balls embedded in Si crystals"Journal of Luminescence. Vol.87-89. 528-531 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Suemasu: "分子線エピタキシー法によるβ-FeSi_2球の中埋込み構造作製と高温アニールによる赤外フォトルミネッセンスの増大"レーザー研究. Vol.28,No.2. 99-102 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 末益崇: "熱反応堆積法を利用した赤外発光β-FeSi_2球及び高移動度β-FeSi_2膜の作製:高温アニールによる特性改善"材料科学. Vol.37,No.1. 16-20 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 末益崇: "環境にやさしい直接遷移型半導体β-FeSi_2の研究の現状と将来展望"応用物理. Vol.39,No.7. 804-810 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 末益崇: "鉄シリサイドβ-FeSi_2を活性領域とするSi系LEDの室温発光"真空ジャーナル. Vol.75(掲載予定). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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