• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of integrated optical measurement systems having layered structures

Research Project

Project/Area Number 12555112
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Measurement engineering
Research InstitutionTohoku University

Principal Investigator

SASAKI Minoru  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (70282100)

Co-Investigator(Kenkyū-buntansha) ESASHI Masayoshi  Tohoku University, Nevi Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)
HANE Kazuhiro  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50164893)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 2002: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 2001: ¥2,000,000 (Direct Cost: ¥2,000,000)
Keywordsphotodiode / integration / stacking structure / interferometer / standing wave / resonant cavity / encoder / grating / 直接接合
Research Abstract

Some integrated optical measurement systems are developed for realizing the small size but having practical performance. The research is both the development of elements and the packaging of optical setup.
Laser interferometer: By introducing the photodiode with the thickness near to the optical wavelength, the standing wave detection-type interferometer is realized at the volume of fingertip (φ 〜 2.5cm). The optical setup is realized by stacking a polarizer, a quarter 2 plate, and the thin film photodiode on the housing of the collation lens of the laser diode. The interferometer signal magnitude is 1 μ A detecting the movement at the speed of 9cm/s. This is near to the practical specification. The standing wave in the speckle pattern is also measured realizing the measurement of the sample having rough surface. Now. Fabry-perot resonant cavity is combined for increasing the signal intensity and for purifying the interference signal. The effect is clearly observed, and tuning to the accurate resonant condition is aimed.
Optical encoder: The grating can be combined on the Si microstructure realizing new types of encoder. The imaging type encoder has the problem that the optical setup becomes complicated with the increasing number of grating. Since the grating can be integrated at the aligned position, the alignment problem is reduced realizing the automatic setting at the position serving the high image contrast. Additionally, the modulated pitch of the detection grating can cancel the higher order noise. The total encoder system is demonstrated combining with the LED chip and the IC chip. At present, the emitting field is spatially narrow and optical averaging effect is limited. The illumination optics is under the revision.
As scheduled, optical systems are demonstrated clearing the fundamental performance by stacking planer elements. Sensors are confirmed to be effective for realizing the integrated sensor systems.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (27 results)

All Other

All Publications (27 results)

  • [Publications] Xiaoyu Mi, Minoru Sasaki, Kazuhiro Hane: "Ultra-thin film photodiodes for use in position sensors"Jouranl of Modern Optics. 48・1. 55-66 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X.Mi, M.Sasaki, T.Hirano, K.Hane: "Interferometers based on standing wave detection using thin film photodiodes"電気学会論文誌. 121-E・9. 489-495 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Hane, T.Endo, Y.Ito, M.Sasaki: "A compact optical encoder with micromachined photodetector"Journal of Optics A. 3. 191-195 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 家城淳, 羽根一博, 横山将史, 松井圭司, 梨木正行, 佐々木実: "変調型フォトダイオードアレイを用いた絶対位置検出光エンコーダ"日本機械学会論文集C偏. 67・2. 74-79 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Hane, T.Endo, M.Ishimori, Y.Ito, M.Sasaki: "Integration of grating-type encoder using Si micromachining"Sensors and Actuators A. 97-98. 136-146 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyungsuck Cho編(寄稿:羽根一博, 佐々木実): "OPTO-MECHATRONIC SYSTEMS HANDBOOK (ISBN 0-8493-1162-4)"CRC Press. 631 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Xiaoyu Mi, Minoru Sasaki, Kazuhiro Hane: "Ultra-thin film photodiodes for use in position sensors"Journal of Modern Optics. 48-1. 55-66 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X. Mi, M. Sasaki, T. Hirano, K. Hane: "Interferometers based on standing wave detection using thin film photodiodes"Trans. IEE of Japan. 121-E-9. 489-495 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hane, T. Endo, Y. Ito, M. Sasaki: "A compact optical encoder with micromachined photodetector"The Transactions of The Japan Society of Mechanical Engineers C. 67-2. 74-79 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Atsushi IEKI, Kazuhiro HANE, Masafumi YOKOYAMA, Kenji MATSUI, Masayuki NASHIKI, Minoru SASAKI: "An Absolute Optical Encoder using Modulated-Photo-Diode Arrays"The Transactions of The Japan Society of Mechanical Engineers C. 67-2. 74-79 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K Hane, T. Endo, M. Ishimori, Y. Ito, M. Sasaki: "Integration of grating-type encoder using Si micromachining"Sensors and Actuators A. 97-98. 136-146 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyungsuck Cho Edition (Contribution: Kazuhiro Hane, Minoru Sasaki): "OPTO・MECHATRONIC SYSTEMS HANDBOOK"CRC Press (ISBN 0-8493-1162-4). 25 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Hane, T.Endo, M.Ishimori, Y.Ito, M.Sasaki: "Integration of grating-type encoder using Si micromachining"Sensors and Actuators A. 97-98. 136-146 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Sasaki, F.Nakai, X.Mi, K.Hane: "Thin Film Photodiode with Resonant Cavity for Increasing Signal of Standing Wave Detection Type Interferometer"2002 IEEE/LEOS International Conference on Optical MEMS. 25-26 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 鎌田竜二, 見田村宗雄, 金森義明, 佐々木実, 伊藤義規, 羽根一博: "投影型マイクロエンコーダの集積度向上"第63回応用物理学会学術講演会 講演予稿集 24p-ZN-5. No.3. 870 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Hyungsuck Cho 編(寄稿:羽根一博, 佐々木実): "OPTO-MECHATRONIC SYSTEMS HANDBOOK(ISBN 0-8493-1162-4)"CRC Press. 631 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] ミイシャオユウ, 佐々木実, 羽根一博: "正弦波信号が得られる定在波検出型レーザ干渉計"第49回応用物理学関係連合講演会. (発表予定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Xiaoyu Mi, Minoru Sasaki, Kazuhiro Hane: "Ultra-thin epitaxial Si photodiode for use in interferometers detecting standing wave(PSH-01-6)"電子学会研究会資料, センサ・マイクロマシン準部門総合研究会. 27-32 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Hane, M.Sasaki: "Transmission-Type Optical Sensors Fabricated by Si Micromachining"Digest of Technical Papers, the 11^<th> International Conference on Solid-State Sensors and Actuators. Vol.1. 524-527 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Hane, T.Endo, M.Sasaki: "Si Micromachined Optical Encoder Based on Grating Imaging"Digest of Technical Papers, the 11^<th> International Conference on Solid-State Sensors and Actuators. Vol.1. 552-555 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] X.Mi, M.Sasaki, T.Hirako, K.Hane: "Interferometers based on standing wave detection using thin film photodiodes"電気学会論文誌E. 121-E. 489-495 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Hane, T.Endo, Y.Ito, M.Sasaki: "A compact optical encoder with micromashined photodetector"Journal of Optics A. 3. 191-195 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 家城淳, 羽根一博, 横山省治将史, 松井圭司, 梨木政行, 佐々木実: "変調型フォトダイオードアレイを用いた絶対位置検出光エンコーダ"日本機械学会論文集C偏. 67. 74-79 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Xiaoyu Mi,Minoru Sasaki,Kazuhiro Hane: "Ultra-thin film photodiodes for use in position sensors"Journal of Modern Optics. 48・1. 55-66 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 遠藤哲生,佐々木実,伊藤善規,羽根一博: "透過格子フォトダイオードを用いた投影型マイクロエンコーダ(II)"第61回応用物理学会学術講演会講演予稿集. 872-872 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 佐々木実,羽根一博: "透過型フォダイオードの開発と光計測"電気学会研究会資料マイクロマシン・センサシステム研究会MSS-00-1〜6. 23-27 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Sasaki,X.Mi,T.Hirano,K.Hane: "Interferometers Detecting the Standing Wave"Technical Digest of the 17th Sensor Symposium. 141-146 (2000)

    • Related Report
      2000 Annual Research Report

URL: 

Published: 2001-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi