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Fabricatio of Photonic Devices Using Photosensitive Gel Films and Their Properties

Research Project

Project/Area Number 12555179
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Inorganic materials/Physical properties
Research InstitutionKinki University

Principal Investigator

TOHGE Noboru  Kinki Univ., Fac.Sci.Eng., Professor, 理工学部, 教授 (00081315)

Co-Investigator(Kenkyū-buntansha) NAKAMURA Koichiro  Nippon Sheet Glass Co., Ltd, Kansai Res.Cent, 関西センター, 主任研究員
NISHII Jyun-ichi  Aist Kansai, Photo.Res.Inst., Reader, 産業技術総合研究所・関西センター・光技術研究部門, 室長
NOMA Naoki  Kinki Univ., Fac, Sci.Eng., Lecturer, 理工学部, 講師 (70208388)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 2001: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2000: ¥3,800,000 (Direct Cost: ¥3,800,000)
KeywordsSol-Gel Method / Chemical Modification / Photosensitivity / Fine-Patterning / Diffraction Grating / Luminescent Film / Ferroelectric Material / Antireflection Effect / 回析格子 / 強誘電体 / 反射防止膜 / ゾル-ゲル法 / 蛍光膜 / 強誘電体膜 / 無機・有機ハイブリッド
Research Abstract

1)Fabrication of PZT Films on ITO-Coated Substrate by the Chemical Modification Method : PZT films were fabricated on ITO-coated silica glass stubstrates by the chemical modification method and their electrical properties were studied. The properties of the PZT films fabricated were found depend on the oxygen partial pressure when ITO films had been prepared by RF magnetron sputtering.
2)Preparation of Photosensitive Gel Films Containing Eu^<3+> : Luminescent patterns could be fabricated by UV-irradiation and leaching for the photosensitive gel films containing Eu^<3+>. Correlation between luminescent properties and using matrix were also discussed.
3)Fabrication of Two-Dimensional Gratings and Their Antireflection Effects : Two-dimensional (2D) surface-relief gratings have been fabricated by the two-beam interference method on photosensitive gel films. The formation of 2D-grating of island type on a silica glass substrate substantially reduced the reflection at its surface in a waveleng … More th range of 1.3 to 2.6 mm.
4)Effects of Methacrylic Acid on the Photosensitivity of Chemically Modified Gel Films : It has been found that the photosensitive gel films obtained from Zr-alkoxide modified with β-diketone and methacrylic acid can be thicker than the gel films without methacrylic acid.
5)Preparation of Photosensitive ZrO_2 Gel Films Using Hydroxyl-sustituted Aromatic Ketones : In order to develop new photosensitive gel films, ZrO_2 gel films were prepared from zirconlum butoxide chemically modified with hydroxyl-substituted aromatic ketones by the sol-gel method. The gel film obtained absorbed light at around 400 nm. For the gel films, line and circle patterns could be fabricated by He-Cd laser beam irradiation.
6)Selective Coloration of Photosensitive ZrO_2 Gel Films : A selective coloration process has been newly developed utilizing photosensitive gel films. The dye-containing SiO_2 gel film on the unirradiated part of the ZrO_2 gel film remained, while that on the irradiated part was removed upon rinsing.
7)Optical Absorption and Electronic State of Chemically Modified Ti-Alkoxides : Electronic state of titanium alkoxides stabilized with β-diketones which had various substituents was calculated by the DV-X α cluster method. The origin of the optical absorption and the mechanism of the decomposition reaction of alkoxides with irradiation of light were discussed. Less

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] K.Kintaka, J.Nishii, N.Tohge: "Micropatterning of Photosensitive Gel Films Using the Two Ultraviolet Beam Interference Method"SPIE Proc.Sol-Gel Optics V. 3943. 38-46 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Tada, A.Hattori, Y.Tokihisa, K.Imai, N.Tohge, S.Ito: "A Patterned TiO_2/SnO_2 Bilayer Type Photocatalyst"J.Phys.Chem.B. 104. 4585-4587 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Tohge, K.Yamada, N.Noma: "Selective Coloration of Photosensitive ZrO_2 Gel Films"J.Ceram.Soc.Jpn.. 109. 359-362 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 峠 登: "ゾルーゲル法によるマイクロパターニング"セラミックス. 37. 161-164 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Tohge, M.Hasegawa, N.Noma K.Kintaka, J.Nishii: "Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Films and Their Characterization"J.Sol-Gel Sci.Technol. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J.Nishii, K.Kintaka, N.Tohge, M.Hasegawa, N.Noma, A.Mizutani, H.Kikuta: "Low Reflection Microstructure Formed by Sol-Gel Process"J.Sol-Gel Sci.Technol. (投稿中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Kintaka, J. Nishii and N. Tohge.: "Micropatterning of Photosensitive Gel Films Using the Two Ultraviolet Beam interference Method"SPIE Proc. Sol-Gel Optics V. 3943. 38-46 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Tada, A. Hattori, Y. Tokihisa, K. Imai, N. Tohge and S. Ito: "A patterned T1O2/SnO2 Bilayer Type Photocatalyst"J. Phys. Chem. B. 104. 4585-4587 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Tohge, K. Yamada and N. Noma: "Selective Coloration of Photosensitive ZrO2 Gel Films"J. Ceram. Soc. Jpn. 109. 359-362 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Tohge: "Micropatterning by the Sol-Gel Process"Bull. Ceram. Soc. Jpn. 37. 161-164 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N. Tohge, M. Hasegawa, N. Noma, K. Kintaka and J. Nishii: "Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Filmes and Their Characterization"J. Sol-Gel Sci. Technol.. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] J. Nishii, K. Kintaka, N. Tohge, M. Hasegawa, N. Noma, A. Mizutani and H. Kikuta: "Low Reflection Microstructure Formed by Sol-Gel Process"(Submitted for publication in Appl. Opt).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] N.Tohge, H.Tada, S.Ito: "Photocatalytic Properties of a Patterned TiO_2/SnO_2 Bilayer Prepared Using Photosensitive TiO_2 Gel Films"Materials Science for the 21th Century. Vol.B. 130-133 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Hattori, Y.Tokihisa, H.Tada, N.Tohge, S.Ito, et al.: "Patterning Effect of a Sol-Gel TiO_2 Overlayer on the Photocatalytic Activity of a TiO_2/SnO_2 Bilayer-Type Photocatalyst"J.Sol-Gel Sci.Technol.. Vol.122,No.1/2. 53-61 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Tohge, M.Hasegawa, N.Noma, K.Kintaka, J.Nishii: "Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Films and Their Characterization"J.Sol-Gel Sci.Technol.. (印刷中).

    • Related Report
      2001 Annual Research Report
  • [Publications] J.Nishii, K.Kintaka, T.Tohge, N.Noma, et al.: "Low-Reflection Microstructure by Sol-Gel Process"Appl.Opt.. (投稿中).

    • Related Report
      2001 Annual Research Report
  • [Publications] 峠 登: "ゾルーゲル法によるマイクロパターニング"セラミックス. 37巻3号. 161-164 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Tohge,R.Ueno,F.Chiba,K.Kintaka and J.Nishii: "Characteristics of Diffraction Gratings Fabricated by the Two-Beam Interference Method Using Photosensitive Hybrid Gel Films"J.Sol-Gel Sci.Technol.. 19. 119-123 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 峠登(分担執筆): "新しいフォトニクス時代の材料とデバイス"ティー・アイ・シー. 412 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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