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Development of Versatile Mechanical Testing Machine for Sub-Micro-Sized Specimens

Research Project

Project/Area Number 12555186
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Structural/Functional materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

HIGO Yakichi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (30016802)

Co-Investigator(Kenkyū-buntansha) ISHIYAMA Chiemi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 助手 (00311663)
SHIMOJO Masayuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 助手 (00242313)
TAKASHIMA Kazuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 助教授 (60163193)
MIYASHITA Teruo  Nippon Keikinzoku Co. Ltd., Professor, 技術開発本部, グループ技術センター長
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 2001: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 2000: ¥8,500,000 (Direct Cost: ¥8,500,000)
KeywordsMEMS / Micro-Machine / Micro-Sized Specimen / Sub-micron Size / Versatile Mechanical Testing Machine / Materials Evaluation / 次世代型超アイクロマシン / 汎用微小材料試験装置 / MEMS(Micro Electro Mechanical System)
Research Abstract

Micro (or nano) electromechanical systems (MEMS/NEMS) are expected to be applied to micro-photonics and bio-medical devices such as optical switches for electro-optical communications and micro-catheters for brain surgery. The size of the components used in such devices is considered to be in the order of submicrons to microns. Therefore, the evaluation of mechanical properties of micro-sized materials are essential for practical applications of such MEMS/NEMS devices. In particular, the fracture and fatigue properties of micro-sized components are of crucial importance to the structural integrity and long-term reliability of actual MEMS/NEMS devices. In order to evaluate fracture and fatigue properties of such submicro-sized specimens, we have developed a new type mechanical testing machine for submicro-sized specimens, which can apply small amount of static and cyclic loads to the specimens. Cantilever beam type submicron-sized specimens with notches were prepared from thin films by focused ion beam machining. Fatigue crack growth and fracture tests were carried out using the testing machine. We were able to measure fracture toughness, fatigue life and fatigue crack growth rate of the specimens. This testing machine is extremely useful for determing fracture and fatigue properties of submicron-sized specimens for MEMS/NEMS applications.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] A.Ogura, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Control of Nanocrystalline Orientation Using the Application of a stress Field in an Amorphous Alloy"J. Appl. Phys. Letter. 79・7. 1042-1044 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Takashima, Y.Higo, S.Sugiura, M.Shimojo: "Fatigue Crack Growth Behavior of Micro-Sized Specimens Prepared from an Electroless Plated Ni-P Amorphous Alloy Thin Film"Mater. Trans.. 42・1. 68-73 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] R.Tarumi, A.Ogura, M.Shimojo, K.Takashima, Y.Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.9.1-B1.9.6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Ogura, M.Sato, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.10.1-B1.10.6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K.Takashima, M.Shimojo, Y.Higo, M.V.Swain: "Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film"ASTM STP. 1413. 72-81 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Shimojo, T.Inamura, T.H.Myeong, K.Takashima, Y.Higo: "Formation of Nano-Sized Martensite Particles in Stainless Steels"Metall. Mater. Trans., A. 32A・5. 261-265 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Ogura, R. Tarumi, M. Shimojo, K. Takashima and Y. Higo: "Control of Nanocrystalline Orientation Using the Application of' a Stress Field in an Amorphous Alloy"Applied Physics Letter. 79-7. 1042-1044 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Takashima, Y. Higo, S. Sugiura and M. Shimojo: "Fatigue Crack Growth Behavior of Micro-Sized Specimens Prepared from an Electroless Plated Ni-P Amorphous Alloy Thin Film"Materials Transactions. 42-1. 68-73 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] R. Tarumi, A. Ogura, M. Shimojo, K. Takashima and Y. Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"Mat. Res. Soc. Symp. Proc.. 634. B1.9.1-B1.9.6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A. Ogura, M. Sato, R. Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"Mat. Res. Soc. Symp. Proc.. 634. B1.10.1-B1.10.6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] K. Takashima, M. Shimojo, Y. Higo and M. V. Swain: "Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film"ASTM STP-1413. 72-81 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Shimojo, T. Inamura, T. H. Myeong, K. Takashima, Y. Higo: "Formation of Nano-Sized Martensite Particles in Stainless Steels"Metall. Mater. Trans., A. 32A. 261-265 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] A.Ogura, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Control of Nanocrystalline Orientation Using the Application of a stress Field in an Amorphous Alloy"J. Appl. Phys. Letter. 79・7. 1042-1044 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takashima, Y.Higo, S.Sugiura, M.Shimojo: "Fatigue Crack Growth Behavior of Micro-Sized Specimens Prepared from an Electroless Plated Ni-P Amorphous Alloy Thin Film"Mater. Trans.. 42・1. 68-73 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] R.Tarumi, A.Ogura, M.Shimojo, K.Takashima, Y.Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.9.1-9.6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Ogura, M.Sato, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.10.1-10.6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takashima, M.Shimojo, Y.Higo, M.V.Swain: "Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film"ASTM STP. 1413. 72-81 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Shimojo, T.Inamura, T.H.Myeong, K.Takashima, Y.Higo: "Formation of Nano-Sized Martensite Particles in Stainless Steels"Metall. Mater. Trans., A. 32A・5. 261-265

    • Related Report
      2001 Annual Research Report
  • [Publications] R.Tarumi,A.Ogura,M.Shimojo,K.Takashima,Y.Higo: "Molecular dynamics simulation of crystallization in an amorphous metal during shear deformation"Jpn.J.Appl.Phys.. 39・6B. L611-L613 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Shimojo,T.Inamura,T.H.Myeong,K.Takashima,Y.Higo: "Formation of Nano-Sized Martensite Particles in Stainless Steels"Metall.Mater.Trans.A. (in press).

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Takashima,Y.Higo,S.Sugiura,M.Shimojo: "Fatigue crack growth behavior of micro-sized specimens prepared from an electroless plated Ni-P amorphous alloy thin film"Mater.Trans.JIM. (in press). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Higo,K.Takashima,M.Shimojo,S.Sugiura,M.V.Swain: "New equipment for evaluating performance of microelements on MEMS"Proc.3rd Int.Conf.and Poster Exhibition Micro Materials (MicroMat 2000). 997-1000 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] A.Ogura,Y.Ichikawa,M.Shimojo,K.Takashima,Y.Higo,M.V.Swain: "Fatigue life and crack growth properties of micro-sized Ni-P amorphous alloy specimens"Proc.3rd Int.Conf.and Poster Exhibition Micro Materials (MicroMat 2000). 574-577 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Takashima,S.Maekawa,Y.Ichikawa,M.Shimojo,Y.Higo,S.Sugiura,M.V.Swain: "Fracture and fatigue behavior of micro-sized amophous alloy specimens"Proc.3rd Int.Conf.and Poster Exhibition Micro Materials (MicroMat 2000). 32-35 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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