| Project/Area Number |
12555200
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Material processing/treatments
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| Research Institution | Kobe University |
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Principal Investigator |
OHMAE Nobuo Kobe University, Faculty of Engineering, Professor, 工学部・機械工学科, 教授 (60029345)
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| Co-Investigator(Kenkyū-buntansha) |
YOKOTA Kumiko Kobe University, Faculty of Engineering, Research Staff, 工学部, 教務職員(教育職) (20252794)
TAGAWA Masahito Kobe University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (10216806)
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| Project Period (FY) |
2000 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥12,600,000 (Direct Cost: ¥12,600,000)
Fiscal Year 2002: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 2001: ¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 2000: ¥7,400,000 (Direct Cost: ¥7,400,000)
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| Keywords | atomic oxygen / space environment / hyperthermal atom beam / silicon / surface free energy / oxidation / surface modification / low earth orbit / シリコン酸化膜 / 原子ビーム |
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| Research Abstract |
This study aims at developing the new low-damage surface modification technique using laser detonation supersonic atoms beams. It was made clear that the hydrogen-terminated Si (001) surface can be oxidized by 5 eV atomic oxygen beam even at room temperature. This is due to the fact that more than 80 % of the translational energy was transferred from the impinging atom to the surface atom. The overall oxide growth follows linear-parabolic relationship that is similar to that observed high-temperature oxidation of Si. The initial linear growth was governed by the reaction-limit of oxidant, whereas parabolic one was due to volume diffusion inside the oxide film. It was also demonstrated that the surface free energy (or wettability) of polymer could be controlled by atom beam exposures. From the experimental results obtained in this study, potential advantages of the laser detonation supersonic beam-induced surface modification were identified.
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