Development of 3D plasma spectroscopic system and its application to plasma processing
| Project/Area Number |
12650041
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Applied optics/Quantum optical engineering
|
|---|
| Research Institution | Yamaguchi University |
|---|
Principal Investigator |
SAKIYAMA Satoshi Yamaguchi University Faculty of engineering Associate Professor, 工学部, 助教授 (60162327)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
FUKUMASA Osamu Yamaguchi University Faculty of engineering Professor, 工学部, 教授 (20026321)
|
|---|
| Project Period (FY) |
2000 – 2001
|
| Project Status |
Completed (Fiscal Year 2001)
|
| Budget Amount *help |
¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2001: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2000: ¥2,300,000 (Direct Cost: ¥2,300,000)
|
|---|
| Keywords | Plasma jet / CCD camera / Optical filter / Temperature / Plasma processing / CT / Velocity / Image spectroscopy / 熱プラズマプロセス / プラズマ分光 |
|---|
| Research Abstract |
In order to realize the high quality thermal plasma processing using the plasma jet, the newly designed reactor based on the forced constricted type plasma jet generator, and the three dimensional measurement system composed of the CCD video camera with the optical interference filter are developed.
The reactor is found to be very stable under the various operating conditions and to have very high thermal efficiency(70%). Using this reactor, the large area deposition of the diamond films at a high rate is done from the material gas (hydrogen and methane ) and the synthesis of β"-alumina are successfully synthesized from powder mixtures.
It is also found that the plasma temperature, the injected particle temperature and the particle velocity are measured over the whole reaction region using this measurement system and that the three dimensional temperature distribution of the asymmetric plasma jet is measured by combining this measurement system and the computer topography technique.
|
Report
(3 results)
Research Products
(8 results)
