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Fabrication of photonic crystals by LIGA process and holographic lithography and their applications for optics

Research Project

Project/Area Number 12650046
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionRitsumeikan University

Principal Investigator

ONO Yuzo  Ritsumeikan Univ., Fac. Science and Engineering, Professor, 理工学部, 教授 (90319492)

Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2001: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2000: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsPhotonic crystal / Multi-beam interference / Holographic lithography / Interference recording / Diamond structure / Effective index / Photonic band gap / Yablonovite / 干渉計
Research Abstract

1. Four-beam interference exposure system has been developed using a He-Cd laser as a light source. The system is covered with transparent plastic plates to avoid air flow.
2. An incident condition for interference waves to fabricate a desired photonic crystal has been led by considering that the requirement equation, which makes interference fringe intensity among multi beams maximum, is equivalent to the equation between lattice and reciprocal lattice vectors in solid-state physics.
3. The relation between the initial phase of interference waves and the spatial position of interference fringe has been made clear. As a result, the fabrication method of diamond structured photonic crystal has been created.
4. According to the theory developed during the first year, the face centered cubic structure has been fabricated in the positive photo-resist. SEM photo of the fabricated crystal shows that the theory is correct.
5. Diamond structure consists of two face centered cubic crystals of which lattice origin is shihuted a quarter of the lattice constant to each other. Twicw exposure by changing the mutual phase among the interference waves can fabricate the diamond structure. The neumerical analysis shows that the diamond structure can be fabricated by this method.
6. A hexagonal periodic structure of which period is 360nm has been recorded in a photo-resist layer to fabricate an X-ray mask to make the Yablonovite structure by X-ray exposure from three directions.
7. As an application for optics, transmittance of the photonic crystal has been calculated by using the effective media method. The transmittance shows a photonic ban gap with a increase of the number crystal layers.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 池本聖雄, 小野雄三: "多光束干渉記録による3次元フォトニック結晶形成の解析"文部科学省科学研究費補助金特定領域研究(B)「フォトニック結晶の開発と幅射場の制御」第5回シンポジウム講演概要集. 49-50 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 池本聖雄, 小野雄三: "多光束干渉による3次元フォトニック結晶の形成"2001年電子情報通信学会総合大会講演論文集. エレ-1. 302-302 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 池本聖雄, 小野雄三: "多光束干渉による3次元フォトニック結晶形成の理論解析"2001年春季第48回応用物理学関係連合講演会講演予稿集. 3. 1056-1056 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 4th Pacific Rim Conference on Lasers and Electoro-Optics (CLEO/Pacific Rim 2001). II. 348-349 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 8th Microoptics Conference (MOC'01). 258-261 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 小野雄三, 池本聖雄: "多光束干渉による3次元フォトニック結晶の形成"MICROOPTICS NEWS. Vol.19 No.4. 19-22 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 池本聖雄, 小野雄三: "多光束干渉によるダイヤモンド構造を有する3次元フォトニック結晶の形成"2002年春季第49回応用物理学関係連合講演会講演予稿集. 3(発表予定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 2002 Diffractive Optics & Micro-Optics Meeting. (発表予定). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Analysis of fabrication of three-dimensional photonic crystals by muti-beam interference recording"Abstracts of the fifth symposium on "Development of photonic crystals and control of radiatioin field (In Japanese). 49-50 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three dimensional photonic crystals by holographic lithgraphy"Proceedings of the 2001 IEICE general conference, Electronics-1 (in Japanese). 302-302 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Theoretical analysis of three dimensional photonic crystal fabrication by holographic lithgraphy"Extended abstracts (The 48th Spring Meeting, 2001) ; The Japan Society of Applied, Physics and Related Societies (in Japanese). No. 3. 1056-1056 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 4th Pacific Rim Conference on Lasers and Electro-Optics (CLEO/Pacific Rim 2001). 2. 348-349 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 8th Microoptics Conference (MOC'01). 258-261 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three-dimensional photonic crystals by holographic lithography"MICROOPTICS NEWS (in Japanese). 19, No. 4. 19-22 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three-dimensional photonic crystals with diamond structures by holographic lithography"Extended abstracts (The 49th Spring Meeting, 2002) : The Japan Society of Applied Physics and Related Societie (in Japanese). No. 3 (to be presented). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical digest of 2002 Diffractive Optics & Micro-Optics Meeting. (to be presented). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three dimensional photonic crystals by holographic lithography"Technical Digest of 4th Pacific Rim Conference of Lasers and Electro-Optics (CLEO/Pacific Rim 2001). Vol.II. 348-349 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Kiyokatsu Ikemoto, Yuzo Ono: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical Digest of 8th Micooptics Conference (MOC'01). 258-261 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 小野雄三, 池本聖雄: "多光束干渉による3次元フォトニック結晶の形成"MICROOPTICS NEWS. 19. 19-22 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 池本聖雄, 小野雄三: "多光束干渉によるダイヤモンド構造を有する3次元フォトニック結晶の形成"平成14年春季第49回応用物理学会連合講演会講演予稿集. 第3分冊(発表予定). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yuzo Ono, Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical Digest of Topical Meeting on Diffractive Optics and Micro-Optics (DOMO'02). (発表予定).

    • Related Report
      2001 Annual Research Report
  • [Publications] 池本聖雄,小野雄三: "多光束干渉縞記録による3次元フォトニック結晶形成の解析"「フォトニック結晶の開発と輻射場の制御」第5回公開シンポジウム講演概要集. 49-50 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 池本聖雄,小野雄三: "多光束干渉による3次元フォトニック結晶の形成"2001年電子情報通信学会全国大会エレクトロニクス講演論文集1. 分冊1(発表予定). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 池本聖雄,小野雄三: "多光束干渉による3次元フォトニック結晶形成の理論解析"2001年春季第48回応用物理学関係連合講演会講演予稿集III. 分冊3(発表予定).

    • Related Report
      2000 Annual Research Report
  • [Publications] Yuzo Ono and Kiyokatsu Ikemoto: "Fabrication of three-dimensional photonic crystals by holographic lithography"Technical Digest of CLEO/Pacific Rim 2001. (発表予定). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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