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Obtaining Higher Accuracy for Machine Tools by Nonlinear Disturbance Observer

Research Project

Project/Area Number 12650129
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionShizuoka Institute of Science and Technology

Principal Investigator

OTSUKA Jiro  Shizuoka Institute of Science and Technology, Faculty of Engineering and Science, Professor, 理工学部, 教授 (30016787)

Co-Investigator(Kenkyū-buntansha) HAMAMURA Minoru  Toshiba Machinery Co. Ltd. Technical Research Laboratory, 技術研究所, 研究職
KOSHIMIZU Shigeomi  Shizuoka Institute of Science and Technology, Faculty of Engineering and Science, Lecturer, 理工学部, 講師 (20267868)
NIWA Shohei  Shizuoka Institute of Science and Technology, Faculty of Engineering and Science, Professor, 理工学部, 教授 (30023287)
SENJO Motohiro  Senjo Seiki Co. Ltd., 常務取締役
先生 宗弘  先生精機(株), 常務取締役
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 2001: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2000: ¥3,000,000 (Direct Cost: ¥3,000,000)
KeywordsDisturbance observer / Ultraprecision positioning / Nanometer positioning / Circular error / Blush model / 高精度化 / 非線形外乱オブザーバ / 象現突起 / 1nm分解能 / フィードバック制御 / PI-D制御
Research Abstract

(1) A Positioning device using a DC servomotor and ball screw with 1 nm positioning resolutions is manufactured. As a result of 100μm stroke step response by PID control, a deviation error of 3.1 nm and a dispersion error of 2.2 nm are obtained, considering the nonlinear spring behavior of all rolling elements on the device.
(2) After the nonlinear spring behavior of all rolling elements on the above positioning device is measured by a newly-developed method, the friction model can be obtained by the application of a blush model of the sliding elements.
(3) On the XY table driven by the linear motor, the trajectory contouring of circular interpolations at the quadrant changes is analyzed by use of the above friction model for the linear ball guideways.
(4) The nonlinear disturbance observer using the above friction model is newly developed. The method of the feedback system using the observer is theoretically effective. But its practical effect cannot be made sure by the experiment because of lack of time.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] 大塚二郎, 大橋康二, 羽山定治: "精密・超精密位置決めの現状と将来予測"精密工学会誌. 67巻. 173-178 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 大塚二郎: "ITの次はナノテクノロジー"静岡理工科大学紀要. 7-16 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 大塚二郎, 青木一平, 石河智海: "転がり要素の非線形ばね特性の研究(第1報、簡易測定法)"精密工学会誌. 66巻. 944-945 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 大塚二郎: "ナノテクノロジと超精密位置決め"2002年度精密工学会春季大会シンポジウム資料. 1-5 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 精密工学会 超精密位置決め専門委員会(大塚二郎編集長): "次世代精密位置決め技術"フジ・テクノシステム. 650 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Jiro Otsuka, Yasuji Oohashi and Sadaji Hayama: "Present and Future of Precision ane Ultraprecision Positioning (in Japanese)"J. Japan Society for Precision Engineering. Vol. 67, No. 2. 173-178 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Jiro Otsuka: "Nanotechnology next to IT (in Japanese)"Letters of Shizuoka Institute of Science and Technology. No. 9. 7-16 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Jiro Otsuka, Ippei Aoki and Tomomi Ishikawa: "Study of Nonlinear Spring Behavior of Rolling Elements (in Japanese)"J. Japan Society for Precision Engineering. Vol. 66, No. 6. 944-945 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Jiro Otsuka: "Nanotechnology and Ultraprecision (in Japanese)"Symposium of Spring meet of JSPE 2002. 1-5 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 大塚二郎, 大橋康二, 羽山定治: "精密・超精密位置決めの現状と将来予測"精密工学会誌. 67巻2号. 173-178 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 大塚二郎: "ITの次はナノテクノロジー"静岡理工科大学紀要. 9号. 7-16 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] 大塚二郎, 青木一平, 石河智海: "転がり要素の非線形ばね特性の研究(第1報、簡易測定法)"精密工学会誌. 66.6. 944-945 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] 精密工学会 超精密位置決め専門委員会(大塚二郎編集長): "次世代精密位置決め技術"フジ・テクノシステム. 650 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 大塚二郎,青木一平,石河智海: "転がり要素の非線形ばね特性の研究(第1報、簡易測定法)"精密工学会誌. 66巻6号. 944-949 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎、羽山定治、大橋康二: "精密・超精密位置決めの現状と将来予測"精密工学会誌. 67巻2号. 173-178 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎: "静岡県の精密技術についてのアンケート調査"静岡理工科大学 紀要. 7号. 221-228 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎: "精密・超精密位置決め((1)ミクロンからナノ・ピコに至る過程)"日経メカニカル. 556号. 110-122 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎: "高速化にパラレルメカニズム、リニアモータ、ボールねじのどれがいいか"2000年度モーションエンジニアリング展 ガイドブック. 14-20 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎: "高精度・高速化を追究する-精密位置決め技術"日刊工業新聞 日本国際工作機械見本市特集号. 2000年10月27日号. 51-52 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 大塚二郎(編集委員長)大塚二郎 他64名: "次世代精密位置決め技術"フジ・テクノシステム. 649 (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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