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Synthesis of multilayers of oxide-superconductor/insulator using activated oxygen plasma

Research Project

Project/Area Number 12650331
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionIwate University

Principal Investigator

MICHIKAMI Osamu  Iwate Univ., Fuculty of Eng., Prof., 工学部, 教授 (90261461)

Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2001: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2000: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordsoxide superconductor / activated oxygen plasma / EuBaCuO thin film / oxygen deficiency / recovery treatment / superconductor / insulator multilayer / 超電導体・絶縁体多層膜
Research Abstract

The "123" high-Tc superconductors are very sensitive to oxygen content and are liable to cause oxygen deficiency. We attempted to establish the methods for recovery treatment of a degraded superconducting thin film and for prevention against degradation of or recovery treatment of a lower-layer superconducting thin film in insulator deposition. The initial plan was to use plasma induced by sputtering and plasma induced by microwaves in this investigation. Though satisfactory results were obtained by the former method, the results obtained by the latter method were not good. Activated oxygen plasma (AOP) through which EuBa_2Cu_3O_7(EBCO) thin films with Tc=90 K were synthesized by DC magnetoron sputtering using a high-quality sintered superconducting target was used as a treating plasma. The results are summarized as follows.
a) Recovery treatment for degraded EBCO thin films : When the degraded EBCO was indirectly exposed to AOP, the high-quality characteristics of the film were complet … More ely recovered. The appropriate AOP recovery conditions were annealing temperature of 450-700 ℃, plasma exposing time of more than 30 min and oxygen introducing pressures after annealing (Pox) of above 2 kPa. The AOP recovery treatment technology was newly developed for oxide superconductors.
b) Application to insulator/superconductor multi-layers and protective layer : SrTiO_2(STO) and CeO_2 thin films were deposited on as-grown EBCO, and the influence on the lower-layer EBCO was examined. STO caused marked deterioration of the EBCO thin films compared with CeO_2. By means of insertion of 50-Å-thick CeO_2 between EBCO and STO, the degradation of the lower-layer EBCO was mitigated. Though the AOP treatment was effective for recovery of the multi-layer, the degree of recovery depended on STO film thickness and Pox. On the other hand, CeO_2 films were deposited on EBCO films at 500-570 ℃ in AOP, but the lower-layer EBCO did not degenerate. When EBCO with 2000-Å-thick CeO_2 was exposed to the atmosphere with relative humidity of 70 %, the EBCO films exhibited high Tc values for 2 months. Less

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] H.Wakana: "High-quality a-axis oriented EuBa_2Cu_3O_<7-y> films on sapphire substrates"Physica C. 350. 29-36 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Michikami: "Effect of Sputtering Induced Oxygen Plasma on Recovery of EuBa_2Cu_3O_x films"IEEE Trans. Appl. Supercond.. 11(1). 3197-3200 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Michikami: "CeO_2 passivation films for oxide superconductors"Proc. 8^<th> Inter. Super. Electro. Conf.. ISEC'01. 279-280 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "Preparation of CeO_2.SrTiO_3 bilayers layers as a barrier material for SIS Josephson Junctions"Physica C. 375-360. 1440-1443 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "Recovery treatment for EuBa_2Cu_3O_<7-y> films with insulating multilayers"IEICE Trans. Electron.. E85-C(3). 780-783 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Hashimoto: "Surface resistances of EuBa_2Cu_3O_<7-v> thin films on A12O3 substrates with CeO2 buffer layers measured by using a TE013-mode cylindrical cavity resonator"Physica C. (accepted). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Sato: "Stractural change by high-energy irradiation and post-annealing in EuBa_2Cu_3Oy"Physica C. (accepted). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "High-quality a-axis oriented EuBa_2Cu_3O_<7-y> films on sapphire substrates"Physics C. 350. 29-36 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Michikami: "Effect of Sputtering Induced Oxygen Plasma on Recovery of EuBa_2Cu_3O_x films"IEEE Trans. Appl. Supercond.. 11(1). 3197-3200 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Michikami: "CeO_2 passivation films for oxide superconductors"Proc. 8^<th> Inter. Super. Electro. Conf.. ISEC'01. 279-280 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "Preparation of CeO_2/SrTiO_3 bilayers layers as a barrier material for SIS Josephson junctions"Physica C. 375-360. 1440-1443 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "Recovery treatment for EuBa_2Cu_3O_<7-y> films with insulating multilayers"IEICE Trans. Electron.. E85-C(3). 780-783 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] T.Hashimoto: "Surface resistances of EuBa_2Cu_3O_<7-y> thin films on Al2O3 substrates with CeO2 buffer layers measured by using a TE013-mode cylindrical cavity resonator"Physica C. (accepted). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H. Sato: "Structural change by high-energy irradiation and post-annealing in EuBa_2Cu_3O_y"Physica C. (accepted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] H.Wakana: "High-quality a-axis oriented EuBa_2Cu_3O_<7-y> films on sapphire substrates"Physica C. 350. 29-36 (2000)

    • Related Report
      2001 Annual Research Report
  • [Publications] 0.Michikami: "Effect of Sputtering Induced Oxygen Plasma on Recovery of EUBa_2Cu_3O_x films"IEEE Trans. Appl. Supercond. 11(1). 3197-3200 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 0.Michikami: "CeO_2 passivation films for oxide superconductor"Proc. 8^<th> Inter. Super. Electro. Conf. ISEC'01. 279-280 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Wakana: "Preparation of CeO_2/SrTiO_3 bilayers layers as a barrier material for SIS Josephson junction"Physica C. 375-360. 1440-1443 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Wakana: "Recovery treatment for EuBa_2Cu_3O_<7-y> films with insulating multilayers"IEICE Trans. Electron. E85-C(3). 780-783 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Hashimoto: "Surface resistances of EuBa_2Cu_3O_<7-y> thin films on A12O3 substrates with CeO_2 buffer layers measured by using a TE013-mode cylindrical cavity resonator"Physica C. (accepted). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Sato: "Stractural change by high-energy irradiation and post-annealing in EuBa_20Cu_3O_y"Physica C. (accepted). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Wakana: "High-quality a-axis oriented EuBa_2Cu_3O_<7-y> films on sapphire substrates"Physica C. 350. 29-36 (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] O.Michikami: "Effect of Sputtering Induced Oxygen Plasma on Recovery of EuBa_2Cu_3O_x films"IEEE Trans.Appl.Supercond.. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] O.Michikami: "CeO_2 passivation films for oxide superconductors"Physica C. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Wakana: "Preparation of CeO_2/SrTiO_3 buffer layers as a barrier material for SIS Josephson junctions"Advances in Superconductivity XIII. (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] H.Wakana: "Recovery treatment for EuBa_2Cu_3O_<7-y> films with insulating multilayers"

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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