| Project/Area Number |
12650339
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
電子デバイス・機器工学
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| Research Institution | Niigata University |
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Principal Investigator |
OHKAWA Masashi NIIGATA UNIVERSITY Faculty of Engineering, Associate Professor, 工学部, 助教授 (90213644)
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| Co-Investigator(Kenkyū-buntansha) |
SATO Takashi Faculty of Engineering, Professor, 工学部, 教授 (10143752)
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| Project Period (FY) |
2000 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2002: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2001: ¥1,200,000 (Direct Cost: ¥1,200,000)
Fiscal Year 2000: ¥1,700,000 (Direct Cost: ¥1,700,000)
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| Keywords | Pressure Sensor / Integrated Optics / Silicon / Diaphragm / Micromachine / 光集積回路 |
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| Research Abstract |
The purpose of this study is to develop an integrated optic pressure sensor that can be inserted into a catheter to measure blood pressure. The sensor consists of a diaphragm as a pressure-sensitive structure and a straight single-mode waveguide across the diaphragm.
First, we theoretically examined sensor sensitivity with respect to waveguide position and diaphragm dimensions. According to the theoretical results, sensitivity remains constant even if the diaphragm dimensions are reduced as long as both the side length ratio and the characteristic length remain constant. Next, such a scale-reduction rule was experimentally examined using three fabricated sensors with the same side length ratio and the same characteristic length. The exact dimensions of the sensors were 2.0mm×10mm×35μm, 2.5mm×12.5mm×49μm, and 3.0mm×15mm×64μm. The measured sensitivities of the three sensors were quite similar to each other as theoretically predicted.
Finally, we fabricated the first prototype version using a mimic catheter ten times larger than a 6F catheter. Since the sensor was intended to be inserted into a 20mm-long mimic catheter with a diameter of 20mm, its dimensions were set to be 10mm×20mm×420μm, with the diaphragm dimensions of 1.5mm×7.5mm×23μm. The sensor sensitivity was 81mrad/kPa, which is sufficient to measure blood pressure. Although the fabricated sensor is still quite large, by reducing the diaphragm dimensions based on the scale-reduction rule, the realization of a miniaturized sensor that can be inserted into the catheter can be expected.
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