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PROPOSAL OF SIMPLE FABRICATION TECHNIQUE OF NONLINEAR OPTICAL WAVEGUIDE DEVICES BASED ON NANOIMPRINT LITHOGRAPHY

Research Project

Project/Area Number 12650341
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionSHIZUOKA UNIVERSITY

Principal Investigator

SUGIHARA Okihiro  FACULTY OF ENGINEERING, SHIZUOKA UNIVERSITY ASSOCIATE PROFESSOR, 工学部, 助教授 (30222053)

Co-Investigator(Kenkyū-buntansha) EGAMI Chikara  FACULTY OF ENGINEERING, SHIZUOKA UNIVERSITY ASSOCIATE PROFESSOR, 工学部, 助教授 (70262798)
OKAMOTO Naomichi  FACULTY OF ENGINEERING, SHIZUOKA UNIVERSITY PROFESSOR, 工学部, 教授 (40022173)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥2,900,000 (Direct Cost: ¥2,900,000)
Fiscal Year 2001: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2000: ¥2,000,000 (Direct Cost: ¥2,000,000)
KeywordsNANOIMPRINT / HOT EMBOSS / ELECTROOPTIC POLYMER / MASTER / REPLICA / GRATING / WAVEGUIDE / MASK / ホットエンボス / ナノインプリント法 / マスター回折格子 / レプリカ回折格子 / SHG回折 / 熱安定性 / 機械的安定性 / チャネル導波路
Research Abstract

Simple fabrication technique of nonlinear gratings and waveguides in polymer films based-on nanoimprint technology was proposed and demonstrated. The grating master consisting of metal base and polyimide die was fabricated by the single pulse two-beam interference technique using UV laser ablation, and its thermal and mechanical stability was investigated. The master molded electrooptic polymers at around their glass transition temperatures. At the same time, high voltage was applied to the polymer films to induce the second-order nonlinearity. The grating profile, stability and the nonlinearity were measured. Moreover, fabrication of channel waveguide was realized based on the present hot-emboss technique combined with UV photobleaching. The several advantages of this technique, in a high resolutional and simple way, make it useful for several polymer waveguide devices for electrooptic modulation and frequency conversion.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] O.Sugihara, M.Nakanishi, H.Fujimura, C.Egami, N.Okamoto: "Simultaneous process of embossing and poling at elevated temperatures : simple technique of nonlinear grating formation in polymer films"Optics Letters. Vol.25,No.13. 1028-1030 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 杉原興浩, 車彦龍, 中西愼, 柴田慎弥, 藤村久, 江上力, 岡本尚道: "スタンピングとポーリングを同時工程で行う高分子非線形回折格子作製と導波路型波長変換"光学. Vol.29, No.9. 573-579 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Sugihara, Y.Che, S.Shibata, M.Nakanishi, H.Yamaji, H.Fujimura, C.Egami, N.Okamoto: "Polymeric optical waveguide components fabricated by simultaneous process of embossing and poling at elevated temperatures"Proc. SPIE. Vol.4279. 10-16 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nakanishi, H.Yamaji, O.Sugihara, H.Fujimura, C.Egami, N.Okamoto: "Simple Fabrication of Nonlinear Gratings in Polymer Film by Simultaneous Process of Emboss Heating and Thermal Poling"Molecular Crystals and Liquid Crystals. Vol.349. 15-18 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 杉原興浩, 柴田慎弥, 磯谷健次: "ポリマ光導波路部品一括成形加工の研究"第50回高分子討論会. IIT-12(依頼発表). (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 杉原興浩: "高分子光コンポーネント成形加工技術"光学(依頼執筆). 第31巻、第2号. 100-102 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O. Sugihara, M. Nakanishi, H. Fujimura, C. Egami, N. Okamoto: "Simultaneous process of embossing and poling at elevated temperatures : simple technique of nonlinear grating formation in polymer films"Optics Letters. Vol.25, No.13. 1028-1030 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O. Sugihara, Y. Che, M. Nakanishi, S. Shibata, H. Fujimura, C. Egami, N. Okamoto: "Formation of nonlinear gratings by simultaneous embossing and poling in polymer films and frequency conversion"Kogaku. Vol.29, No.9. 573-579 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O. Sugihara, Y. Che, S. Shibata, M. Nakanishi, H. Yamaji, H. Fujimura, C. Egami, N. Okamoto: "Polymeric optical waveguide components fabricated by simultaneous process of embossing and poling at elevated temperatures"Proc. SPIE. Vol.4279. 10-16 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M. Nakanishi, H. Yamaji, O. Sugihara, H. Fujimura, C. Egami, N. Okamoto: "Simple Fabrication of Nonlinear Gratings in Polymer Film by Simultaneous Process of Emboss Heating and Thermal Poling"Mol. Cryst. Liq. Cryst.. Vol.349. 15-18 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O. Sugihara: "Molding technology of polymer optical waveguide components"Kogaku. Vol.31 No.2. 100-102 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O. Sugihara, S. Shibata, K. Isogai: "Study on Simultaneous Fabrication of Polymer Waveguide Components"The 50th Polymer Preprints Japan IIT-12. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] O.Sugihara, Y.Che, S.Shibata, M.Nakanishi, H.Yamaji, H.Fujimura, C.Egami, N.Okamoto: "Polymeric optical waveguide components fabricated by simultaneous process of embossing and poling at elevated temperatures"Proc. SPIE. Vol.4279. 10-16 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Che, O.Sugihara, S.Shibata, H.Fujimura, N.Okamoto, C.Egami: "Formation of Nonlinear Waveguide Components Based-on Nanoimprint Technology"Mol. Cryst. Liq. Cryst.. Vol.370. 375-378 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 杉原興浩: "高分子光コンポーネント成形加工技術"光学(依頼執筆). 第31巻、第2号. 100-102 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 杉原興浩, 柴田慎弥, 磯谷健次: "ポリマ光導波路部品一括成形加工の研究"第50回高分子討論会(依頼発表). II T-12. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 杉原興浩: "高分子光回路の研究---材料、成形加工、実装の動向と課題"フォトニクス・フォーラム・ニューズレター. Vol.21. 3-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 柴田慎弥, 杉原興浩, 車彦龍, 藤村久, 江上力, 岡本尚道: "エンボス法とフォトブリーチング法を組み合わせた電気光学高分子光回路作製"信学技報. OME2001-79. 25-30 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] O.Sugihara,M.Nakanishi,H.Fujimura,C.Egami,N.Okamoto: "Simultaneous process of embossing and poling at elevated temperatures : simple technique of nonlinear grating formation in polymer films"Optics Letters. Vol.25,No.13. 1028-1030 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 杉原興浩,車彦龍,中西愼,柴田慎弥,藤村久,江上力,岡本尚道: "スタンピングとポーリングを同時工程で行う高分子非線形回折格子作製と導波路型波長変換"光学. Vol.29,No.9. 573-579 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Nakanishi,H.Yamaji,O.Sugihara,H.Fujimura,C.Egami,N.Okamoto: "Simple Fabrication of Nonlinear Gratings in Polymer Film by Simultaneous Process of Emboss Heating and Thermal Poling"Molecular Crystals and Liquid Crystals. Vol.349. 15-18 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 杉原興浩,車彦龍,柴田慎弥,岡本尚道: "高温圧着ポーリング法による非線形高分子光導波路部品の形成"第49回高分子討論会. IL16(依頼発表). (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] O.Sugihara,Y.Che,S.Shibata,H.Fujimura,C.Egami,N.Okamoto: "Nonlinear Grating Formation Based-on Nanoimprint Technology : Fabrication and Characteristics of Master Gratings"Korea-Japan Joint Forum 2000. O-14. 31 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] O.Sugihara,Y.Che,S.Shibata,M.Nakanishi,H.Yamaji,H.Fujimura,C.Egami,N.Okamoto: "Polymeric optical waveguide components fabricated by simultaneous process of embossing and poling at elevated temperatures"SPIE Photonics West. 4279-2. (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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