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Estimation of overgrown semiconductor interfaces with buried fine metal patterns by using resonant properties of electron wave

Research Project

Project/Area Number 12650347
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTokyo Metropolitan University

Principal Investigator

SUHARA Michihiko  Graduate School of Engineering,Tokyo Metropolitan University Associate Professor, 工学(系)研究科(研究院), 助教授 (80251635)

Co-Investigator(Kenkyū-buntansha) OKUMURA Tsugunori  Graduate School of Engineering, Tokyo Metropolitan University, Professor, 大学院・工学(系)研究科(研究院), 教授 (00117699)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2001: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2000: ¥3,200,000 (Direct Cost: ¥3,200,000)
KeywordsResonant tunneling diodes / Buried fine metals / Overgrown interface / Energy level broadening / GaAsP / GaAs / 共鳴トンネルトランジスタ / 埋め込み微細金属ゲート / GaInp
Research Abstract

In quantum effect devices with superlattice structure, conduction band offset in heterojunction greatly affects the characteristics. We propose a method for evaluating the conduction band offset (ΔEc) by using resonant tunneling diodes (RTD). If the triple-barrier (TB) RTDs are off-resonance condition, thermionic emission over the barriers becomes a main component for a current, which is restricted by ΔEc. The ΔEc can be estimated by measuring temperature dependence above 200K of the current-voltage characteristics, based on thermionic emission theory. The method was applied for a GaAsP/GaAs TBRTD and the Δec was estimated as about 200 meV. This method is applicable for a case that the barrier layer has strain.
A broadening of the quantum energy level (Γ) is one of a key parameter for improving quantum effect devices. We proposed a method for evaluating a homogeneous broadening (Γh) and inhomogeneous broadening (Γi) independently by using double-barrier (DB) RTD, where we regard the transmittance of DBRTD as the convolution of a Lorentzian and a Gaussian. The method was applied for GaAsP/GaAs DBRTDs, and the Γh, Γi were independently estimated as 3.3[meV] and 7.4 [meV] for G=8.4[meV] We fabricated a vertical GaInP/GaAs double barrier structure with a self-aligned buried tungsten gate providing lateral construction. The gate dependence indicates that the data originate from a coupled quantum system including a quantum dot and quantized contact regions.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] B.Gustafson, M.Suhara, K.Furuya, L.Samuelson, W.Seifert, L-E.Wernersson: "Lateral Current Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"Physica E. 7. 819-822 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nagase, M.Suhara, Y.Miyamoto, K.Furuya: "Peak Width Analysis of Current-Voltage Characteristics of Triple-Barrier Resonant Tunneling Diodes"Jpn.J.AppI.Phys.. Vol.39 No.6A, 15. 3314-3318 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] B.Gustafson D.Csontos, L.-E.Wernersson, M.Suhara, H.Q.Xu, L.Samuelson: "The Fully Quantized Transistor"10th International Conference on Modulated Semiconductor Structures(MSS10). ThP47 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Ohki, H.Funato, M.Suhara, L-E.Wernerssou, W.Seifert, T.Okumura: "Estimation of conduction band off-set of GaAsP/GaAs heterostructure by using triple-strain-barrier resonat tunneling diodes"Applied Surface Sciences. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Suhara, S.Ohki, L-E.Wernerssion, W.Seifert, L.Samuelson, T.Okumura: "Estimation of homogeneous and inhomogeneous resonant energy level broadening in double barrier resonant tunneling diodes"Inst.Phys.Conf.Ser., IOP. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] B.Gustafson, M.Suhara, K.Furuya, L.Samuelson, W.Seifert, L-E.Wernersson: "Lateral Current Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gatc"Physica E. 7. 819-822 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Nagase, M-Suhara, Y.Miyamoto and K.Furuya: "Peak Width Analysis of Current-Voltage Characteristics of Triple-Barrier Resonant Tunneling Diodes"Jpn.J.Appl.Phys.. Vol.39 No.6A, 15. 3314-3318 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] B. Gustafson D.Csontos, L.-E.Wernersson, M.Suhara, H.Q.Xu and L.Samuelson,: "The Fully Quantized Transistor"Oth International Conference on Modulated Semiconductor Structures (MSS10). ThP47. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.Suhara. S.Ohki, L-E.Wernerssion, W.Seifert, L.Samuelson, and T.Okumura: "Estimation of homogeneous and inhomogeneous resonant energy level broadening in double harrier resonant tunneling diodes"Inst. Phys. Gonf. Ser., IOP. (in print). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] S.Ohki, H.Funato, M.Suhara. L-E.Wernersson, W.Seifert, and T.Okumura: "Estimation of conduction band off-set of GaAsP/GaAs heterostructure by using triple-strain-barrier resonat tunneling diodes"Applied Surface Sciences. /(in print). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] B.Gustafson D.Csoutos, L.-E.Wernersson, M.Suhara, H.Q.Xu, L.Samuelson: "The Fully Quantized Transistor"10th International Conference on Modulated Semiconductor Structures (MSS10). ThP47 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Ohki, H.Funato, M.Suhara, L-E.Wernersson, W.Seifert, T.Okumura: "Estimation of conduction band off-set of GaAsP/GaAs heterostructure by using triple-strain-barrier resonat tunneling diodes"Applied Surface Sciences. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Suhara, S.Ohki, L-E.Wernerssion, W.Seifert, L.Samuelson, T.Okumura: "Estimation of homogeneous and inhomogeneous resonant energy level broadening in double barrier resonant tunneling diodes"Inst. Phys. Conf. Ser., IOP. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] B.Gustafson,M.Suhara,K.Furuya,L.Samuelson,W.Seifert,L-E.Wernersson: "Lateral Current Confinement in Selectively Grown Resonant Tunneling Transistor with an Embedded Gate"Physica E. 7. 819-822 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.Nagase,M.Suhara,Y.Miyamoto and K.Furuya: "Peak Width Analysis of Current-Voltage Characteristics of Triple-Barrier Resonant Tunneling Diodes"Jpn.J.Appl.Phys.. Vol.39 No.6A,15,. 3314-3318 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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