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Measurement of very small quantity of pollutants using laser absorption spectroscopy method

Research Project

Project/Area Number 12650414
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionHokkaido University

Principal Investigator

BRATESCU Maria A.  Hokkaido Univ. Grad. School of Eng., Inst., 大学院・工学研究科, 助手 (70312379)

Co-Investigator(Kenkyū-buntansha) SUDA Yoshiyuki  Hokkaido Univ. Grad. School of Eng., Inst., 大学院・工学研究科, 助手 (70301942)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥1,000,000 (Direct Cost: ¥1,000,000)
KeywordsLaser spectroscopy / Evanescent Wave / Detection Limit / Laser Ablation / Excited Particles / Density / Plasma Diagnostics
Research Abstract

The main results of the research were focused on the followings objectives : to realize the detection of an established impurity - N, O, C - in plasma. The level of the impurity was ppm. This means to detect about 10^7 cm^<-3> excited atoms from a total excited atom of 〜 10^<13> cm^<-3> ; to obtain a detection S/N value of 〜 10^6 ; to extend the detection limit of different pollutants elements or molecules to ppb (part per billion) range.
We measured Xe(1s_5) density on the discharge tube wall in a layer of 300 nanometers by evanescent wave (EW) laser spectroscopy. We realized a simple and new EW absorption spectroscopy method based on laser collisionally induced fluorescence (LCIF), i.e. the total changes in the emission properties of the gas discharge causes by illumination with radiation having a wavelength corresponding to an atomic transition. As a result of such simple detection system, without spectrograph, the obtained signal to noise (S/N) ratio is about 10^2.
Using laser absorption spectroscopy we measured spatial and temporal density distributions of carbon atoms and argon ions in a laser ablation plume. We measured spatial and temporal density distributions of electron density following the Stark broadening effect on the absorption line.
Using a high voltage transistor GHTS switch we produced a discharge at high pressure and high population excited atoms density, necessary in analytical spectroscopy. Pulsed plasma and laser ablation plasma are used in analytical chemistry.
In our experiment we measured carbon atoms in laser ablation plume and we determined the signal to noise ratio (S/N) of the detection. S/N was about 10^3. To test the performances of the detection system we measured the number density of the ion (argon). Argon ion detection was done with a S/N about 10^2. Carbon detection is important when decomposition of carbon oxides takes place.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (57 results)

All Other

All Publications (57 results)

  • [Publications] M.A.Bratescu, Y.Sakai, T.Kamada: "Evanescent wave absorption by Xe(1s_5) lying on a discharge tube wall"Applied Physics Letters. 79. 2333-2335 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, 須田善行, 酒井洋輔, G.Musa: "プラズマ変調レーザ吸収分光法によるXe/He混合ガスバリア放電プラズマ中のXe(1s_5)密度の測定"電気学会論文誌. A-121・5. 459-464 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai: "Low Temperature Plasma Diagnostics by Laser Spectroscopy (Topical Lecture)"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 1. 5-6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, T.Kamada, M.Yanagida: "Measurement of Xe(1s_5) Density on the Discharge Tube Wall by Evanescent Wave Laser Spectroscopy"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 1. 101-102 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A Bratescu, Y.Sakai, M.Mizuno, Y.Suda, D.Yamaoka: "Excited C(3^1P_1^0), Ar(4^1P_1^0) and Electron Densities in a Carbon Ablation Plume in Ar Buffer Gas"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 4. 235-236 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A Bratescu, Y.Sakai: "Absorption of evanescent wave by metastable Xe on discharge wall"Proceedings of the 10th International Symposium on Laser-Aided Plasma Diagnostics, 2001, Fukuoka, Japan. 81-85 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, D.Yamaoka, Y.Suda, H.Sugawara: "Electron density in a carbon ablation plume"Proceedings of the 6-th Internation Conference on Laser Ablation, October, 2001, Tsukuba, Japan. 167 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, M.Yanagida: "Electron collision excitation rate and electron density in a rare gas discharge"Program of the 54-th Annual Gaseous Electronics Conference, RF17, Penn State University, October, 2001. 46・6. 66 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, T.Kamada: "Atomic nitrogen and oxygen density measurements in low-pressure dc ischarge"Program of the 53rd Annual Gaseous Electronics Conference, ETP. 062. 45・6. 31-32 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, Y.Suda, M.Mizuno: "Spatial distribution of excited C and Ar concentration in laser ablation carbon plume in Ar filling gas"Program of the 53rd Annual Gaseous Electronics Conference, ETP. 063. 45・6. 32 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y.Sakai, M.A.Bratescu, Y.Suda, M.Mizuno: "Measurement of Ar(1s_2) population in a carbon plume excited by ArF excimer laser using a laser absorption method"IEEE Conference Record-Abstracts The IEEE International Conference on Plasma Science, 2P19. 143 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 山岡大祐, M.A.Bratescu, 酒井洋輔, 須田善行: "レーザー吸収分光法によるカーボンプルーム中のArII密度測定"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集,29a-D-10. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "放電管壁における励起Xe(1s_5)密度と電子密度・温度との関係"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集,30a-D-3. (印刷中). (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "LCIFを用いたXeプラズマ中電子励起レートの測定"2001年(平成13年)秋季 第62回応用物理学会学術講演会講演予稿集,11p-ZH-5. 1. 101 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 山岡大祐, M.A.Bratescu, 酒井洋輔, 須田善行: "Stark effectを用いたカーボンアブレーションプルーム内の電子密度測定"2001年(平成13年)秋季 第62回応用物理学会学術講演会講演予稿集,13p-ZG-11. 1. 91 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "放電管壁における励起原子Xe(1s_5)およびXe(1s_4)密度の比較"平成13年度 電気関係学会北海道支部連合大会講演論文集, N0.60. 83 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, Y.Suda, M.Mizuno: "Spatial and temporal distribution of C(3^1P_1°) ablation plume in various buffer gases"プラズマ科学シンポジウム2001/第18回プラズマプロセシング研究会(PSS-2001/SPP-18)プロシーディングス,P2-52. 381 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 鎌田剛弘, M.A.Bratescu, 須田善行, 菅原広剛, 酒井洋輔: "エヴァネセント光を用いた放電管壁におけるXe(1s_5)の検出"平成12年度 電気関係学会北海道支部連合大会講演論文集,No.78. 112 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 水野 学, M.A.Bratescu, 須田善行, 菅原広剛, 酒井洋輔: "レーザーアブレーションプルームのレーザー吸収分光診断 -Cプルーム中Ar(1s_2)密度の測定-"平成12年度 電気関係学会北海道支部連合大会講演論文集,No.79. 113 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 水野 学, M.A.Bratescu, 須田善行, 酒井洋輔: "レーザーアブレーションプルームのレーザー吸収分光診断 -Cプルーム中Ar(1s2)密度の測定-"2000年 電気学会 基礎・材料・共通部門大会講演論文集,No.13-1. 299-304 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 鎌田剛弘, M.A.Bratescu, 酒井洋輔: "レーザー吸収分光法によるプラズマ診断 -各種混合ガス放電中の窒素原子密度測定-"2000年 電気学会 基礎・材料・共通部門大会講演論文集,No.13-2. 305-310 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 鎌田剛弘, 大久保光之, M.A.Bratescu, 酒井洋輔, 菅原広剛: "グロー放電プラズマ中窒素原子のレーザ吸収分光診断"2000年(平成12年)春季 第47回応用物理学会学術講演会講演予稿集,28p-ZE-1. 1. 105 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 水野学, 須田善行, M.A.Bratescu, 酒井洋輔: "レーザーアブレーションMgOプルームの発光スペクトル"2000年(平成12年)春季 第47回応用物理学会学術講演会講演予稿集,30a-V-2. 3. 1129 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, T. Kamada: "Evanescent wave absorption by Xe (1s_5) lying on a discharge tube wall"Applied Physics Letters. 79. 2333-2335 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai: "Low Temperature PIasma Diagnostics by Laser Spectroscopy (Topicai Lecture)"Proceedings of XXV International Conference on Phenomena in Ionized Gases, Nagoya, Japan. 1. 5-6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno: "Measurement of Ar(1s_2) population in a carbon plume excited by ArF excimer laser using a laser absorption method"IEEE Conference Record ? Abstracts, The 27th IEEE International Conference on PIasma Science, New Orleans, Louisiana. 2P19. 143 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, T. Kamada: "Atomic nitrogen and oxygen density measurements in low-pressure dc discharge"Program of the 53rd Annual Gaseous Electronics Conference, Houston. ETP. 062, 45(6). 31 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A Bratescu, Y. Sakai, Y. Suda, M. Mizuno: "Spatial distribution of excited C and Ar concentration in laser ablation carbon plume in Ar filling gas"Program of the 53rd Annual Gaseous Electronics Conference, Houston. ETP. 063, 45(6), 32. 24-27 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Y. Sakai, M.A. Bratescu, T. Kamada: "Concentration of atomic oxygen (3^5S^0) in a dc discharge of low pressure O_2/He mixtures and room air"Proceedings of the 10th Asian Conference on Electrical Discharge, Kyoto, Japan. A-103. 47-50 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, T. Kamada, M. Yanagida: "Measurement of Xe (1s_5) Density on the Discharge Tube Wall by Evanescent Wave Laser Spectroscopy"Proceedings of XXV International Conference on Phenomena in Ionized Gases, Nagoya, Japan. 1. 101-102 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, M. Mizuno, Y. Suda, D. Yamaoka: "Excited C(3^1P_1^0), Ar (4^1P_1^0) and Electron Densities in a Carbon Ablation Plume in Ar Buffer Gas"Proceedings of XXV International Conference on Phenomena in Ionized Gases, Nagoya, Japan. 4. 235-236 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai: "Absorption of evanescent wave by metastable Xe on discharge wall"Proceedings of the 10th International Symposium on Laser-Aided Plasma Diagnostics, Fukuoka, Japan. 81-85 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, D. Yamaoka, Y. Suda, H. Sugawara: "Electron density in a carbon ablation plume"Proceedings of the 6th International Conference on Laser Ablation, Tsukuba, Japan. 167. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A. Bratescu, Y. Sakai, M. Yanagida: "Electron collision excitation rate and electron density in a rare gas discharge"Program of the 54th Annual Gaseous Electronics Conference, Penn State University. RF1 7, 46(6). 66 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] M.A.Bratescu: "Evanescent wave absorption by Xe(1s_5) lying on a discharge tube wall"Applied Physics Letters. 79. 2333-2335 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Low Temperature Plasma Diagnostics by Laser Spectroscopy (Topical Lecture)"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 1. 5-6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Measurement of Xe(1s_5) Density on the Discharge Tube Wall by Evanescent Wave Laser Spectroscopy"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 1. 101-102 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Excited C(3^1P^0_1), Ar(4^1P^0_1) and Electron Densities in a Carbon Ablation Plume in Ar Buffer Gas"Proceedings of XXV International Conference on Phenomena in Ionized Gases, July, 2001, Nagoya, Japan. 4. 235-236 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Absorption of evanescent wave by metastable Xe on discharge wall"Proceedings of the 10th International Symposium on Laser-Aided Plasma Diagnostics, 2001, Fukuoka, Japan. 81-85 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Electron density in a carbon ablation plume"Proceedings of the 6-th Internation Conference on Laser Ablation, October, 2001, Tsukuba, Japan. 167 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu: "Electron collision excitation rate and electron density in a rare gas discharge"Program of the 54-th Annual Gaseous Electronics Conference, RF17, Penn State University, October, 2001. 46・6. 66 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 柳田雅紀: "LCIFを用いたXeプラズマ中電子励起レートの測定"2001年(平成13年)秋季 第62回応用物理学会学術講演会講演予稿集, 11p-ZH-5. 1. 101 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 山岡大祐: "Stark effectを用いたカーボンアブレーションプルーム内の電子密度測定"2001年(平成13年)秋季 第62回応用物理学会学術講演会講演予稿集, 13p-ZG-11. 1. 91 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 山岡大祐: "レーザー吸収分光法によるカーボンプルーム中のArII密度測定"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集, 29a-D-10. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 柳田雅紀: "放電管壁における励起Xe(1s_5)密度と電子密度・温度との関係"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集, 30a-D-3. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 柳田雅紀: "放電管壁における励起原子Xe(1s_5)およびXe(1s_4)密度の比較"平成13年度 電気関係学会北海道支部連合大会講演論文集, No.60. 83 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.A.Bratescu, 須田善行,酒井洋輔,G.Musa: "プラズマ変調レーザ吸収分光法によるXe/He混合ガスバリア放電プラズマ中のXe(1s_5)密度の測定"電気学会論文誌. A-121・5(印刷中). (2001)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai and T.Kamada: "Atomic nitrogen and oxygen density measurements in low-pressure dc ischarge"Program of the 53rd Annual Gaseous Electronics Conference, ETP. 062. 45・6. 31-32 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai, Y.Suda and M.Mizuno: "Spatial distribution of excited C and Ar concentration in laser ablation carbon plume in Ar filling gas"Program of the 53rd Annual Gaseous Electronics Conference, ETP. 063. 45・6. 32 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Sakai, M.A.Bratescu, Y.Suda and M.Mizuno: "Measurement of Ar (1s_2) population in a carbon plume excited by ArF excimer laser using a laser absorption method"IEEE Conference Record-Abstracts The IEEE International Conference on Plasma Science, 2P19. 143 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai, Y.Suda and M.Mizuno: "Spatial and temporal distribution of C (3^1P_1°) ablation plume in various buffer gases"プラズマ科学シンポジウム2001/第18回プラズマプロセシング研究会(PSS-2001/SPP-18)プロシーディングス,P2-52. 381 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 鎌田剛弘,M.A.Bratescu,須田善行,菅原広剛,酒井洋輔: "エヴァネセント光を用いた放電管壁におけるXe(1s_5)の検出"平成12年度電気関係学会北海道支部連合大会講演論文集,No. 78. 112 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 水野学,M.A.Bratescu,須田善行,菅原広剛,酒井洋輔: "レーザーアブレーションプルームのレーザー吸収分光診断-Cプレーム中Ar(1s_2)密度の測定-"平成12年度電気関係学会北海道支部連合大会講演論文集,No. 79. 113 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 水野学,M.A.Bratescu,須田善行,酒井洋輔: "レーザーアブレーションプルームのレーザー吸収分光診断-Cプルーム中Ar(1s_2)密度の測定-"2000年電気学会基礎・材料・共通部門大会講演論文集,No.13-1. 299-304 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 鎌田剛弘,M.A.Bratescu,酒井洋輔: "レーザー吸収分光法によるプラズマ診断-各種混合ガス放電中の窒素原子密度測定-"2000年電気学会基礎・材料・共通部門大会講演論文集,No.13-2. 305-310 (2000)

    • Related Report
      2000 Annual Research Report
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Published: 2001-04-01   Modified: 2021-04-07  

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