| Budget Amount *help |
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2001: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2000: ¥1,200,000 (Direct Cost: ¥1,200,000)
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| Research Abstract |
The purpose of this study is to develop the spatial distribution real time spectrometry system on the ultraviolet radiation. In this study, the new ultraviolet Fourier spectroradiometry system using compact polarizing interferometer in which there was no moving part instead of conventional Michelson interferometer as the system which two-dimensionally and spectrally quickly evaluates the ultraviolet radiation was proposed, and the design, production and performance evaluation were carried out. In the research for 2 years, following results were obtained.
(1) The design specification of this system was decided as following. The measurable wavelength range is 200〜400 nm. The largest wavelength resolution is 10 nm or less ( at the 400 nm wavelength ). A measuring time is 30 msec or less. The dynamic range is over 10^2. The size of the system except for the data processing division is 100x1OOx100 mm or less.
(2) Based on the design specification, selection of light incidence system used for
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polarizing interferometer, selection of the polarizer, selection of birefringent material and production of the wedged crystal, selection of back incidence CCD for ultraviolet radiation and image capture system from CCD and development of data processing control were carried out. The light incidence system was constituted by the elements using the fused quartz which is transparent in the ultraviolet region. The Rochon prism of α-BBO was selected as polarizer and analyzer. The SiO2 crystal was selected as a birefringent material necessary for an optical path difference generation, and the chromatic dispersion was measured. As the result, it was confirmed that the SiO2 crystal had the sufficient characteristic in the ultraviolet region. As an ultraviolet image sensor, back incidence CCD for the ultraviolet radiation was selected, and the spectral responsibility was measured. As the result, it was confirmed that the CCD had sufficient response characteristic in the ultraviolet region.
(3) Image capture and data processing control program for the ultraviolet Fourier spectroscopy were developed.
(4) Birefringence crystal used for the polarizing interferometer was polished wedged with the design. Ultraviolet radiation source, incident light science system, polarizer and analyzer, birefringence crystal and back incidence CCD for the ultraviolet radiation were arranged, and the ultraviolet polarization property and refractive index characteristic were evaluated by the vacuum ultraviolet spectrometry system. As the result, the in-plane dispersion of spectral transmittance characteristic was within 2 %.
(5) As a result of relative measurement of conventional vacuum ultraviolet spectrometry system and this system using the ultraviolet radiation source, precision of wavelength was within 5 nm, and the wavelength resolution was within 10 nm. This result satisfies the design specification. And, a measuring time in the time was the 25 seconds.
(6) Multiple images were made using micro lens array (MLA) for the incidence division. The relative spectral distribution of the ultraviolet radiation source was measured every each. As the result, the following were confirmed : That it is usable to the 200 nm, wavelength and that the dispersion by the lens is within 2 %.
(7) As a result of measuring the chromatic aberration of the chromatic aberration on MLA was bigger, as it be comes the short wavelength, and it was proven that large error was generated, when two-dimensional data were decomposed at the wavelength. In the future, it is regarded as realizing the quantitative two-dimensional ultraviolet radiation spectrometry, by introducing MLA with small chromatic aberration. Less
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