| Project/Area Number |
12650421
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Measurement engineering
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| Research Institution | Nagaoka University of Technology |
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Principal Investigator |
MATSUDA Jin-ichi Nagaoka University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (30029087)
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| Co-Investigator(Kenkyū-buntansha) |
WADAMORI Naoki Nagaoka University of Technology, Faculty of Engineering, Technical Staff, 工学部, 教務職員 (60303179)
KATO Kazuo Nagaoka University of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (80115104)
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| Project Period (FY) |
2000 – 2001
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| Project Status |
Completed (Fiscal Year 2001)
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| Budget Amount *help |
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2001: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2000: ¥2,800,000 (Direct Cost: ¥2,800,000)
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| Keywords | Magnetic head / High frequency magnetic stray fields / Measurement of 3-DI magnetic field / Detection of electron beam position / Reflection electron beam / Measurement of deflection vector / Reconstruction algorithm / Electron beam tomography |
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| Research Abstract |
A new measuring system by reflection electron beam tomography has been developed to measure the stray magnetic fields of a magnetic head with gap length of 1 μm and under. We developed the measuring system to measure the magnetic stray fields of the magnetic head with gap length of 10 μm and over by reflection electron beam tomography, but it is difficult to measure the magnetic fields of a magnetic head for the high density magnetic record.
In this study, in order to improve the measurement accuracy of deflection data of electron beams deflected by the objected magnetic fields, a high accurate commercial type PSD (Position Sensing Detector) is introduced and its performance was studied experimentally. First, to improve the S/N ratio of the PSD, the parameter value of the feedback resistance in the current - voltage transform circuit was adjusted. Second, to obtain the good linearity of position detection of the electron beam, the incident current of electron beams onto the PSD is increased by changing the aperture size of the object lens and also increasing the excitation current of the condenser lens of the SEM. Unfortunately, though these modifications were done, the spatial resolute of the PSD was around 25 μm and can not be improved due to the resulting increment of the radius of the electron probe beams by changing the aperture size of the object lens. Finally, the sample stage for holding the magnetic head was modified to improve the reproduced accuracy of the decision of the stage. From these modifications, it is expected to measure the stray magnetic fields of a magnetic head with gap length of 1 μm and under for the high density magnetic record.
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