| Budget Amount *help |
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2001: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2000: ¥1,700,000 (Direct Cost: ¥1,700,000)
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| Research Abstract |
To develop a production method for optical rotary type angular acceleration sensor, the following trial productions and evaluation experiments were performed.
1. To reduce the relative error between the slits, slits were simultaneously printed onto two discs by using a specially produced experimental system composed of exposure apparatus and ultraviolet light emitting device.
2. The produced discs were assembled into acceleration sensor, and the periodic error signal was evaluated.
3. Trial production and accuracy evaluation of metallic disc, which embodies the slit-disc and the spring in one part, was performed.
The results of trial productions and evaluation experiments are as follows.
1. Although the proposed slit-disc production method is low-cost in comparison to the production method, which uses high-cost high-accuracy electronic beam method, the production of an optical rotary angular acceleration sensor with the same or in some cases even lower amplitude of periodic error signal is possible.
2. We verified that the slit-discs produced by metallic discs etching techniques are appropriate for high angular acceleration ratings (e.g. servo-motor levels).
3. We clarified the relations between dimensional accuracy of slits, rated angular acceleration and sensor's bandwidth, and gave guidelines for the sensor's design.
Conclusions :
1. The proposed production method is low-cost and the achieved accuracy is of the same level as with the previously used electronic beam production method, therefore we can conclude that the method is effective for production.
2. Trial productions of glass discs and metallic discs were performed, and by selection of appropriate application for the accuracy of each, a design of sensor with balanced cost and performance is possible.
Future considerations :
Optical rotary acceleration sensor product development and market needs research should be performed.
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