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Development of a Monitoring Device of Wall Deposition and Evaluation of Deposition Behavior for Gaseous and Cluster Contaminants in Air

Research Project

Project/Area Number 12650755
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 化学工学一般
Research InstitutionHIROSHIMA UNIVERSITY

Principal Investigator

SHIMADA Manabu  Graduate School of Engineering, Assistant Professor, 大学院・工学研究科, 助教授 (70178953)

Co-Investigator(Kenkyū-buntansha) OKUYAMA Kikuo  Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (00101197)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2002: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2001: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2000: ¥2,400,000 (Direct Cost: ¥2,400,000)
Keywordshydrocarbon system pollutant / attachment rate / adsorption / desorption / piezo balance / real time monitoring / micro contamination / ピエゾバランス / 吸着・脱着 / モニタリング
Research Abstract

(1) A piezo sensor was constructed by combining a quartz crystal oscillator and a high-frequency generator to develop a high-sensitivity mass monitor for indicating the amount of deposited contaminants. Performance evaluation of the monitor was made by using test contaminant gas. The time resolution of the measurements of deposited amount was improved drastically by increasing the standard frequency of the crystal oscillator.
(2) The time resolution of the present monitor was found to be several tens of seconds, which verified the availability of the monitor as a real-time monitoring device. The change of deposition rate with environmental factors was clarified. The dependence of deposition rate on the material of walls was also clarified by coating the crystal oscillator with different materials.
(3) Performance evaluation using a clean room under operation was made. The present monitor could measure the deposited amount with sufficiently high time-resolution even when deposition and desorption take place successively. A real-time estimation of the sources of contaminant gas was also found possible by performing simultaneous measurements using multiple sensors. A monitoring of air downstream of a chemical filter was made to prove that the monitor could detect the breakthrough of the filter promptly.
(4) The size distribution of clusters generated from airborne ions was clarified by constructing a measurement system. The deposition rate of water clusters onto a wall was obtained as well as the deposition behavior of clustered gases onto fine particles.
(5) Models to describe the transport and deposition of contaminant gas considering both adsorption and desorption were presented for the case in which more than one species of contaminant gas coexisted. By comparing the calculated results with the experimental data on deposition, the models were verified well and the factors influencing on the deposition of contaminant gas could be organized.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] 島田 学: "ガス状有機汚染物質の壁面付着量の実時間計測と付着挙動の評価"空気清浄. 40・(4). 275-281 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 島田 学: "水晶振動子を用いたガス状汚染物質の付着モニタ-クリーンルーム内のガス汚染のリアルタイムモニタリングへの適用-"クリーンテクノロジー. 12・(9). 34-37 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] MANABU SHIMADA: "Bipolar Charging of Aerosol Nanoparticles by a Soft X-ray Photoionizer"Journal of Chemical Engineering Japan. 35・(8). 786-793 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Chang Soo Kim: "Performance of a mixing-type CNC for nanoparticles at low-pressure conditions"Journal of Aerosol Science. 33・(10). 1389-1404 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Bangwoo Han: "Unipolar Charging of Nanosized Aerosol Particles Using Soft X-ray Photoionization"Aerosol Science and Technology. 37・(4). 330-341 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 本田重夫: "クリーンルームの有機化合物発生量に対する空調温度と高濃度トルエン暴露の影響"空気調和・衛生工学会論文集. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Bangwoo HAN: "Classification of Monodisperse Aerosol Particles using an Adjustable Soft X-ray Charger"Powder Technology. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Manabu Shimada: "Real-time measurement and evaluation of wall deposition behavior of gaseous organic contaminants"Journal of Japan Air Cleaning Association. 40-4. 275-281 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Manabu Shimada: "Adhesion monitor of gaseous pollutant using the crystal resonator - The application of gas pollution in the clean room to the real-time monitoring -"Clean Technology. 12-9. 34-37 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] MANABU SHIMADA: "Bipolar of charging of Aerosol Nanoparticles by a Soft X-ray Photoionizer"Journal of Chemical Engineering Japan. 35-8. 786-793 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Chang Soo Kim: "Performance of mixing-type CNC for nanoparticles at low-pressure conditions"Journal of Aerosol Science. 33-10. 1389-1404 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Bangwoo HAN: "Unipolar Charing of Nanosized Aerosol Particles Using Soft X-ray Photoinization"Aerosol Science and Technology. 37-4. 330-341 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shigeo HONDA: "Effects of Air Conditioning Temperature and High-Concentration Toluene Exposure on Generation Rate of Organic Compounds from Clearnroom surfaces"The Society of Heating, Air-Conditioning and Sanitary Engineering proceedings. in press. 330-341 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Bangwoo HAN: "Classification of Monodisperse Aerosol Particles using an Adjustable Soft X-ray Charger"Powder Technology. in press.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 島田 学: "ガス状有機汚染物質の壁面付着量の実時間計測と付着挙動の評価"空気清浄. 40・(4). 275-281 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 島田 学: "水晶振動子を用いたガス状汚染物質の付着モニタ-クリーンルーム内のガス汚染のリアルタイムモニタリングへの適用-"クリーンテクノロジー. 12・(9). 34-37 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Manabu Shimada: "Bipolar Charging of Aerosol Nanoparticles by a Soft X-ray Photoionizer"Journal of Chemical Engineering Japan. 35・(8). 786-793 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Chang Soo Kim: "Performance of a Mixing Type CNC for Nanoparticles at Low Pressure Conditions"Journal of Aerosol Science. 33・(10). 1389-1404 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Bang Woo Han: "Unipolar Charging of Nanosized Aerosol Particles Using Soft X-ray Photoionization"Aerosol Science and Technology. (in press).

    • Related Report
      2002 Annual Research Report
  • [Publications] 本田重夫: "クリーンルームの有機化合物発生量に対する空調温度と高濃度トルエン暴露の影響"空気調和・衛生工学会論文集. (印刷中).

    • Related Report
      2002 Annual Research Report
  • [Publications] Bang Woo Han: "Classification of Monodisperse Aerosol Particles Using an Adjustable Soft X-ray Charger"Powder Technology. (in press).

    • Related Report
      2002 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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