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Novel Low-Cost Technology for Fabrication of Liquid Crystal Display

Research Project

Project/Area Number 12792007
Research Category

Grant-in-Aid for University and Society Collaboration

Allocation TypeSingle-year Grants
Research Field 電子デバイス・機器工学
Research InstitutionJAIST (Japan Advanced Institute of Science and Technology)

Principal Investigator

MATSUMURA Hideki  School of Materials Science, Professor, 材料科学研究科, 教授 (90111682)

Co-Investigator(Kenkyū-buntansha) IZUMI Akira  School of Materials Science, Assistant Engineer, 材料科学研究科, 助手 (30223043)
NITTA Koh-hei  School of Materials Science, Assistant Professor, 材料科学研究科, 助教授 (70260560)
TERANO Minoru  School of Materials Science, Professor, 材料科学研究科, 教授 (90251975)
KIDA Ken-ichiro  Ishikawa Seisakusyo, LTD, システム機器開発部, 研究員
MASUDA Atsushi  School of Materials Science, Assistant Engineer, 材料科学研究科, 助手 (30283154)
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥55,300,000 (Direct Cost: ¥55,300,000)
Fiscal Year 2002: ¥28,100,000 (Direct Cost: ¥28,100,000)
Fiscal Year 2001: ¥27,200,000 (Direct Cost: ¥27,200,000)
Keywordsin-print method / patterning / lithography / thin film transistor / liquid crystal display
Research Abstract

The present research is concerned with a new technology for patterning process in fabricating thin film transistors (TFTs) used in liquid crystal display. Photolithography is conventionally used for this patterning process. However, a novel method are presented in this research projects, in which patterns are formed by press of a mold having 凹凸 patterns onto organic soft films laminated on substrates. By this method, low-cost pattern printing is attempted for TFT fabrication.
Actually, by using soft organic films such as polyethylene and polysthylene, TFTs with characteristics equivalent to those fabricated by the conventional photolithography can be successfully fabricated. Additionally, during this research, a new method, in which micron-size silicon integrated circuits are attached onto substrate just like a printing ink instead of making TFT, is proposed, and its feasibility is also successfully confirmed.

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] 木田健一郎, 新田晃平, 寺野稔, 松村英樹: "インプリント法によるTFT作製"2002-2 高分子エレクトロニクス研究会講演予稿集. 5-8 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Rui Morimoto, Akira Izumi, Atsushi Masuda, Hideki Matsumura: "Low-resistivity phosphorus-doped polycrystalline silicon thin films formed by catalytic chemical vapor deposition and successive rapid thermal annealing"Japanese Journal of Applied Physics Part 1. 41巻2A号. 501-506 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Atsushi Masuda, Akira Izumi, Hironobu Umemoto, Hideki Matsumura: "What is the difference between catalytic CVD and plasma-enhanced CVD? -Gas-phase kinetics and film properties"Vacuum. 66巻3-4号. 293-297 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Izumi, Hideki Matsumura: "Photoresist removal using atomic hydrogen generated by heated catalyzer"Japanese Journal of Applied Physics Part 1. 41巻7A号. 4639-4641 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.W.Shin, H.Nakatani, T.Uozumi, B.Liu, K.Nitta, M.Terano: "Stepwise polymerization of propylene and ethylene with Cr(acethylacetonate)3/MgCl2 -ethylebenzoate/diethyle\aluminium chloride catalyst system"Polymer Int.. vol.52. 19-34 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Nitta, M.Takayanagi: "Novel Proposal of Lamellar Clustering Process for Elucidation of Tensile Yield Behavior of Linear Polyethylenes"J. Macromol. Sci. Phys.. vol.42. 109-128 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Kida, K.Nitta, M.Terano, H.Matsumura: "Fabrication of TFT for in-print method"Research Group on Electrical and Electronic Properties of Polymers. 5-8 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Rui Morimoto, Akira Izumi, Atsushi Masuda, Hideki Matsumura: "Low-resistivity phosphorus-doped polycrystalline silicon thin films formed by catalytic chemical vapor deposition and successive rapid thermal annealing"Japanese Journal of Applied Physics Part 1. Vol.41, 2A. 501-506 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Atsushi Masuda, Akira Izumi, Hironobu Umemoto, Hideki Matsumura: "What is the difference between catalytic CVD and plasma-enhanced CVD? -Gas-phase kinetics and film properties"Vacuum. Vol.66, 3-4. 293-297 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Izumi, Hideki Matsumura: "Photoresist removal using atomic hydrogen generated by heated catalyzer"Japanese Journal of Applied Physics Part 1. Vol.41, 7A. 4639-4641 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.W.Shin, H.Nakatani, T.Uozumi, B.Liu, K.Nitta, M.Terano: "Stepwise polymerization of propylene and ethylene with Cr(acethylacetonate)3/MgCl2-ethylebenzoate/diethyle\aluminium chloride catalyst system"Polymer Int.. Vol.52. 19-34 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Nitta, M.Takayanagi: "Novel Proposal of Lamellar Clustering Process for Elucidation of Tensile Yield Behavior of Linear Polyethylenes"J. Macromol. Sci.-Phys.. Vol.42. 109-128 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 木田健一郎, 新田晃平, 寺野稔, 松村英樹: "インプリント法によるTET作製"2002-2 高分子エレクトロニクス研究会講演予稿集. 5-8 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Rui Morimoto, Akira Izumi, Atsushi Masuda, Hideki Matsumura: "Low-resistivity phosphorus-doped polycrystalline silicon thin films formed by catalytic chemical vapor deposition and successive rapid thermal annealing"Japanese Journal of Applied Physics Part 1. 41巻2A号. 501-506 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Atsushi Masuda, Akira Izumi, Hironobu Umemoto, Hideki Matsumura: "What is the difference between catalytic CVD and plasma-enhanced CVD? -Gas-phase kinetics and film properties"Vacuum. 66巻3-4号. 293-297 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Akira Izumi, Hideki Matsumura: "Photoresist removal using atomic hydrogen generated by heated catalyzer"Japanese Journal of Applied Physics Part 1. 41巻7A号. 4639-4641 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.W.Shin, H.Nakatani, T.Uozumi, B.Liu, K.Nitta, M.Terano: "Stepwise polymerization of propylene and ethylene with Cr(acethylacetonate)3/MgCl2-ethylebenzoate/diethylaluminium chloride catalyst system"Polymer Int.. vol.52. 19-34 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Nitta, M.Takayanagi: "Novel Proposal of Lamellar Clustering Process for Elucidation of Tensile Yield Behavior of Linear Polyethylenes"J. Macromol. Sci.-Phys.. vol.42. 109-128 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 木田健一郎, 松村英樹: "インプリント法によるTFT作製"平成13年秋季応用物理学会学術講演会講演予稿集. vol.62. 588-588 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Sakai, T.Tsutsumi, T.Yosioka, A.Masuda, H.Matsumura: "High Performance amorphous-silicon thin film transistors prepared by catalytic chemical vapor deposition with high deposition rate"Thin Solid Films. vol.395. 330-334 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Matsumura, A.Masuda, A.Izumi: "Cat-CVD Technology as a New Tool for Fabrication of Larg Area Display"Proc. of the 2nd mt. Display Manufactuing Conf., Seoul, Jan., 2002. 143-146 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Koh-hei Nitta: "Structural factors controlling tensile yield deformation of semi-crystalline nolymers"Macromolecular Symposia. vol.170. 311-319 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.W.Shin, T.Uozumi, M.Terano, K.Nitta: "Synthesis and Characterization of Ethylene-Propylene Random Copolymers with Isotactic Propylene Sequence"Polymer. vol.42. 9611-9615 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Kono, H.Mon, M.Terano: "ovel olefin block copolymer, polypropene-block-poly(methylene-1,3-cyclopentane-co-propene),synthesized from propene and 1,5-hexadiene with modified stopped-flow method"Macromol. Chem. Phys. vol.202,no.8. 1319-1326 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Hideki Matsumura: "Summary of research in NEDO Cat-CVD project in Japan"Extended Abstract of the 1st International Conference on Cat-CVD (Hot-Wire CVD) Process. 1-14 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Masahiro Sakai Hideki Matsumura: "High performance amorphous-silicon thin film transistors prepared by catalytic chemical vapor deposition with high deposition rate"Extended Abstract of the 1st International Conference on Cat-CVD(Hot-Wire CVD) Process. 311-314 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Minoru Terano: "Lifetime of growing polymer chain in stopped-flow propene polymerization using pre-treated Ziegler catalysits"Macromol.Chem.Phys.. 201. 289-295 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Koh-hei Nitta: "Comparison of tensile properties in the pre-yield region of metallocene-catalyzed and Zeigler-Natta-catalyzed linear polythelenes"J.of Materials Science. 35. 2719-2727 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Akira Izumi: "Plasma and fluorocarbon-gas free Si dry etching process using a Cat-CVD system"Microelectronic Engineering. 51-52. 495-503 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] Atushi Masuda: "Effects of atomic H and chamber cleaning in catalytic CVD on reproducibility of a-Si:H film properties"Digest of Technical Papers 2000 International Workshop on Active-Matrix Liquid-Crystal Displays-TFT Technologies and Related Materials-. 219-222 (2000)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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