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Design and Processing of Environmental Gas Sensors Fabricated by Utilizing Decorative Technique on Pottery and Porcelain

Research Project

Project/Area Number 12792014
Research Category

Grant-in-Aid for University and Society Collaboration

Allocation TypeSingle-year Grants
Research Field Structural/Functional materials
Research InstitutionNagasaki University

Principal Investigator

EGASHIRA Makoto  Nagasaki University, Faculty of Engineering, Professor, 工学部, 教授 (60037934)

Co-Investigator(Kenkyū-buntansha) WADA Kenji  Sasebo National College of Technology, Professor, 教授 (30044457)
HYODO Takeo  Nagasaki University, Faculty of Engineering, Research Associate, 工学部, 助手 (70295096)
SHIMIZU Yasuhiro  Nagasaki University, Graduate School of Science and Technology, Associate Professor, 生産科学研究科, 助教授 (20150518)
KAWAHARA Akihiko  Saga Ceramic Research Laboratory, Fellow, 特別研究員
Project Period (FY) 2000 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥29,600,000 (Direct Cost: ¥29,600,000)
Fiscal Year 2002: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2001: ¥26,600,000 (Direct Cost: ¥26,600,000)
KeywordsSlide-Off Transfer Printing / Semiconductor Gas Sensor / Hydrogen / Nitrogen Oxide / VOC / Chemical Surface Modification / Diethoxydimethylsilane / Barium Titanate / 転写印刷 / ヘテロ積層 / 半導体センサ / 可燃性ガス / 強誘電体 / 芳香族系有機化合物 / ゼータ電位 / NOx
Research Abstract

Fabrication of high-sensitive semiconductor gas sensors and application to other electronic devices by utilizing a slide-off transfer printing were attempted as below.
1. Inflammable gas sensors Hetero-stacking of a pure SnO_2 layer over a Pt-loaded SnO_2 layer (SnO_2/Pt-SnO_2 sensor) led to the highest increase in H_2 sensitivity, whereas H_2 sensitivity of a Pt-SnO_2/SnO_2 sensor was much lower than that of the pure SnO_2 sensor. Stacking of a SnO_2-based layer over a TiO_2 layer also led to an increase in the H_2 sensitivity with a decrease in sensor resistance. On the other hand, NiO-loaded In_2O_3-based sensors showed high sensitivity to benzene and monochlorobenzene. Moreover, an SnO_2 sensor with a porous substrate layer (the porosity : ca. 56.2%) between the SnO_2 layer and a dense alumina substrate showed higher n-C_4H_<10> sensitivity compared with that fabricated directly on a dense alumina substrate.
2. NO_x sensor Heterolayer Pt-Al_2O_3/WO_3 and Cr_2O_3-SnO_2 single layer se … More nsor were confirmed to operate as a total NO_x sensor ZnO-WO_3/ZnO sensor showed high NO_2 sensitivity and short response/recovery properties. In addition, introduction of a porous alumina sub-layer between a sensing layer and a dense substrate was effective to improve the NO_2 sensitivity and the response/recovery properties.
3. Chemical surface modification of SnO_2 powder with ethoxysilane An SiO_2 thin film induced by the surface modification with diethoxydimethylsilane was found to exist as a grain-boundary phase from TEM observation. The limitation of neck growth between SnO_2 particles by the SiO_2 thin film coating is anticipated to be responsible for increasing the potential barrier height and improving the sensing properties to inflammable gases such as H_2, CH_4 and C_3H_8.
4. Microstructure control of BaTiO_3 thick films Composition of a slurry containing BaTiO_3 fine powder prepared hydrothermally, some sintering aids, printing oil and 2-propanol was optimized for being utilized to a spin-coating technique. In consequence, dense and thick BaTiO_3 films (10-20μm) could be fabricated on a silicon substrate after calcination at 1050-1120℃. Less

Report

(4 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • 2000 Annual Research Report
  • Research Products

    (47 results)

All Other

All Publications (47 results)

  • [Publications] T.Hyodo: "Hydrogen sensing properties of SnO_2 varistors loaded with SiO_2 by surface chemical modification with diethoxydimethylsilane"Sensors and Actuators B. 64巻 1-3号. 175-181 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Kawahara: "Gas-sensing properties of semiconductor heterolyaers fabricated by a slide-off printing method"Sensors and Actuators B. 65巻 1-3号. 17-22 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 川原昭彦: "半導体ガスセンサ基板の多孔質化"Chemical Sensors. 16巻 B号. 118-120 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 兵頭健生: "転写印刷法によるヘテロ積層型NO_xセンサの開発"Chemical Sensors. 16巻 B号. 121-123 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 和田憲治: "ジエトキシジメチルシランで表面化学改質したSnO_2のガス検出特性に及ぼすPd及びPtの添加効果"電気学会論文誌E. 120巻 10号. 452-461 (2000)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Hyodo: "Gas sensing properties of semiconductor heterolayer sensors fabricated by slide-off transfer printing"Sensors and Actuators B. 77巻 1-2号. 41-47 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Kawahara: "Application of a slide-off transfer printing method to fabrication of ceramic gas sensor"Proceedings of 18th Int. Japan-Korea Ceramics Seminar. 114-118 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Wada: "NO_x sensing properties of Al-doped ZnO thick film sensors"Chemical Sensors. 17巻 B号. 279-281 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Jono: "NO_x sensing properties of Cr_2O_3-SnO_2 sensors fabricated by slide-off transfer printing"Chemical Sensors. Vol.17 No.B. 282-284 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Kawahara: "NO_x sensing characteristics of ZnO-based heterolayer sensors fabricated by slide-off transfer printing"Chemical Sensors. Vol.17 No.B. 285-287 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Yamaguchi: "Gas-sensing properties of semiconductor metal oxides to benzene and chlorobenzene"Chemical Sensors. Vol.17 No.B. 321-323 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 兵頭健生: "セラミックスの微細構造制御によるガスセンシング機能の向上とそのメカニズムの解明"Chemical Sensors. Vol.18 No.A. 28-30 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 兵頭健生: "機能性セラミックスを創る -ナノ・ミクロ構造のコントロール-"「トークシャワーイン九州」資料. 12-15 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 清水康博: "ミクロ・マクロ構造制御による半導体ガスセンサの高性能化"Chemical Sensors. Vol.18 No.3. 28-30 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Hyodo: "NO_x sensing properties of WO_3-based semiconductor gas sensors fabricated by slide-off transfer printing"Electrochemistry. (in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "Hydrogen sensing properties of SnO_2 varistors loaded with SiO_2 by surface chemical modification with diethoxydimethylsilane"Sensors and Actuators B. 64-1-3. 175-181 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kawahara,Akihiko: "Gas-sensing properties of semiconductor heterolyaers fabricated by a slide-off printing method"Sensors and Actuators B. 65-1-3. 17-22 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kawahara,Akihiko: "Employment of porous ceramics as the substrates of semiconductor gas sensors"Chemical Sensors. 16-B. 118-120 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "Development of heterolayer NO_x sensors by slide-off transfer printing"Chemical Sensors. 16-B. 121-123 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Wada,Kenji: "Effects of Pd- and Pt-loading on the gas-sensing properties of SnO2 subjected to surface chemical modification with diethoxydimethylsilane"T.IEE Japan. 120-E-10. 452-461 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "Gas sensing properties of semiconductor heterolayer sensors fabricated by slide-off transfer printing"Sensors and Actuators B. 77-1-2. 41-47 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kawahara,Akihiko: "Application of a slide-off transfer printing method to fabrication of ceramic gas sensor"Proceedings of 18th Int. Japan-Korea Ceramics Seminar. 114-118 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Wada,Kenji: "NO_x sensing properties of Al-doped ZnO thick film sensors"Chemical Sensors. 17-B. 279-291 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Jono,Ayami: "NO_x sensing properties of Cr_2O_3-SnO_2 sensors fabricated by slide-off transfer printing"Chemical Sensors. 17-B. 282-284 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kawahara,Akihiko: "NO_x sensing characteristics of ZnO-based heterolayer sensors fabricated by slide-off transfer printing"Chemical Sensors. 17-B. 285-287 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yamaguchi,Shoko: "Gas-sensing properties of semiconductor metal oxides to benzen and chlorobenzen"Chemical Sensors. 17-B. 321-323 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "Mechanism of sensitivity enhancement of semiconductor gas sensors induced by microstructural control"Chemical Sensors. 18-A. 28-30 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "Preparation of functional ceramics -Control of nano- and micro-structure-"Proceedings of Talk Shower in Kyushu. 12-15 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shimizu,Yasuhiro: "Development of high performance semiconductor gas sensor by micro- and macro-structural design"Chemical Sensors. 18-B. 28-30 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hyodo,Takeo: "NO_x sensing properties of WO_3-based semiconductor gas sensors fabricated by slide-off transfer printing"Electrochemistry. in press.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 兵頭健生: "セラミックスの微細構造制御によるガスセンシング機能の向上とそのメカニズムの解明"Chemical Sensors. Vol.18(A). 28-30 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 清水康博: "ミクロ・マクロ構造制御による半導体ガスセンサの高性能化"Chemical Sensors. Vol.18(B). 28-30 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 清水康博: "ミクロ・マクロ構造制御による半導体ガスセンサの高性能化"Chemical Sensors. Vol.18(2). 42-54 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takeo Hyodo: "NO_x sensing properties of WO_3-based semiconductor gas sensors fabricated by slide-off transfer printing"Electrochemistry. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Hyodo: "Gas Sensing Properties of Semiconductor Heterolayer Sensors Fabricated by Slide-Off Transfer Printing"Sensors and Actuators B. 77巻 1-2号. 41-44 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Jono: "NO_x Sensing Properties of Cr_2O_3-SnO_2 Sensors Fabricated by Slide-Off Transfer Printing"Chemical Sensors (Proceedings of the 5th East Asia Conference on Chemical Sensors). 17巻 B号. 282-284 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Kawahara: "NOx Sensing Characteristics of ZnO-Based Heterolayer Sensors Fabricated by Slide-Off Transfer Printing"Chemical Sensors (Proceedings of the 5th East Asia Conference on Chemical Sensors). 17巻 B号. 285-287 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Yamaguchi: "Gas-Sensing Properties of Semiconductor Metal Oxides to Benzene and Chlorobenzene"Chemical Sensors (Proceedings of the 5th East Asia Conference on Chemical Sensors). 17巻 B号. 321-323 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Kawahara: "Application of a Slide-Off Transfer Printing Method to Fabrication of Ceramic Gas Sensor"Proceedings of the 18th International Japan-Korea Seminar on Ceramics. 114-118 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Kawahara: "Gas-Sensing Properties of Semiconductor Heterolyaers Fabricated by a Slide-Off Printing Method"Sensors and Actuators B. Vol.65 No.1-3. 17-22 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Hyodo: "Gas Sensing Properties of Semiconductor Heterolayer Sensors Fabricated by Slide-Off Transfer Printing"Abstract Book of the 8th International Meeting on Chemical Sensors, July 2-5, 2000, Basel, Switzerland. 73 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 川原昭彦: "半導体ガスセンサ基板の多孔質化"Chemical Sensors. Vol.16 No.B. 118-120 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 兵頭健生: "転写印刷法によるヘテロ積層型NOxセンサの開発"Sensors and Actuators B. Vol.16 No.B. 121-123 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] K.Wada: "Hydrogen Sensing Properties of SnO_2 Subjected to Surface Chemical Modification with Ethoxysilanes"Sensors and Actuators B. Vol.62 No.3. 211-219 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Hyodo: "Hydrogen Sensing Properties of SnO_2 Varistors Loaded with SiO_2 by Surface Chemical Modification with Diethoxydimethylsilane"Sensors and Actuators B. Vol.64,No.1-3. 175-181 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] 和田憲治: "ジエトキシジメチルシランで表面化学改質したSnO_2のガス検出特性に及ぼすPd及びPtの添加効果"電気学会論文誌E. Vol.120 No.10. 452-467 (2000)

    • Related Report
      2000 Annual Research Report
  • [Publications] T.Hyodo: "Gas Sensing Properties of Semiconductor Heterolayer Sensors Fabricated by Slide-Off Transfer Printing"Sensors and Actuators B. (印刷中). (2001)

    • Related Report
      2000 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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