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Development of Moving Light Wave Guide Structure including an Actuator for Optical MEMS

Research Project

Project/Area Number 12838003
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 複合化集積システム
Research InstitutionYamaguchi University

Principal Investigator

MINAMI Kazuyuki  Yamaguchi University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (00229759)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhiro  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50164893)
Project Period (FY) 2000 – 2001
Project Status Completed (Fiscal Year 2001)
Budget Amount *help
¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2001: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2000: ¥3,300,000 (Direct Cost: ¥3,300,000)
KeywordsMicromachine / Optical Device / Light Wave Guide / MEMS / Actuator / アクチュエータ
Research Abstract

1. Investigation of the polymer for light wave guide
The solubility of commercial transparent elastmers for organic solvents was investigated. This result suggests the combination of the elastmers for making flexible optical wave-guide.
2. Development of the fabrication process of polymer optical wave guide
The etching process of the fluorinated polyimide for the wave-guide was developed. The process of the oblique etching by oxygen ion was established and it makes feasible to fabricate the oblique mirror in an optical device.
3. Design and fabrication of one dimensional optical scanner
Design of the one-dimensional optical scanner was done. Theoretical equation for estimating stiffness of wave-guide was also derived. According to the design results, the fabrication process was proposed and carried out. Some problems were found in the process and they were fixed by changing the mask and the process parameters. The wave-guide and the electrical wire in the scanner structure were successfully fabricated. However, serious problem appeared. The polyimide was damaged during the longtime deep etching for making the final scanner structure. It seems to be caused by the heating by the ion bombardment The suitable process parameter could not be found though the process condition was investigated. The problem may be caused by the equipment characteristics, too. In future, the improvement of the cooling of a sample stage and cooling method will be necessary.

Report

(3 results)
  • 2001 Annual Research Report   Final Research Report Summary
  • 2000 Annual Research Report
  • Research Products

    (3 results)

All Other

All Publications (3 results)

  • [Publications] 岩本智彦, 南和幸: "導波路直接駆動型光デバイスの試作"日本機械学会中国四国支部40期講演会講演論文集. No.250-1. 431-432 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] Iwamoto,Tomohiko and Minami, Kazuyuki: "Fabrication of the direct drive wave-guide optical device"JSME Chugoku-Sikoku Brunch 40th meeting, Digest of the paper (Japanese). No. 250-1. 432-432 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2001 Final Research Report Summary
  • [Publications] 岩本智彦, 南 和幸: "導波路直接駆動型光デバイスの試作"日本機械学会中国四国支部第40期講演会講演論文集. No.250-1. 431-432 (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2000-04-01   Modified: 2016-04-21  

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