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完全界面制御プロセスによる機能調和素子創成

Research Project

Project/Area Number 13025228
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionOsaka University

Principal Investigator

田畑 仁  大阪大学, 産業科学研究所, 教授 (00263319)

Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥42,100,000 (Direct Cost: ¥42,100,000)
Fiscal Year 2003: ¥14,000,000 (Direct Cost: ¥14,000,000)
Fiscal Year 2002: ¥14,000,000 (Direct Cost: ¥14,000,000)
Fiscal Year 2001: ¥14,100,000 (Direct Cost: ¥14,100,000)
Keywords強誘電体 / 強磁性体 / バイオエレクトロニクス / 自己組織化 / レーザーMBE / メモリ素子 / DNA・バイオチップ / ナノバイオテクノロジー / ペロブスカイト / 機能調和材料 / ナノテクノロジー / 人工格子 / 構造相転移
Research Abstract

(1)日本初のオリジナルのメモリデバイス作製:シリコンと強誘電体薄膜のインテグレーションを目指し実施中の研究により、従来の酸化物強誘電体材料の持つ欠点を克服する新材料として、スピングラス、双極子グラス、ワイドギャップ酸化物半導体(ZnO等)物質を選定し、シリコン半導体素子へのインテグレーションを実施した。
さらにナノ電極^*間にDNA等の有機メモリ分子を組み込んだナノ構造制御メモリ素子も作製。
(2)メモリデバイスの量子サイズ効果と集積化素子特性評価:(1)で選択したメモリ材料の素子サイズ(膜厚、パターン形状)の変化に伴う、メモリ特性(誘電率、磁化率)の変化を調べ、誘電体の電子分極および磁性体のスピンとの相関を明らかにし、デバイスとして動作する物理的な集積化の限界を明らかにした。特に、極限のサイズ領域(10-20nm膜厚)における、誘電物性の変化(量子効果)を評価するため、原子間力顕微鏡(AFM)に組み込んだ誘電物性評価装置を用いて、集積化時の素子特性を明らかにした。^<**>名取(筑波大)らの理論的予測と比較して考察を行った。
また、ナノスケールへの集積化時に課題となる、完全界面制御を確立するため、これまでに構築してきたシリコン(100)および(111)表面上へ形成した強誘電体薄膜、およびバッファー層に使用する極薄(1nm程度)SiON形成技術を確立した。この為の界面評価は高分解能TEMを用いた^<***>。
*、**、***については、堀池(東大)、一木(東洋大)、名取(筑波大)、田中(名大)らと共同して進めた。

Report

(3 results)
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (64 results)

All Other

All Publications (64 results)

  • [Publications] S.Tanaka: "Electrical Conducting Properties of DNA Molecules in a Metal (tip)/DNA /Highly Oriented Pyrolytic Graphite Configuration"Jpn.J.Appl.Phys.. 42. 2818-2823 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Tabata: "Toward the DNA electronics"Synthetic Metals. 133-134. 469-472 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Masuda: "Transparent thin films transistors using ZnO as an active channel layer and their electrical properties"J.Appl.Phys.. 93. 1624-1630 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Matsui: "Influence of Co-doping with Ga on the electrical and optical properties of N-doped ZnO films"J.Electrochem.Soc.. 150. G508-G512 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Matsui: "Role of Ga for co-doping of Ga with N in ZnO Films"Jpn.J.Appl.Phys.. 42. 5494-5499 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Hotta: "Artificial Control of Order Degree State of B-Site Ions in Ba(Zr,Ti)O3 by a Superlattice Technique"Jpn.J.Appl.Phys.. 42. 5908-5912 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Taniguchi: "Humidity Dependence of Electrical Resistivity in Poly(dG)・Poly(dC) DNA Thin Film"Jpn.J.Appl.Phys.. 42. 6629-6630 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Tabata: "Control of the ordered-disordered state of B-site ions in ferroelectric relaxor superiattices"J.Kor.Phys.Soc.. 42. S1199-S1202 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.G.Park: "Photoinduced Ferroelectric Hysteresis Curve in Organic Photoconductor/Inorganic Ferroelectic Heterojunction Photomemory"J.Kor.Phys.Soc.. 42. S1382-S1385 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Tabata: "Electrical Properties of DNA Molecules- Toward the DNA Nano-Electrics-"Proc.of 2nd Int.Conf.on Molecular Electronics and Bioelectronics. 151 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁: "DNAエレクトロニクス"表面科学. 24(11). 677-683 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁: "ナノワイヤーとしてのDNA"高分子. 52(3). 126-129 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁: "DNAを用いたボトムアップ半導体プロセス"M&E. 12月号. 168-175 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁: "DNA半導体"日経バイオビジネス. 6月号. 78-79 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Choopun: "Orthorhombic Molybdenum Trioxide Whiskers by Vapor Transport Method"Jpn.J.Appl.Phys.. 43. L91-L93 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁(分担執筆): "薄膜工学"丸善株式会社. 310 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田畑 仁(分担執筆): "イオン工学ハンドブック"(株)イオン工学研究所. 1126 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Shimuta: "Enhancement of remanent polarization in epitaxial BaTiO_3/SrTiO_3 superlattices with "asymmetric" structure"J.Appl.Phys.. 91. 2290-2294 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Otsuka: "Influence of humidity on the electrical conductivity of synthesized DNA film on nanogap electrode"Jpn.J.Appl.Phys.. 41. 891-894 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.H.Gu: "Self-assembled dye-DNA network and its photoinduced electrical conductivity"Appl.Phys.Lett.. 80. 688-690 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Hotta: "Determination of the optimal cation composition of ferroelectric (Zn_xCd_<1-x>)S thin films for applications to silicon-based nonvolatile memories"Appl.Phys.Lett.. 80. 3180-3182 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] X.L.Guo: "p-Type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N_2O plasma"Optical Materials. 19. 229-233 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] X.L.Guo: "Epitaxial growth and optoelectronic properties of nitrogen-doped ZnO films on ( 11-20)Al_2O_3 substrate"J.Cryst.Growth. 237-239. 544-547 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Mine: "Characteristics of mechanically tunable superconductive resonators"Supercond.Sci.Technol.. 15. 635-638 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Joseph: "Preparation of La_<0.9>Sr_<0.1>Ga_<0.85>Mg_<0.15>O_<2.875> thin films by pulsed-laser deposition and conductivity studies"J.Appl.Phys.. 92. 997-1001 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y-G Park: "Photo-induced ferroelectric hysteresis curve in organic CuPc photoconductor/inorganic BaTiO_3 ferroelectric heterojunction photomemory"Appl.Phys.Lett.. 81. 1318-1320 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.H.Gu: "Electric conductivity of dye modified DNA films with and without light irradiation in various humidities"J.Appl.Phys.. 92. 2816-2820 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] O.Nakagawara: "Dependence of dielectric and ferroelectric behaviors on growth orientation in epitaxial BaTiO_3/SrTiO_3 superlattices"Vaccum. 66. 397-401 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Nishikawa: "Preparation of directly stacked YBa_2Cu_3O_7-delta/oxide magnetic material thin films on Al_2O_3(0001) substrate"Supercond.Sci.&Tech.. 15. 170-173 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Tanaka: "Synthesis of Poly(dA)・Poly(dT) DNA without structural defects using enzymatic reaction ; tailored ligated Poly(dA)・Poly(dT)"Chem.Commun.. 91. 2330-2331 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Tabata: "Toward the DNA electronics"Synthetic Metals. 9480. 1-4 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Masuda: "Transparent thin films transistors using ZnO as an active channel layer and their electrical properties"J.Appl.Phys.. 93(in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Matsui: "Influence of-co-doping with Ga on the electrical and optical properties of N-doped ZnO films"Electrochem.Soc.. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Matsui: "Effect of chemical doping with Ga and N on electrical and optical properties of ZnO thin films"Ext.Abstract of the 2002 Int.Conf.of SSDM. 362-363 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Saeki: "Magnetism of transition-metal doped ZnO thin films"Proc.of the 8th Physics and application of spin-related phenomena in semiconductors. 65-68 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Tabata: "Control of the orfered-disorederd state of B-site ions in ferroelectric relaxor superlattices"J.Kor.Phys.Soc.. 29(in press). (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田畑 仁: "極限界面制御による機能性材料-シリコン インテグレーション"Semiconductor FPD World. 5. 63-65 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田畑 仁: "DNAナノテクノロジー"応用物理. 71. 1007-1013 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田畑 仁(分担執筆): "マイクロマシン"産業技術サービスセンター. 294-303 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田畑 仁(分担執筆): "イオン工学ハンドブック"共立出版. 933-937 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田畑 仁(分担執筆): "薄膜工学"丸善. 231-243 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Ueda: "Artificial Control of Spin Order and Magnetic Properties in LaCrO_3-La Fe O_3 and LaMnO_3-LaFeO_3 Superlattices"Appl.Phys.A. (in press). (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] X.L.Guo: "Fabrication and Optoelectronic Properties of a Transparent ZnO Homostructural Light-Emitting Diode"Jpn.J.Appl.Phys.. 40. L177-L180 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Ueda: "Atomic ordering in the LaFe_<0.5>Mn_<0.5> O_3 solution film"Appl.Phys.Lett.. 78(4). 512-514 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] X.L.Guo: "Pulsed laser reactive deposition of p-type ZnO film enhanced by an electron cyclotron resonance source"J.Cryst.Growth. 223. 135-139 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Ueda: "Control of magnetic properties in LaCrO_3-LaFeO_3 artificial superlattices"J.Appl.Phys.. 89(5). 2847-2851 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Hotta: "Optimization of electronic-band alignments at ferroelectric (Zn_xCd_<1-x>S/Si(100) interfaces"Appl.Phys.Lett.. 78(21). 3283-3285 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Joseph: "Fabrication of the low-resistive p-type ZnO by codoping method"Physica B. 302-303. 140-148 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Tanaka: "Formation of two-dimensional network structure of DNA molecules on Si substrate"Jpn.J.Appl.Phys.. 40(4B). L407-L409 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Tanaka: "Formation of two dimensional network structure of DNA molecules on highly ordered pyrolytic graphite surface"Jpn.J.Appl.Phys.. 40(6A). 4217-4220 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] J.H.Choi: "Initial preferred growth in zinc oxide thin films on Si and amorphous substrates by a pulsed laser deposition"J.Cryst.Growth. 226. 493-500 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] E.Rokuta: "Ferroelectric Bi_4Ti_3O_<12> Films on Si(100) with An Ultrathin Buffer Layer of Silicon Oxynitride : A Comparative Study Using X-Ray Photoelectron Spectroscopy"Jpn.J.Appl.Phys.. 40(9B). 5564-5568 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Ueda: "Magnetic and electric properties of transition-metal-doped ZnO films"Appl.Phys.Lett.. 79(7). 988-990 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Maeda: "Two-dimensional assembly of gold nanoparticles with a DNA network template"Appl.Phys.Lett.. 79(8). 1181-1183 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] E.Rokuta: "Effects of an ultrathin silicon oxynitride buffer layer on electrical properties of ferroelectric Bi_4Ti_3O_<12> thin films on p-Si(100) surfaces"Appl.Phys.Lett.. 79(3). 403-405 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] L.T.Cai: "Probing electrical properties of oriented DNA by conducting atomic force microscopy"Nanotechnology. 12. 211-216 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Muraoka: "Effects of light-irradiation on spin-glass state and magnetoresistive properties of Zn_<0.5>Co_<0.5>Fe_2O_4 spinel ferrite films"Solid State Commn.. 120. 255-258 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Hide Tanaka: "Novel functional magnetic oxide artificial lattices in strongly correlated electron system"Transactions of the Mat.Res.Soc.of Japan. 26(3). 1033-1036 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Saeki: "Magnetic and electric properties of vanadium doped ZnO films"Solid State Comm.. 120. 439-443 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] E.Rokuta: "Interface control of Bi_4Ti_3O_<12> film growth on Si(100) by use of an ultrathin silicon oxynitride buffer layer"Appl.Phys.Lett.. 79(12). 1858-1860 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 田畑 仁: "遷移金属酸化物人工格子によるスピン制御"応用物理. 70. 285-290 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 田畑 仁: "DNA配線-DNA分子素子を目指して-"高分子. 50. 251 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 田畑 仁: "DNAの自己組織化構造と物性"日本結晶成長学会誌. 28. 174-182 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 川合 知二: "ナノテクノロジーのすべて"工業調査会. 287 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2018-03-28  

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