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Geometry generation of minute three-dimensional structure in wide scale range by means of water jet and focused ion beam

Research Project

Project/Area Number 13305012
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionThe University of Tokyo

Principal Investigator

WARISAWA Shin'ichi  The University of Tokyo, Graduate School of Engineering, Associate Professor, 大学院・工学系研究科, 助教授 (20262321)

Co-Investigator(Kenkyū-buntansha) MITSUISHI Mamoru  The University of Tokyo, Graduate School of Engineering, Professor, 大学院・工学系研究科, 教授 (90183110)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
Fiscal Year 2002: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
KeywordsWater Jet Machining / Focused Ion Beam Machining / Complex Machining / Three Dimensional Structure / Wide Sale Range Machining / Edge Rounding for Cylindrical Roller Bearing / Labo-On-Chip / Minute Electrode for Atom Trap / 粗微動機構 / 傾斜制御機構
Research Abstract

This research proposes a rational method of manufacturing minute parts by complex machining methods in consideration of manufacturability in micro scale and functions of parts to be machined. An important issue is to examine the combination of machining methods appropriate to realize required functions of parts to be machined. Machining methods to be used should have mutually different feasible machining size, machining accuracy, or shape accuracy Although there would be multifarious combinations of machining methods, water jet machining technology makes up the core in this research. It is because that water jet machining technology can realize multifarious machining types from cutting to polishing by changing water jet pressure and abrasive particle size. Furthermore, it is made clear in this research that water jet machining technology can realize wide range of machining size and accuracy. The latter issue is due to proposal of a new water jet machining method in which fine abrasive particles less than 1μm can be used that is impossible in conventional way. In the original plan, a combination of water jet machining and focused ion beam machining was focused. However, combinations of other machining methods are also examined after discussions of machining limitations of water jet and focused ion beam. In concrete, cutting by a single crystal diamond, ultra violet laser machining, semiconductor manufacturing process are in consideration to make minute parts. Finally, using methods examined mentioned above, following parts are manufactured (1) edge chamfering of cylindrical roller for bearing (edge radius 1mm), (2) ultra finishing of an artificial femoral head (surface roughness 7nm Ra), (3) micro groove on a glass material (10um depth), and (4) micro electrode for atom trapping.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] 割澤伸一: "ウォータージェットによる軸受用円筒ころエッジ丸め加工法"噴流工学. 19・1. 9-18 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA: "Development of a High-Speed Micro-Machining System for Brittle Materials"Proceedings of The Sixteenth Annual Meeting ASPE. 196-199 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA: "Development of a Micro Cutting and Deforming System for Glass Materials"Proceedings of The Seventeenth Annual Meeting ASPE. 1427-1432 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Pairat Tangpornprasert: "Ductile mode cutting with torsional vibration for glass material"Proceedings of The Seventeenth Annual Meeting ASPE. 515-518 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA: "Edge Rounding Method by Means of Water Jet for Cylindrical Rollers of Bearing"Proceedings of The Seventeenth Annual Meeting ASPE. 519-522 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 割澤伸一: "ウォータージェットによる人工股関節骨頭の超精密仕上げ"砥粒加工学会誌. 48. 90-95 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi Warisawa, et al.: "An Edge Chamfering Method of Cylindrical Rollers of Bearing by Means of Water Jet"Journal of Jet Flow Engineering. Vol.19, No.1. 9-18 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA, et al.: "Development of a High-Speed Micro-Machining System for Brittle Materials"Proceeding of The Sixteenth Annual Meeting ASPE. 196-199 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA, et al.: "Development of a Micro Cutting and Deforming System for Glass Materials"Proceedings of The Seventeenth Annual Meeting ASPE. 1427-1432 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Pairat Tangpornprasert et al.: "Ductile mode cutting with torsional vibration for glass material"Proceedings of The Seventeenth Annual Meeting ASPE. 515-518 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA, et al.: "Edge Rounding Method by Means of Water Jet for Cylindrical Rollers of Bearing"Proceedings of The Seventeenth Annual Meeting ASPE. 519-522 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Shin'ichi WARISAWA, et al.: "Ultra-precision finishing for the femoral head of the artificial hip joint by means of abrasive water jet"Journal of the Japan Society for Abrasive Technology (JSAT). Vol.48,No.2. 90-95 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 割澤伸一: "ウォータージェットによる軸受用円筒ころエッジ丸め加工法"噴流工学. 19・1. 9-18 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] Shin'ichi WARISAWA: "Development of a High-Speed Micro-Machining System for Brittle Materials"Proceedings of The Sixteenth Annual Meeting ASPE. 196-199 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] Shin'ichi WARISAWA: "Development of a Micro Cutting and Deforming System for Glass Materials"Prcceedings of The Seventeenth Annual Meeting ASPE. 1427-1432 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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