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Multi-function-integrated Micro Systems Using Polymer Materials

Research Project

Project/Area Number 13305016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

SHIMOYAMA Isao  The University of Tokyo, Information Science & Technology, Professor, 大学院・情報理工学系研究科, 教授 (60154332)

Co-Investigator(Kenkyū-buntansha) MATSUMOTO Kiyoshi  The University of Tokyo, Information Science & Technology, 大学院・情報理工学系研究科, 助教授 (10282675)
HOSHINO Kazunori  The University of Tokyo, Information Science & Technology, 大学院・情報理工学系研究科, 講師 (30361546)
Project Period (FY) 2001 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥50,700,000 (Direct Cost: ¥39,000,000、Indirect Cost: ¥11,700,000)
Fiscal Year 2004: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Fiscal Year 2003: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2002: ¥15,470,000 (Direct Cost: ¥11,900,000、Indirect Cost: ¥3,570,000)
Fiscal Year 2001: ¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
KeywordsOrganic Transistor / PDMS / Bacteriorhodopsin / Imaging Sensor / Tactile Sensor / MEMS / 薄型柔軟視覚センサ / 量子ドット / 薄型柔軟ディスプレイ / 有機EL / パターニング方法 / 導電性高分子 / 高分子圧電フィルム / 有限要素法
Research Abstract

In this research, we worked on techniques to integrate polymers, organic semiconductors and proteins into micro electro mechanical systems.
We introduced a patterning method for organic LEDs. We patterned the OLED layers by pressing the layer with a micro edges fabricated on a silicon wafer. This enabled us to fabricate 30-micro-meter-wide LED stripe arrays. We also fabricate an OLED on a released silicon microstructure.
We fabricated a vertical organic transistor. It was designed as a current driver for OLEDs. Since it has a vertical structure, it is suitable to be arranged on/under an OLED. We report a biomolecular image sensor using a retinal membrane protein. To fabricate the photoreceptor array, a bR-patterning method with electro-deposition and surface modification was developed. An image sensor, which consists of an 8x8 array of 1-millimeter square bR photoreceptors, was fabricated. It was demonstrated that the image sensor detected a gradual image and black and white images.
We propose a tactile sensor consisting of standing 300 nm-thick piezoresistive cantilevers embedded in PDMS. The sensor detects the shear stress applied on its surface. We applied the force of 0 [N] to 20 [N] in the X,Y,and Z directions to the sensor. The sensor showed a good linearity and high sensitivity in X-axis.

Report

(5 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (24 results)

All 2005 2004 Other

All Journal Article (10 results) Patent(Industrial Property Rights) (2 results) Publications (12 results)

  • [Journal Article] 300nm-Thick Cantilever in PDMS for Tactile Sensing2005

    • Author(s)
      Kentaro Noda, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama
    • Journal Title

      Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems

      Pages: 283-286

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Compound Eye Shaped Flexible Organic Image Sensor with a Tunable Visual Field2005

    • Author(s)
      Hiroshi Saito, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama
    • Journal Title

      Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems

      Pages: 96-99

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Biomolecular Image Sensor of Bacteriorhodopsin Patterned by Electrodeposition2005

    • Author(s)
      Seiichi Takamatsu, Kazunori Hoshino, Kiyoshi Matsumoto, Tsutomu Miyasaka, Isao Shimoyama
    • Journal Title

      Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems

      Pages: 847-850

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 300nm-Thick cantilever standing in PDMS for tactile sensing2005

    • Author(s)
      Kentaro Noda, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama
    • Journal Title

      proceedings of the IEEE International Conference on Micro Electro Mechanical Systems Proseedings

      Pages: 283-286

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Compound Eye Shaped Flexible Organic Image Sensor with a Tunable Visual Field2005

    • Author(s)
      Hiroshi Saito, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama
    • Journal Title

      proceedings of the IEEE International Conference on Micro Electro Mechanical Systems Proseedings

      Pages: 96-99

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Biomolecular Image sensor of Bacteriorhodopsin Patterned by Electrodeposition2005

    • Author(s)
      Seiichi Takamatsu, Kazunori Hoshino, Kiyoshi Matsumoto, Tsutomu Miyasaka, Isao Shimoyama
    • Journal Title

      IEEE International Conference on Micro Electro Mechanical Systems Proseedings

      Pages: 847-850

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 感覚毛型センサを用いた角加速度計測の研究2005

    • Author(s)
      武居淳, 善見誠一, 星野一憲, 松本潔, 下山勲
    • Journal Title

      ロボティクス・メカトロニクス講演会予稿集 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 感光性たんぱく質を用いた光センサの試作とその特性2004

    • Author(s)
      高松誠一, 星野一憲, 松本潔, 宮坂力, 下山勲
    • Journal Title

      第22回日本ロボット学会学術講演会予稿集

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] The Characteristics of a Photo Detector Using Photosensitive Protein2004

    • Author(s)
      Seiichi Takamatsu, Kazunori Hoshino, Kiyoshi Matsumoto, Tsutomu Miyasaka, Isao Shimoyama
    • Journal Title

      Proceedings of the 22nd Annual Conference of the Robotics Society of Japan

      Pages: 3128-3128

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 感光性たんぱく質を用いた光センサの試作とその特性2004

    • Author(s)
      高松誠一, 星野一憲, 松本潔, 宮坂力, 下山勲
    • Journal Title

      第22回日本ロボット学会学術講演会予稿集 講演論文集

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] 匂い提示装置、及び匂い提示方法2004

    • Inventor(s)
      下山, 松本, 星野, 山田, 菱沼
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Number
      2004-174250
    • Filing Date
      2004-06-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 特許出願2004

    • Inventor(s)
      星野 一憲, 山田 智也, 菱沼 徹哉, 松本 潔, 下山 勲
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Number
      2004-174250
    • Filing Date
      2004-06-01
    • Related Report
      2004 Annual Research Report
  • [Publications] Masanao Motoyama, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama: "Electro-Statically Actuated Light Emitting Device Using OLED"The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '03). 1506-1509 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Koichi Yamada, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama: "Electro-static trapping and deposition of nanoparticles in a submicron narrow gap for a lateral-electrode LED"17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '04). 49-52 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 齋藤宏, 岩瀬英治, 星野一憲, 松本潔, 下山勲: "有機半導体を用いた複眼型フレキシブルフォトセンサ"2004年春季応用物理学関係連合講演会予稿集. (発表予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 山田幸一, 星野一憲, 松本潔, 下山勲: "半導体ナノ粒子の静電トラップによるナノサイズ発光ダイオード"2004年春季応用物理学関係連合講演会予稿集. (発表予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 木下英之, 寒川新司, 星野一憲, 松本潔, 下山勲: "自己形状認識複眼型センサを用いた入力デバイス"ロボティクス・メカトロニクス講演会予稿集. (発表予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Kazunori Hoshino, Isao Shimoyama: "Analysis of elastic micro optical components under large deformation"Journal of Micromechanics and Microengineering. Vol.13. 149-154 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Hasegawa, K.Matsumoto, I.Shimoyama: "30mm-pitch stripes of OLED patterned by stamping lift-off method"Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems, Kyoto, Japan. 546-547 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama: "Thin-Film Waveguide with a Lens Effect Terminal for Optical Sensing Devices"Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems, Kyoto, Japan. 315-318 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Hoshino, A.Nakai, I.Shimoyama: "An All-Polymer thin-film Scanning Optical Filter for 3D-Image Displays"Proceedings of IEEE MEMS. 487-490 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] N.Funai, K.Matsumoto, I.Shimoyama: "Fabrication of High-Aspect-Ratio PZT Thick Film Structure using Sol-Gel Technique and SV-8 photo resist"Proceedings of IEEE MEMS. 168-171 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.K.Lee, I.Shimoyama: "A Multi-Channel Micro Valve for Micro Pneumatic Artificial Muscle"Proceedings of IEEE MEMS. 702-705 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 保東孝宏, 下山勲: "高分子圧電フィルムを用いた触覚センサ"日本ロボット学会学術講演会 予稿集. 3F28 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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