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Growth and Fundamental Properties of GeSi Bulk Crystals

Research Project

Project/Area Number 13450001
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTohoku University

Principal Investigator

YONENAGA Ichiro  Tohoku University, Institute for Materials Research, Associate Professor, 金属材料研究所, 助教授 (20134041)

Co-Investigator(Kenkyū-buntansha) SHINDO Tiasuke  Tohoku University, Institute of Multidisciplinary Research, Professor, 多元物質科学研究所, 教授 (20154396)
GOTO Takashi  Tohoku University, Institute for Materials Research, Professor, 金属材料研究所, 教授 (60125549)
ABE Takao  Shin-Etsu Handoutai, Chief Researcher, 半導体研究所, 研究主幹
SAKURAI Masaki  Tohoku University, Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (80235225)
AKASHI Takaya  Tohoku University, Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (20312647)
深田 直樹  東北大学, 金属材料研究所, 助手 (90302207)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥14,900,000 (Direct Cost: ¥14,900,000)
Fiscal Year 2003: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2002: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2001: ¥7,200,000 (Direct Cost: ¥7,200,000)
KeywordsGermanium-Silicon / Solid Solution / Single Crystal Growth / Fundamental Properties / X-ray Absorption Fine Structure / Impurities / Lattice Defects / Thermo-Electrics / XAFS構造解析
Research Abstract

Germanium-silicon (Ge_<1-x>Si_x or Germanium-silicon Si_xGe_<1-x>) alloy is a fully miscible solid solution of the diamond-base and has attracted keen interest as material for both microelectronic and opto-electronic devices in view of the potential for band gap and lattice parameter engineering they offer. This research has been undertaken in order to establish the growth of high quality single crystals of GeSi alloys and to clarify the various fundamental properties that are brought about by alloying and the possibility of exploring the intrinsic properties and potentials of this material for wide applications.
(1)Full single crystals of large size, larger than 25 mm in diameter and longer than 40 mm in length, were obtained for the alloys of composition 0<x<0.15 and 0.73<x<1 by the Czochralski technique. Single crystals of SiGe alloys (0.80<x<1) heavily doped with electrically active impurities with a concentration up to 10^<20>cm^<-3> were also successfully obtained.
(2)By XAFS study … More on the local atomic structure, it is known that GeSi alloy possess random substitutional site occupancy of Si and Ge atoms but no preferential ordering across the whole composition range and that Ge-Ge and Ge-Si bond lengths maintain distinctly different lengths and vary linearly with alloy composition, to he incomplete Pauling case.
(3)Oxygen impurities in the concentration of 10^<18>cm^<-3> maximum occupy preferentially a bond-center site between Si atoms to make a Si-O-Si quasi-molecule.
(4)The mechanical strength of the alloys becomes temperature-insensitive at elevated temperatures and depends on the composition, being proportional to x(1-x) over the whole composition range, which may be originating in the built-in stress fields related to microscopic fluctuation of alloy composition and the dynamic interaction between dislocations.
(5)Electrical and thermal conductivities and Seebeck coefficient in heavily impurity doped GeSi were evaluated for develop thermoelectric converters available at elevated temperatures. Less

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] I.Yonenaga: "Czochralski growth of heavily impurity doped crystals of GeSi alloys"Journal of Crystal Growth. 226(1). 47-51 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, T Akashi, T Goto: "Thermal and electrical properties of Czochralski grown GeSi single crystals"Journal of Physics and Chemistry of Solids. 62(7). 1313-1317 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, M.Nonak, N.Fukata: "Interstitial oxygen in GeSi alloys"Physica B. 308-310. 539-541 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.J.C.King, R.L.Lichti, I.Yonenaga: "Hydrogen behaviour in bulk Si1-xGex alloys as modeled by muonium"Physica B. 340-342. 835-839 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, M.Sakurai, M.H.F.Sluiter, Y.Kawazoe: "Local atomic structure in Czochralski-grown Ge1-xSix bulk alloys"Applied Surface Science. 224. 193-196 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga: "The Encyclopedia of Materials : Science and Technology"Elsevier Science. 5 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga: "Czochralski growth of heavily impurity doped crystals of GeSi alloys"Journal of Crystal Growth. 226(1). 47-51 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, T.Akashi, T.Goto: "Thermal and electrical properties of Czochralski grown GeSi single crystals"Journal of Physics and Chemistry of Solids. 62(7). 1313-1317 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, M.Nonak, N.Fukata: "Interstitial oxygen in GeSi alloys"Physica B. 308-310. 539-541 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.J.C.King, R.L.Lichti, I.Yonenaga: "Hydrogen behavior in bulk Si1-xGex alloys as modeled by muonium"Physica B. 340-342. 835-839 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, M.Sakurai, M.H.F Sluiter, Y.Kawazoe: "Local atomic structure in Czochralski-grown Ge1-xSix bulk alloys"Applied Surface Science. 224(1). 193-196 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga: "Ge_<1-x>Si_x bulk crystals (The Encyclopedia of Materials Science and Technology)"Elsevier. 5 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Yonenaga, M.Sakurai, T.Ayuzawa, M.H.F.Sluiter, Y.Kawazoe: "Local strain relaxation in Czochralski-grown GeSi bulk alloys"Physica B. 340-342. 854-857 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] P.J.C.King, R.L.Lichti, I.Yonenaga: "Hydrogen behavior in bulk Si1-xGex alloys as modeled by muonium"Physica B. 340-342. 835-839 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] I.Yonenaga: "Dislocation-Impurity Interactions in Silicon"Solid State Phenomena. 95/96. 423-432 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] I.Yonenaga: "Plastic deformation and dislocation dynamics in semiconductors"Dislocations, plasticity and metal forming (Proceeding of 10th International Symposium on Plasticity and its Current Application. 310-312 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Taishia, X.Haung, I.Yonenaga, K.Hoshikawa: "Dislocation-free Czochralski Si crystal growth without a thin neck : dislocation behavior due to incomplete seeding"Journal of Crystal Growth. 258. 58-64 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] I.Yonenaga, M.Sakurai: "Local structure around Si atoms in GeSi alloy semiconductors"Photon Factory Activity Report 2002. 20. 160 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] I.Yonenaga: "Growth and fundamental properties of GeSi bulk crystals"IEEE Semiconducting and Insulating materials Conference XII-2002 Proceedings. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] P.J.C.King, R.L.Lichti, I.Yonenaga: "Muonium behaviour in Czochralski grown Si1-xGex alloys"Physica B. 326. 171-174 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Yonenaga, T.Taishi, X.Hunag, K.Hoshikawa: "Dymanic characteristics of dislocations in Ge-doped and (Ge+B) codoped silicon"Journal of Applied Physics. 93・1. 265-269 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Yonenaga: "Impurity effects on dislocation activities in Si"Journal of Physics : Condensed Matter. 14・48. 13179-13183 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Yonenaga, M.Sakurai, M.H.F.Sluiter, Y.Kawazoe: "Lacal atomic structure in Czochralski-grown Ge1-xSix bulk alloys"Applied Surface Science. (in Press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Yonenaga, M.Sakurai: "Local structure around Si atoms in GeSi alloy semiconductors"Photon Factory Activity Report 2001. 19. 176-176 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] I.Yonenaga: "Czochralski growth of heavily impurity doped crystals of GeSi alloys"Journal of Crystal Growth. 226・1. 47-51 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] I.Yonenaga, T.Akashi, T.Goto: "Thermal and electrical properties of Czochralski grown GeSi single crystals"Journal of Physics and Chemistry of Solids. 62・7. 1313-1317 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] I.Yonenaga, M.Sakurai: "Bond lengths in Ge_<1-x>Si_x crystalline alloys grown by the Czochralski method"Physical Review B. 64・11. 3206-1-3206-3 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] I.Yonenaga, M.Nonak, N.Fukata: "Interstitial oxygen in GeSi alloys"Physica B. 308-310. 539-541 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] P.J.C.King, I.Yonenaga: "Low temperature muonium behaviour in Cz-Si and Cz-Si_<0.91>Ge_<0.09>"Physica B. 308-310. 546-549 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Akashi, I.Yonenaga, I.Gunjishima, T.Goto: "High temperature transport property of B-and P-doped GeSi single Crystals prepared by a Czochralski method"Materials Transactions. 42・6. 1024-1027 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] I. Yonenaga: "The Encyclopedia of Materials : Science and Technology"Elsevier Science. 5 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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