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Observation and manipulation of subsurface atomic layers

Research Project

Project/Area Number 13450017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionTohoku University

Principal Investigator

YAMANAKA Kazushi  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (00292227)

Co-Investigator(Kenkyū-buntansha) CHO Hideo  Aoyama Gakuin University, College of Science and Engineering, Assistant Professor, 理工学部, 助手 (60296382)
MIHARA Tsuyoshi  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (20174112)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥16,200,000 (Direct Cost: ¥16,200,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2002: ¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 2001: ¥8,000,000 (Direct Cost: ¥8,000,000)
KeywordsUltrasonic atomic force microscope / Resonance spectra / Carbon fiber reinforced plastic / Dislocations in layered crystal / Long distance displacement / Atomic layer manipulation / Elastic anisotropy / Equivalent effective elasticity / 内部原子 / 原子間力顕微鏡 / グラファイト / 2硫化モリブデン / 転位 / 非線形 / 振動 / 理論解析 / 刃状転位 / 共振周波数 / 真空 / Q値制御 / 余剰原子面 / 高減衰試料
Research Abstract

Observation and manipulation of subsurface atomic layers is a key technology to establish the reliability of materials and devices in the micro electromechanical systems (MEMS) and in the nanotechnology. In this research project, we developed and applied the ultrasonic atomic force microscopy (UAFM) to establish observation and manipulation of subsurface atomic layers. In UAFM, subsurface defects located at the depth of 10 nm or more can be observed with the lateral resolution of 5 nm. A subsurface gap accompanied by an edge dislocation in layered crystals is imaged as a low-contact-stiffness area. We applied UAFM to highly oriented pyrolytic graphite (HOPG) and MoS2 and observed subsurface edge dislocations. We found that the resonance frequency is significantly lower than that of the defect-free-model. Under the load higher than 100 nN where the contact radius is larger than 5 nm, the resonance frequency approached that of the defect-free-model, but it is lower under the lower load. Through observation of the dislocation behavior in HOPG under different loads, we found that the dislocation moved laterally by 40 nm us the load increased by 285 nN, and ii returned to the original position as the load decreased. To explain this result, we proposed a model for the lateral motion of the dislocation. This finding of the large lateral motion confirms the manipulation of subsurface atomic layers. A nonlinear vibration analysis of the contact represented by a stiffening or softening spring was developed that models the opening-closure behavior of the subsurface gap between subsurface atomic layers. These methods were verified by comparing the observed and calculated loud dependence of the resonance frequency and the shape of resonance spectra, both on a defect area and defect-free area.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] T.Tsuji, K.Yamanaka: "Detection of the nano-scale subsurface defects by ultrasonic atomic force microscopy"Nondestructive Characterization of Materials. 213-220 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 辻俊宏, 入浜洋, 丸山祥輝, 中本圭一, 山中一司: "超音波原子間力顕微鏡による共振周波数とQ値分布の映像化"電子情報通信学会技術研究報告. 22. 73-80 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Anomalous Dislocation Behavior in Graphite Using Ultrasonic Atomic Force Microscopy"Jpn.J.Appl.Phys. 41. 832-835 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara, Kazushi Yamanaka: "Nonlinear Vibration of atomic scale discontinuity observed by using ultrasonic atomic force microscopy"Technical Acoustics (China). 21. 287-290 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Dislocation Behavior in Graphite by Using Ultrasonic Atomic Force Microscopy"JSME International Journal A. 45. 561-566 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto: "Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor"Proceeding of SPIE. 4703. 85-92 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamanaka: "Ultrasonic nondestructive evaluation for nanotechnology"Proc KSNT Workshop, Nondestructive evaluation for nanotechnology. 3-12 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara: "Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy"Proceeding of SPIE. 5045. 104-111 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kenji Fukuda, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto, Kazushi Yamanaka: "Sharpning contact resonance spectra in UAFM using Q-control"Surface Science. 532-535. 1145-1151 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tsuji, H.Irihama, T.Mihara, K.Yamanaka: "Imaging and Evaluation of Nano-Scale Crack by Using Ultrasonic Atomic Force Microscopy"Proc.FEOFS, Key Engineering Materials. 261. 1067-1072 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tsuji, K.Yamanaka: "Detection of the nano-scale subsurface detects by ultrasonic atomic force microscopy"Nondestructive Characterization of Materials. 213-220 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Yoshiki Maruyama, Keiichi Nakamoto, Kazushi Yamanaka: "Imaging of resonance frequency and Q factor distribution by ultrasonic atomic force microscopy"Technical Report of IEICE. 22. 73-80 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Anomalous Dislocation Behavior in Graphite Using Ultrasonic Atomic force Microscopy"Jpn.J.Appl.Phys.. 41. 832-835 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara, Kazushi Yamanaka: "Nonlinear Vibration of atomic scale discontinuity observed by using ultrasonic atomic force microscopy"Technical Acoustics (China). 21. 287-290 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Dislocation Behavior in Graphite by Using Ultrasonic Atomic Force Microscopy"JSME International Journal, A. 45. 561-566 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto: "Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor"Proceeding of SPIE. 4703. 85-92 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamanaka: "Ultrasonic nondestructive evaluation for nanotechnology"Proc. KSNT Workshop, Pusan. 3-12 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazushi Yamauaka, Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara: "Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy"Proceeding of SPIE. 5045. 104-111 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kenji Fukuda, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto, Kazushi Yamanaka: "Sharpening contact resonance spectra in UAFM using Q-control"Surface Science. 532-535. 1145-1151 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tsuji, H.Irihama, T.Mihara, K.Yamanaka: "Imaging and Evaluation of Nano-Scale Crack by Using Ultrasonic Atomic Force Microscopy"Proc. FEOFS, Key Engineering Materials. 261. 1067-1072 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Tsuji, H.Irihama, T.Mihara, K.Yamanaka: "Imaging and Evaluation of Nano-Scale Crack by Using Ultrasonic Atomic Force Microscopy"Key Engineering Materials. Volume 261. 1067-1070 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Kenji Fukuda, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto, Kazushi Yamanaka: "Sharpning contact resonance spectra in UAFM using Q-control"Surface Science. 532-535. 1145-1151 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara: "Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy"Proceeding of SPIE. 5045. 104-111 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Anomalous Dislocation Behavior in Graphite Using Ultrasonic Atomic Force Microscopy"Jpn.J.Appl.Phys. 41. 832-835 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara, Kazushi Yamanaka: "Nonlinear Vibration of atomic scale discontinuity observed by using ultrasonic atomic force microscopy"Technical Acoustics (China). 21. 287-290 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Toshihiro Tsuji, Hiroshi Irihama, Kazushi Yamanaka: "Observation of Dislocation Behavior in Graphite by Using Ultrasonic Atomic Force Microscopy"JSME International Journal A. 45. 561-565 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto: "Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor"Proceeding of SPIE. 4703. 85-92 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kazushi Yamanaka: "Ultrasonic nondestructive evaluation for nanotechnology"Proc KSNT Workshop, Nondestructive evaluation for nanotechnology. 3-12 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Yamanaka, Y.Maruyama, T.Tsuji, K.Nakamoto: "Resonance frequency and Q factor mapping by ultrasonic atomic force microscopy"Applied Physics Letters. 78. 1939-1941 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Tsuji, K.Yamanaka: "Detection of the nano-scale subsurface defects by ultrasonic atomic force microscopy"Nondestructive Characterization of Materials. 213-220 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 辻俊宏, 入浜洋, 丸山祥輝, 中本圭一, 山中一司: "超音波原子間力顕微鏡による共振周波数とQ値分布の映像化"電子情報通信学会技術研究報告. 22. 73-80 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Tsuji, K.Yamanaka: "Observation by ultrasonic atomic force microscopy of reversible displacement of subsurface dislocations in highly oriented pyrolytic graphite"Nanotechnology. 12. 301-307 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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