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Development of In-site measurement for surface electron density using X-ray surface propagation wave

Research Project

Project/Area Number 13450035
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionKyoto University

Principal Investigator

HORIUCHI Toshihisa  Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (10238785)

Co-Investigator(Kenkyū-buntansha) ISHIDA Kenji  Graduate School of Engineering, Lecturer, 大学院・工学研究科, 講師 (20303860)
YAMADA Hirofumi  Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (40283626)
KAZUMI Matsushige  Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (80091362)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥6,100,000 (Direct Cost: ¥6,100,000)
Fiscal Year 2002: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2001: ¥3,900,000 (Direct Cost: ¥3,900,000)
Keywordsanomalous dispersion / X-ray surface propagation wave / GYX-ray anomalous scatterig / X-ray total reflection / surface density / total reflection angle / photo-catalytic reaction / Titanum Oxide / X線表面進行波 / 金属酸化 / 水素終端シリコン / X線異常散乱 / 吸収端 / 光触媒
Research Abstract

Total reflection arises when white X-rays irradiate the surface of the materials at small glancing angle. Both measurements of reflectivity and total diffraction can be conducted with specular reflection condition Then, with non-specular one the measurement of surface propagation wave also can be conducted. In this study, by combination of these measurements new evaluation X-ray system was developed and presented following results.
1. It was conformed to be able to get the surface density of Pt stripe and Si substrate by analyzing the surface peaks of surface propagation waves (anomalous scatterings called Yoneda wings).
2. Oxidation processes of H-terminated Si subjected by UV irradiation were investigated using surface propagation waves. The mechanism of its processes were revealed and clarified to be useful tool for observing the most surface density.
3. Oxidation processes of the surface of Cu films prepared by evaporation were investigated during UV irradiation and acid vapor exposure. It was clear that the oxidation processes dose not proceed simply, but there exist mainly three processes, a slight increasing,, an abrupt decreasing, and a gradual decreasing which is called "sealing effect" arresting further oxidation of deeply-lying loose packed copper crystallites.
4. The newly conceptual measurement using X-ray anomalous dispersion effect across the absorption edgies of atoms was presented. The typical measurement of GaAs(111) single crystal was conducted across the absorption edgies of Ga and As atoms by changing of the critical energies of total reflection. It was found that the peak of propagation wave sifted with linear relation to the incident angle corresponding to the the critical energies of total reflection, but at the near energy of the absorption edgies, its peak sift exhibited nonlinear and anomalous relations according to the equation of dispersion, revealing applicable to evaluate Ga and As atomic sites of the single crystal.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] K.Noda et al.: "Molecular Ferroelectricity of Vinylidene Fluoride oligomer Investigated by Atomic Force Microscopy"Japanese Journal of Applied Physics. Vol.40. 4361-4364 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Fukuma et al.: "Molecular-scale non-contact AFM studies of ferroelectric organic thin films epitaxially grown on alkali halides"Surface Science. Vol.516. 103-108 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Noda et al.: "Remanent Polarization of Evaporated Films of Vinylidene Fluoride Oligomers"Journal of Applied Physics. Vol.93 No.5. 2866-2870 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Noda et al.: "Investigation Of Ferroelectric Properties Of Vinylidene Fluoride Oligomer Evaporated Films"Material Research Society Proceedings. Vol.748(in-press). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Horiuchi et al.: "Surface Electrical Measurements on Photo-Catalysis of Rutile TiO_2(110)"Material Research Society Proceedings. Vol.751(in-press). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Kaisei et al.: "Observations of TiO_2 Surface Using Totally Reflected X-ray In-plane Diffraction Under UV Irradiation"Material Research Society Proceedings. Vol.751(in-press). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 野田 啓 ほか: "原子間力顕微鏡を用いたVDFオリゴマー薄膜の局所強誘電特性評価"応用物理学会、有機分子・バイオエレクトロニクス分科会会誌. Vol.12, No.2. 81-86 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 石田 謙司 ほか: "ポリ-、オリゴ-シラン分子膜の凝集構造と光学特性"月刊マテリアルインテグレーション,(株式会社ティー・アイ・シー). Vol.15, No.5. 31-37 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 籠 恵太郎 ほか: "X線反射率測定用屈折透過型X線フィルタの試作と有用性について"X線分析の進歩. Vol.33. 207-219 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 堀内 俊寿 ほか: "表面X線回折と表面電気計測による光触媒機構の考察"会報光触媒. 第8号. 24-27 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 堀内 俊寿: "カラーラウエ法による薄膜の構造解析"X線分析最前線(改訂版),合志 陽一監修・佐藤 公隆編集,アグネ技術センター. 279-301 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K Noda et al.: "Molecular Ferroelectricity of Vinylidene Fluoride oligomer Investigated by Atomic Force Microscopy"Japanese Journal of Applied Physics. Vol.40. 4361-4364 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T Fukuma et al.: "Molecular-scale non-contact AFM studies of ferroelectric organic thin films epitaxially grown on alkali halides"Surface Science,. Vol.516. 103-108 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K Noda et al.: "Remanent Polarization of Evaporated Films of Vinylidene Fluoride Oligomers"Journal of Applied Physics. Vol.93, No.5. 2866-2870 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K Noda et al.: "Investigation Of Ferroelectric Properties Of Vinylidene Fluoride Oligomer Evaporated Films"Material Research Society Proceedings. Vol. 748, (in-press). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T Horiuchi et al.: "Surface Electrical Measurements on Photo-Catalysis of Rutile TiO_2(110)"Material Research Society Proceedings. Vol. 751, (in-press). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K Kaisei et al.: "Observations of TiO_2 Surface Using Totally Reflected X-ray In-plane Diffraction Under UV Irradiation"Material Research Society Proceedings. Vol. 751, (in-press). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toshihisa Horiuchi: "Observation of TiO2 Surface Using Totally Reflected X-ray In-plane Diffraction Under UV Irraidiation"Mater. Res. Soc. Proceedings. Vol.751 (in print). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kiyohiro Kaisei: "Surface Electrical Measurements on Photo-Catalysis of Rutile TiO2(110)"Mater. Res. Soc. Proceedings. Vol.751 (in print). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kei Noda: "Investigation of Ferroelectric Properties of Vinylidene Fluoride Oligomer Evaporated Films"Mater. Res. Soc. Proceedings. Vol.748 (in print). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Kei Noda: "Remanent polarization of evaporated films of vinylidene fluoride oligomers"J. Appl. Phys.. 93,5. 2866-2870 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 堀内 俊寿: "表面X線回折と表面電気計測による光触媒機構の考察"会報光触媒. Vol.8. 24-27 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 籠 恵太郎: "X線反射率測定用屈折透過X線フィルターの試作と有用性について"X線分析の進歩. Vol.33. 207-219 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 堀内俊寿: "X線分析最前線(改訂版)"アグネ技術出版. 360 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Toshihisa Horiuchi: "In-Situ Observation of Oxidation Process at the Most Upper Surfaces By X-ray Surface Propagation Waves"Mat. Res. Soc. Symp. Proc.. Vol.591. 15-18 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.El Hami: "Nanoscopic measurements of the electrostriction responses in P(VDF/TrFE) ultra-thin-film copolymer using atomic force microscopy"Appl. Phys. A. Vol.72. 347-350 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Kei Noda: "Molecular Ferroelectricity of Vinylidene Fluoride Oligomer Investigated by Atomic Force Microscopy"Jpn. J. Appl. Phys.. Vol.40, No.6B. 4361-4364 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 松重 和美: "全反射X線回折法及びSPMを用いた光触媒機能の発現機構の解明"会報光触媒. 01・5. 43-44 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 大地 宏明: "TiO_2の格子歪み/電位変化と光触媒現象との相関に関する研究"会報光触媒. 01・6. 118-119 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 籠 恵太郎: "X線反射率測定用屈折透過型X線フィルターの試行と有用性について"X線分析の進歩. Vol.332. (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 堀内 俊寿: "X線分析最前線"アグネ技術出版. 360 (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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