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Research of sub-nano motion mechanism

Research Project

Project/Area Number 13450054
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTokyo Institute of Technology

Principal Investigator

SHIMOKOHBE Akira  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (40016796)

Co-Investigator(Kenkyū-buntansha) SHINSHI Tadahiko  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 助教授 (60272720)
SATO Kaiji  Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor, 大学院・総合理工学研究科, 助教授 (00215766)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥14,700,000 (Direct Cost: ¥14,700,000)
Fiscal Year 2002: ¥9,000,000 (Direct Cost: ¥9,000,000)
Fiscal Year 2001: ¥5,700,000 (Direct Cost: ¥5,700,000)
Keywordsmotion control / nanometer / precision positioning / light enhanced magnetization / micro-actuator / magnetic bearing / rotational accuracy / genetic algorithm / サブナノモーション / 空気ねじ / MEMS / GaAs-Fe / 磁気軸 / 磁気形状記憶
Research Abstract

The aim of the research is to realize high-speed and multi-degree-of-freedom mechanisms having sub-nano-meter-order resolution and accuracy in the space more than 100mm cubic. Three fundamental researches had been done as follows.
1. Research of sub-nano motion control : PID or GA controllers for a linear positioning mechanism, which is suspended by air bearings and driven by an air lead screw, were examined to realize nanometer positioning. Moreover, the design of nominal characteristics trajectory following controller for a two-mass positioning mechanism was proposed and tested.
2. Research of sub-nano motion actuator : A micro-actuator using light-enhanced magnetization was proposed. The implementation of the proposed actuator principle was verified using a micro-actuator consisting of a silicon cantilever and a GaAsFe/GaAs chip.
3. Resarch of sub-nano motion bearing : Based on a planar rotor with a radial magnetic bearing, we proposed simple methods for removal of the vibration caused by rotor imbalance and disturbance force from the induction motor.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] Akira Shimokohbe et al.: "Precision positioning of a DC-motor-driven aerostatic slide system"Precision Engineering. 27,1. 32-41 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira SHimokohbe et al.: "A combined repetitive control for precision rotation of magnetic bearing"Precision Engineering. 27,3(in press).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe et al.: "On-line controller tuning using genetic algorithms for precision positioning with friction"Proc.of 2002 Japan-USA symposium on flexible automation, Hiroshima, Japan, July 14-19. 855-860 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe et al.: "Practical control for two-mass positioning mechanism"Proc.of CPT2002, Daejeon, Korea. 206-211 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe et al.: "A simple method for rotation about the inertial axis of a rigid AMB rotor"8th International Symposium on Magnetic Bearing, August 26-28,2002,Mito, Japan. 405-410 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe et al.: "Application of light-enhanced magnetization to a micro-actuator"9th Physics and Application of Spine-related Phenomena in Semiconductor (PASPS9),The University of Tokyo,2003.6.11-12. (in press). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe et al.: "Precision radial magnetic bearing using estimation of the center of inertia and repetitive control"Proc.of 2002 euspen. 163-166 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Junhong Mao, Hiroyuki Tachikawa and Akira Shimokohbe: "Precision positioning of a DC-motor-driven aerostatic slide system"Precision Engineering 27. 1. 32-41 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Xiayou Zhang, Tadahiko Shinshi, Lichuan Li and Akira Shimokohbe: "A combined repetitive control for precision rotation of magnetic bearing"Precision Engineering 27. 3. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Junhong Mao, Hiroyuki Tachikawa and Akira Shimokohbe: "On-line controller tuning using genetic algorithms for precision positioning with friction"Proc. Of 2002 Japan-USA symposium on flexible automation, Hiroshima, Japan. 14-19. 855-860 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Shinshi, X. Zhang, L. Li and A. Shimokohbe: "Precision radial magnetic bearing using estimation of the center of inertia and repetitive control"Proc. of 2002 euspen. 163-166 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Kaiji Sato, Wahyudi and Akira Shimokohbe: "Practical control for two-mass positioning mechanism"Proc. of CPT2002. 206-211 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Lichuan Li, Tadahiko Shinshi, Xiaoyou Zhang and Akira Shimokohbe: "A simple method for rotation about the inertial axis of a rigid AMB rotor"8th International Symposium on Magnetic Bearing. 26-28, 2002. 405-410 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Shinshi, X. Zhang and A. Shimokobe: "Suppression and reduction of harmonic disturbance forces for precision magnetic bearings"LEM21. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Shinshi. F. Kato. Akira Shimokohbe, H. Munekata and N. Noguchi: "Application of light-enhanced magnetization to a micro-actuator"9th Physics and Application of Spine-related Phenomena in Semiconductor(PASPS9), The University of Tokyo. 11-12 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Shimokohbe: "Precision positioning of a DC-motor-driven aerostatic slide system"Precision Engineering. 27・1. 32-41 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Sato: "Practical Control for Two-mass Positioning Mechanism"Proc. of the 1^<st> Korean-Japan Conference on Positioning Technology. 206-211 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Shinshi, A.Shimokohbe: "Precision Radial Magnetic Bearing Using Estimation of the Center of Inertia and Repetitive Control"Proc. of 2002 euspen. 163-166 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Shimokohbe, et al.: "Robustness Evaluation of New Practical Control for PTP Positioning Systems"IEEE/ASME International Conference on Advanced Intelligent Mechatronics Proceeding. 843 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 下河辺 明, ほか: "ラジアル磁気軸受の高精度制御"精密工学会誌. 67,11. 1803 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 下河辺 明, ほか: "精密磁気軸受の研究(第4報)-混合繰り返し制御による高精度回転の実現-"2002精密工学会春季講演講演会講演論文集. (予定).

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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