Study of Surface Cleaning by Decomposed Water by Laser
| Project/Area Number |
13450055
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
TOKURA Hitoshi Tokyo Institute of Technology, Graduate School of Science and Engineering, Professor, 大学院・理工学研究科, 教授 (10016628)
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| Co-Investigator(Kenkyū-buntansha) |
HIDAI Hirofumi Tokyo Institute of Technology, Graduate School of Science and Engineering Research Associate, 大学院・理工学研究科, 助手 (60313334)
HIRATA Atsushi Tokyo Institute of Technology, Graduate School of Science and Engineering Associate Professor, 大学院・理工学研究科, 助教授 (50242277)
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| Project Period (FY) |
2001 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥15,800,000 (Direct Cost: ¥15,800,000)
Fiscal Year 2002: ¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 2001: ¥10,300,000 (Direct Cost: ¥10,300,000)
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| Keywords | Laser / Cleaning / Radicals / Copper / Oxidation / Reduce |
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| Research Abstract |
This research focused on decomposed products from ultra pure water, and these products were applied for surface cleaning. Our purposes were, (l) Decomposed products by excimer laser irradiation to water, gas dissolving water and water vapor are measured by spectrometer. (2) Decomposed products were affected to metal and contaminants, and cleaned them
Results were as follows : Water was decomposed by Excimer laser irradiation, and OH, O2+, H2O+, O2 were detected by spectrometer. These products were oxidate potassium permanganate and reduce potassium iodide. And these products could etch zinc in neutral water, and copper in acid water.
These decomposed products were applied to clean the tapping oil in the drilled hole. Pure water filled into the blind hole (diameter : 8mm). ArF excimer laser was irradiated. Irradiation conditions were as follows : laser power 150 mJ, repetition rate 30Hz, and total pulse 18000. As results, tapping oil on the SUS 304 was cleaned around the focus point (5mm around).
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Report
(3 results)
Research Products
(5 results)
