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Development of mechanical micro-fabrication system using pencil-shape electroformed tool

Research Project

Project/Area Number 13450061
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionFukuoka Institute of Technology

Principal Investigator

FUJIYAMA Hirokazu  Fukuoka Institute of Technology, Department of Intelligent Mechanical Engineering, Associate Professor, 工学部, 助教授 (50148912)

Co-Investigator(Kenkyū-buntansha) ONIKURA Hiromochi  Kyushu University, Department of Mechanical Engineering, Professor, 大学院・工学研究科, 教授 (90108655)
SEMBA Takuya  Fukuoka Institute of Technology, Department of Intelligent Mechanical Engineering, Associate Professor, 工学部, 教授 (30154678)
TANAKA Shuji  Fukuoka Institute of Technology, Department of Information Electronics Engineering, Associate Professor, 工学部, 助教授 (30236591)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥10,600,000 (Direct Cost: ¥10,600,000)
Fiscal Year 2003: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2002: ¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 2001: ¥4,000,000 (Direct Cost: ¥4,000,000)
KeywordsMicrogrinding / Nickel / Phosphorous plating / Micro-Truing / Micro-Dressing / Micro dies and molds / Grinding tool / Diamond tool / Electroforming / 高速電鋳 / アモルファスめっき / ダイヤモンド工具 / マイクロ金型 / マイクロ研削工具 / ツルーイング / ドレッシング / cBN砥粒 / 研削加工
Research Abstract

Development of mechanical microfabrication system using microgrinding was made for the purpose to fabricate 3-dimensional micro dies and molds that could not be fabricated by the conventional techniques, such as LIGA technology and Micro Electro mechanical System MEMS. During last 2 years, the following 3 research projects were conducted.
(1)Development of high-speed electroforming technique that can produce electroformed diamond tool with superior bending strength,
(2)Development of micro truing and dressing techniques that can fabricate electroformed diamond tool to pencil-shape microgrinding tool under 0.1 mm diameter,
(3)Fabrication of 2 and 3 dimensional micro-sized dies and molds using pencil-shape microgrinding tool and ultraprecision machining center.
The results obtained could be summarized as follows;
(1)Nickel/phosphorous plating technique that can produce an electroformed diamond tool processing the same bending strength with the conventional, cemented carbide tool could be successfully developed.
(2) Micro truing and dressing techniques that can fabricate the tool end of the microgrinding tool to spherical and wedge shape could be developed using electroformed diamond tool from #3000 to #8000 in diamond mesh size.
(3)It was verified from the grinding test that the microgrinding tool could be adapted to the fabrication of 2 and 3 dimensional micro structures, such as micro-reflectors, micro-reactors and micro-prism arrays.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] 仙波卓弥, 佐伯智之: "高集中度・電鋳工具製造技術の開発とマイクロ研削陽工具への応用"日本機械学会論文集C編. 70-694(印刷中 6月掲載). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 仙波卓弥, 笠 優: "高速・ニッケル/リン合金めっき技術の開発とマイクロ研削用工具への応用"日本機械学会論文集C編. 70-694(印刷中 6月掲載). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 仙波卓弥, 比嘉啓樹, Brian J Stone: "金型表面修飾への超音波縦振動研削の応用"日本機械学会論文集C編. 69-681. 243-248 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 仙波卓弥, 佐伯 智之, 笠 優: "アモルファス電鋳工具製造技術の開発とマイクロ研削用工具への応用"2003年度 砥粒加工学会学術講演会,講演論文集. B37. 137-138 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 仙波卓弥, 森藤智亮, 吉嶺 裕: "マイクロ研削を用いたメカニカルマイクロファブリケーションシステムの開発"2003年度 砥粒加工学会学術講演会,講演論文集. A27. 47-48 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takuya SEMBA, Yutaka KASA: "Development of High-Speed Ni/P Electroforming Technique for Fabricating Microgrinding Tool."Transaction of the Japan Society of Mechanical Engineers. Vol.70-No.694, (in press),C. (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takuya SEMBA, Tomoyuki SAIKI: "Development of Electroforming Technique for fabricating Electroformed Diamond Tool with High Grain Density."Transaction of the Japan Society of Mechanical Engineers. Vol.70-No.694, (in press), C. (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takuya SEMBA, Hiroki HIGA, Brian J Stone: "Surface Texturing Using Grinding with Ultrasonic Longitudinal Vibration."Transaction of the Japan Society of Mechanical Engineers. Vol.69-No.681,C. 243-248 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takuya SEI4BA, Naoki TOMITA, Shinichi FUJII: "Development of High Speed Electroforming."Transaction of the Japan Society of Mechanical Engineers. Vol.69-No.679,C. 217-223 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 仙波卓弥, 比嘉啓樹, Brian J Stone: "金型表面修飾への超音波縦振動研削の応用"日本機械学会論文集C編. 69-681. 243-248 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 仙波卓弥, 冨田直樹, 藤井晋一: "高速・電鋳工具製造技術の開発"日本機械学会論文集C編. 69-679. 217-223 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 仙波卓弥, 佐伯智之, 笠 優: "アモルファス電鋳工具製造技術の開発とマイクロ研削用工具への応用"2003年度砥粒加工学会学術講演会講演論文集. B37. 137-138 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 仙波卓弥, 森藤智亮, 吉嶺 裕: "マイクロ研削を用いたメカニカルマイクロファブリケーションシステムの開発"2003年度砥粒加工学会学術講演会講演論文集. A27. 47-48 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 仙波卓弥, 吉嶺裕: "マイクロ研削用工具に対する高精度・半球状ツルーイングおよびドレッシング技術の開発"2003年度精密加工学会春季大会学術講演会. I25(CDROM).

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Fujiyama, T.Sumomogi, K.Uchijo: "Influence of O_2 gas partial pressure and substrate temperature on wear resistance of Al_2O_3 films deposited by radio-frequency magnetron sputtering"JSME/ASME International Conference on Materials and Processing 2002. 2. 464-467 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Fujiyama, T.Sumomogi, T.Endo: "Effect of O_2 gas partia pressure on mechanical properties of SiO_2 films deposited by radion frequency magnetron sputtering"J.Vac.Sci.Technol.A. 20・2. 356-361 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仙波卓弥, 冨田直樹, 藤井晋一: "高速・電鋳工具製造技術の開発"日本機械学会論文集C編. 69・679. 217-223 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仙波卓弥, 吉嶺裕: "マイクロ研削用工具に対する高精度・半球状ツルーイングおよびドレッシング技術の開発"2003年度精密工学会春季大会学術講演会. 125(CD-ROM). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仙波卓弥, 森藤智亮: "マイクロ研削を用いたメカニカルマイクロファブリケーションシステムの開発"2003年度精密工学会春季大会学術講演会. 123(CD-ROM). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仙波卓弥, 冨田直樹, 藤井晋一: "高速・電鋳技術の開発とマイクロ研削用工具への応用"2002年度砥粒加工学会学術講演会講演論文集. B19. 141-142 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Onikura, B.K.Shil, O.Ohnishi, T.Semba, K.Yoshitomi: "Fabrication of Micro Cylindrical Diamond Grinding Tools by Ultrasonic Vibration Grinding for Drilling of Brittle Materials"Proc.of the 2^<nd> EUSPEN International Conference, Italy. 672-675 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 藤山博一, 内城憲治, 李木経孝: "高周波マグネトロンスパッタ法によるAl_2O_3の膜の機械的特性に及ぼす酸素分圧の影響"福岡工業大学エレクトロニクス研究所所報. 18・1. 63-71 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Fujiyama, T.Sumomogi, T.Endo: "Effect OF O_2 Gas Partial Pressure on Mechanical Properties of SiO_2 Films Deposited by RF Magnetron Sputtering"J.Vac.Sci.Technol.. A20・2 (in printing). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 石田暢之, 原隆之, 本田強志, 藤井晋一, 藤山博一: "極微粒cBN砥粒に対する表面改質とマイクロ研削用工具への応用"九州学生会第33回学生員卒業研究発表講演会講演概要集. (in printing). (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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