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Study on evaluation method of uncertainty in coordinate metrology

Research Project

Project/Area Number 13450099
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

TAKAMASU Kiyoshi  The University of Tokyo, School of Engineering, Professor, 大学院・工学系研究科, 教授 (70154896)

Co-Investigator(Kenkyū-buntansha) FURUTANI Ryoshu  Tokyo Denki University, Faculty of Engineering, Professor, 工学部, 教授 (50219119)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥11,000,000 (Direct Cost: ¥11,000,000)
Fiscal Year 2003: ¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2002: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2001: ¥3,900,000 (Direct Cost: ¥3,900,000)
Keywordsuncertainty of measurement / coordinate measuring machine / virtual CMM / evaluation of accuracy / 三次元座標測定機 / 形状測定
Research Abstract

The total theoretical methods for evaluation of uncertainty in coordinate metrology were established. Specially, the uncertainty from the strategy of measurement and the form deviation of a measured workpiece was evaluated using simulations and statistical experiments.
(1)Uncertainty from the form deviation
The specified autocorrelation functions were obtained to circle features. We made several simulations to measure the circle features using the specified measuring strategies. From the results of the simulations, the uncertainties can be calculated in the strategies of measurements such as number of measuring points and positions.
(2)Theoretical examinations on influences of form deviation
The uncertainties can theoretically calculated using variance and covariance of the error matrix on the least squares method. These uncertainties were compared with the results of simulations.
(3)Measuring experiments using Coordinate Measuring Machine
Several circle features were measured using CMM. The results of measurements were compared with the results of simulations. It is
From these experiments and simulations, we confirmed our proposed methods can be applicable to coordinate metrology.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] 佐藤理, Gheorghe Olea, 平木雅彦, 高増潔: "パラレルメカニズムを用いた三次元測定機の校正-複数のリンクセットを用いた校正-"精密工学会誌. 70・2. 214-218 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Misumi, S.Gonda, T.Kurosawa, Y.Tanimura, N.Ochiai, J.Kitta, F.Kubota, M.Yamada, Y.Fujiwara, Y.Nakayama, K.Takamasu: "Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope"Meas.Sci.Technol.. 14・12. 2065-2074 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 高増潔, 野坂健一郎, 阿部誠, 古谷涼秋, 大園成夫: "形体計測における不確かさの見積り(第2報)-円形体の計測における形状偏差の寄与-"精密工学会誌. 69・5. 693-697 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 下嶋賢, 古谷涼秋, 大園成夫, 高増潔, 平木雅彦, 荒木健司: "3次元測定機の不確かさ推定に関する研究(第1報)-多関節型3次元測定機の機構パラメータの算出と不確かさ推定-"精密工学会誌. 69・6. 841-845 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 郭志徹, 高増潔, 山本明弘, 和田智之, 洲之内啓, 加瀬究, 田代英夫: "波長走査干渉計における信号処理"精密工学会誌. 69・6. 831-835 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 高増潔, 下嶋賢, 古谷涼秋, 佐藤理: "座標測定機のアーティファクト校正(第1報)-運動学パラメータの校正-"精密工学会誌. 69・6. 851-855 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] O.Sato, G.Olea, M.Hiraki, K.Takamasu: "Calibration of Parallel Coordinate Measuring Machine -Kinematic Calibration with Multi-Links"Journal Japan Society for Precision Engineering. 70-2. 214-218 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Misumi, S.Gonda, T.Kurosawa, Y.Tanimura, N.Ochiai, J.Kitta, F.Kubota, M.Yamada, Y.Fujiwara, Y.Nakayama, K.Takamasu: "Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope"Meas.Sci.Technol.. 14-12. 2065-2074 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Takamasu, K.Nosaka, M.Abbe, R.Furutani, S.Ozono: "Estimation of Uncertainty in Feature Based Metrology (2nd Report) -Uncertainty from Form Deviations in Circle Measurement -"Journal Japan Society for Precision Engineering. 69-5. 693-697 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Shimojima, R.Furutani, S.Ozono, K.Takamasu, M.Hiraki, K.Araki: "The Estimation Method of Uncertainty of Coordinate Measuring Machine (1st Report) -The Estimation of Kinematical Parameter and Uncertainty of Articulated Three-Dimensional Coordinate Measuring Machine -"Journal Japan Society for Precision Engineering. 69-6. 841-845 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.C.Kuo, K.Takamasu, A.Yamamoto, T.Wada, K.Sunouchi, K.Kase, H.Tashiro: "Signal Processing for Wavelength Scanning Interferometer"Journal Japan Society for Precision Engineering. 69-6. 831-835 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Takamasu, K.Shimojima, R.Furutani, O.Sato: "Artifact Calibration of Coordinate Measuring Machine (1st Report) -Kinematic Calibration -"Journal Japan Society for Precision Engineering. 69-6. 851-855 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 佐藤理, 下嶋賢, 古谷涼秋, 高増潔: "パラレルメカニズムのアーティファクト校正(第1報)-緩い束縛条件を用いた運動学パラメータの校正-"精密工学会誌. 70・1. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高増潔, 下嶋賢, 古谷涼秋, 佐藤理: "座標測定機のアーティファクト校正(第2報)-冗長座標測定機の自己校正-"精密工学会誌. 70・5. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 佐藤理, Gheorghe Olea, 平木雅彦, 高増潔: "パラレルメカニズムを用いた三次元測定機の校正-複数のリンクセットを用いた校正-"精密工学会誌. 70・2. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] I.Misumi, S.Gonda, T.Kurosawa, Y.Tanimura, N.Ochiai, J.Kitta, F.Kubota, M.Yamada, Y.Fujiwara, Y.Nakayama, K.Takamasu: "Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope"Meas.Sci.Technol.. 14・12. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Abbe, K.Takamasu, S.Ozono: "Reliability on calibration of CMM"easurement. 33・4. 359-368 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 江並和宏, 臼杵深, 平木雅彦, 高橋哲, 高増潔, 大園成夫: "リングビームを用いた三次元変位測定法(第1報)-理論解析と基礎実験-"精密工学会誌. 69・12. 1764-1768 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高増潔, 野坂健一郎, 阿部誠, 古谷涼秋, 大園成夫: "形体計測における不確かさの見積もり(第2報)-円形体の計測における形状偏差の寄与-"精密工学会誌. 69・5. 693-697 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 下嶋賢, 古谷涼秋, 大園成夫, 高増潔, 平木雅彦, 荒木健司: "3次元測定機の不確かさ推定に関する研究(第1報)-多関節型3次元測定機の機構パラメータの算出と不確かさ推定-"精密工学会誌. 69・6. 841-845 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 郭志徹, 高増潔, 山本明弘, 和田智之, 洲之内啓, 加瀬究, 田代英夫: "波長走査干渉計における信号処理"精密工学会誌. 69・6. 831-835 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高増潔, 下嶋賢, 古谷涼秋, 佐藤理: "座標測定機のアーティファクト校正(第1報)-運動学パラメータの校正-"精密工学会誌. 69・6. 851-855 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Shimojima, R.Furutani, K.Takamasu, S.Ozono: "The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine"IEEE ICIT' 02. 411-415 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Abbe, K.Takamasu: "Modelling of Spatial Constraint in CMM Error for Uncertainty Estimation"Proc. Euspen 2002. 2. 637-640 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高増潔, 阿部誠, 古谷涼秋, 大園成夫: "形体計測における不確かさの見積り(第2報)-円形体の計測における形状偏差の寄与-"精密工学会誌. 68・4. 191-195 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 阿部誠, 高増潔, 大園成夫: "座標比較によるCMM校正システムの開発(第2報)-校正の信頼性の統計的な評価-"精密工学会誌. 67・6. 976-981 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takamasu, M.Fujiwara, A.Yamaguchi, M.Hiraki, S.Ozono: "Evaluation of Thermal Drift of Nano-CMM"Proceedings of Euspen2001. 2. 306-309 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 阿部誠, 高増潔, 大園成夫: "座標比較によるCMM校正システムの開発(第1報)-試作システムの構成とその基本的な評価-"精密工学会誌. 67・4. 638-643 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高増潔, 阿部誠, 古谷涼秋, 大園成夫: "形体計測における不確かさの見積り(第1報)-校正作業で生じる系統誤差の寄与-"精密工学会誌. 67・1. 91-95 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Fujiwara, A.Yamaguchi, K.Takamasu, S.Ozono: "Evaluation of Stages of Nano-CMM"Proceedings of ICPE2001. 634-638 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] O.Sto, M.Hiraki, K.Takamasu, S.Ozono: "Calibration of 2-DOF Parallel Mechanism"Proceedings of ICPE2001. 734-738 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 高増潔: "三次元測定機の不確かさ推定方法とその国際規格化"機械と工具. 45・3. 66-70 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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