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Sensory-Hair-Based Flow Sensor

Research Project

Project/Area Number 13450101
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionKyushu Institute Of Technology

Principal Investigator

YASUDA Takashi  Kyushu Institute Of Technology, Graduate School of Life Science and Systems Engineering, Associate Professor, 大学院・生命体工学研究科, 助教授 (80270883)

Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥16,500,000 (Direct Cost: ¥16,500,000)
Fiscal Year 2003: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2002: ¥5,600,000 (Direct Cost: ¥5,600,000)
Fiscal Year 2001: ¥7,700,000 (Direct Cost: ¥7,700,000)
KeywordsMicrosensor / Flow sensor / Angular acceleration sensor / Sensory hair / Strain gauge / Semicircular canal / マイクロ流路 / マイクロ流体デバイス / 流体センサ / マイクロマシン / 半導体歪ゲージ / 静電容量
Research Abstract

A flow sensor with a sensory hair structure consisting of a cantilever and a strain gauge was fabricated. The cantilever measured 1.5 mm in length, 600 μm in width, and 80 μm in thickness, and was made of SU-8 which is often used for fabrication of microstructures having high aspect ratios. The strain gauge was made of Au/Cr thin film at the bottom of the cantilever, and showed a linear relationship between the rate of change of its resistance and deflection of the cantilever. Although the fabricated sensor had a small gauge factor, it was as sensitive as that of a silicon strain gauge because the cantilever material, SU-8, had smaller Young's modulus by two digits compared to that of silicon, and therefore the cantilever was much easier to deflect. When air and other fluids approached the cantilever, it was bent and the flow rate was measured by deflection of the cantilever.
Moreover, a sensor for detecting angular acceleration based on a semicircular canal structure model was developed using the technique described above. The flow sensor was attached to the sidewall of a circular channel of 2 mm in width and 5 mm in radius. When an angular acceleration was applied to the channel, motion of the liquid filled inside the channel caused deflection of the cantilever and change in resistance of the strain gauge. The angular acceleration of 16.7 rad/sec^2 generated resistance change which was then converted to an output voltage of nearly 20 mV when amplified by 300. The sensor is less sensitive in terms of responsiveness because it relies on liquid motion. However, it retains a big advantage of permitting much smaller cross-talk with angular accelerations around other axes.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] Isao Shimoyama: "MEMS Meets Insects"Digest of Technical Papers of the 11th International Conference on Solid-State Sensors and Actuators. Vol. 1. 6-9 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 尾崎至弘: "低速領域における感覚毛型気流センサの特性"第19回日本ロボット学会学術講演会予稿集. 1219-1220 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 李相文: "昆虫の感覚毛を規範とした気流センサ"日本機械学会 ロボティクス・メカトロニクス講演会 講演論文集. 2A1-F11(1)-(2) (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 木村冬樹: "半規管を規範とした感覚毛型角加速度センサ"平成15年電気学会全国大会講演論文集. Vol. 3. 145 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takashi Yasuda: "Fabrication of a Microfluidic Device for Axonal Growth Control"Technical digest of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol. 2. 1259-1262 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Isao Shimoyama, Kazunori Hoshino, Yoshihiko Ozaki, Satoshi Tamaki, Shoji Takeuchi, Takashi Yasuda: "MEMS Meets Insects"Digest of Technical Papers of the 11th International Conference on Solid-State Sensors and Actuators. Vol.1. 6-9 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoshihiko Ozaki, Takashi Yasuda, Kiyoshi Matsumoto, Isao Shimoyama: "Sensory Hair Sensor's Characteristics in Low Air Velocity"Proceedings of the 19th Annual Conference of the Robotics Society of Japan. 1219-1220 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Sang-Mun Lee, Takashi Yasuda: "Airflow Sensors Based on Insect Sensory Hair"Proceedings of 2002 JSME Conference on Robotics and Mechatronics. 2A1-F11(1)-2A1-F11(2) (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Fuyuki Kimura, Takashi Yasuda: "Sensory Hair Kind of Angular Acceleration Sensor Based on a Semicircular Canal"2003 National Convention Record I.E.E. Japan. Vol.3. 145 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takashi Yasuda, Tomoyuki Higashi, Yuta Nakashima: "Fabrication of a Microfluidic Device for Axonal Growth Control"Technical digest of the 12th International Conference on Solid-State Sensors (Actuators and Microsystem). Vol.2. 1259-1262 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 皆田晋介: "マイクロ流体デバイスを用いた神経伝達物質測定用酵素センサの開発"日本機械学会ロボティクス・メカトロニクス講演会 講演論文集. 2P1-3F-G1(1)-2P1-3F-G1(2) (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takashi Yasuda: "Fabrication of a Microfluidic Device for Axonal Growth Control"Technical digest of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems. 1259-1262 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 皆田晋介: "マイクロチャネルを用いた神経伝達物質計測"日本機械学会 第16回バイオエンジニアリング講演会 講演論文集. 127-128 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 中島雄太: "マイクロ流体デバイスによる神経成長因子放出制御"日本機械学会 第16回バイオエンジニアリング講演会 講演論文集. 125-126 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 李相文: "昆虫の感覚毛を規範とした気流センサ"日本機械学会ロボティクス・メカトロニクス講演会講演論文集. 2A1-F11(1)-2A1-F11(2) (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 木村冬樹: "半規管を規範とした感覚毛型加速度センサ"平成15年電気学会全国大会講演論文集. Vol.3. 145 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Isao Shimoyama: "MEMS Meets Insects"Digest of Technical Papers of the 11th International Conference on Solid-State Sensors and Actuators. Vol.1. 6-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 二井信行: "柔軟素材に埋め込み可能なマイクロプレーナコイル触覚センサ"電気学会論文誌. Vol.121-E, No.9. 513-518 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 尾崎至弘: "低速領域における感覚毛型気流センサの特性"第19回日本ロボット学会学術講演会予稿集. 1219-1220 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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