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Study on Epitaxial Growth of ZnO Thin Films on Si Substrates and Formation of Light Emitting Devices with Near Ultra Violet Laser Emission

Research Project

Project/Area Number 13450125
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionResearch Institute of Electronics, Shizuoka University

Principal Investigator

NAKANISHI Yoichiro  Shizuoka University, Research Institute of Electronics, Professor, 電子工学研究所, 教授 (00022137)

Co-Investigator(Kenkyū-buntansha) AOKI Toru  Shizuoka University, Research Institute of Electronics, Associate Professor, 電子工学研究所, 助教授 (10283350)
KOMINAMI Hiroko  Shizuoka University, Research Institute of Electronics, Research Associate, 電子工学研究所, 助手 (60313938)
Project Period (FY) 2001 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥14,600,000 (Direct Cost: ¥14,600,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2003: ¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2002: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 2001: ¥5,900,000 (Direct Cost: ¥5,900,000)
KeywordsZnO / Zn_<1-x>Mg_xO / Si / epitaxial growth / exciton / near ultra violet ray / LED / PL / Zn_<1-x>Mg_XS / ZnS
Research Abstract

This study has been carried out aiming to form light emitting devices with nrsr ultra violet laser emission using ZnO epitaxial thin films grown on Si substrates by new method developed in this study. New results obtained in this study are described below.
*Formation of ZnO epitaxial thin films on Si(111) substrates
The epitaxial ZnO thin film which, shows dominantly the exciton emission could be formed successfully for the first time by oxidation of an epitaxial ZnS film on the Si(111) substrate in oxygen atmosphere, although the formation of the epitaxigl thin films of oxides on Si substrates has been very difficult so far.
*Band gap control of by formation of Zn_<1-x>Mg_xO solid-solution epitaxial thin films on Si(111) substrates
Zn_<1-x>Mg_xO solid-soution thin films could be formed successfully on Si substrates by the oxidation of Zn_<1-x>Mg_xS epitaxial films deposited by electron beam evaporation using pellets mixed with ZnS and MgS as an evaporation source. It was confirmed that peak energy of the exciton emission was shifted from 3.34 eV of ZnO to 3.45 eV of Zn_<0.85>Mg_<0.1>5O.
*Conduction control of Zn_<1-x>Mg_xO epitaxial thin films on Si(111) Substrates
In this study, laser doping method which does not need high temperature annealing was tried. The formation of n-type ZnO and Zn_<1-x>Mg_xO thin films could be done using Al or Ga as dopant by the irradiation of KrF excimer laser. The p-type formation using Sb could be confirmed, but high conductivity was not obtained. It was shown in this study that the formation of ZnO light emission device with near ultra-violet emission can be expected.

Report

(5 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (112 results)

All 2005 2004 2003 2002 2001 Other

All Journal Article (83 results) Publications (29 results)

  • [Journal Article] HRTEM observation of interface states between ZnO epitaxial film and Si(111) substrate2005

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Applied Surface Science 244

      Pages: 359-364

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Conduction control of ZnO thin film by oxidization of sulfide on Si substrates2005

    • Author(s)
      K.Ohara
    • Journal Title

      Applied Surface Science 244

      Pages: 461-464

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] HRTEM observation of interface states between ZnO epitaxial film and Si(111) substrate2005

    • Author(s)
      Yoichiro Nakanishi
    • Journal Title

      Applied Surface Science 印刷中

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Conduction control of ZnO thin film by oxidization of sulfide on Si substrates2005

    • Author(s)
      Kenji Ohara
    • Journal Title

      Applied Surface Science 印刷中

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 液相反応によるZn_<1-x>Mg_xO蛍光体の合成と発光特牲2004

    • Author(s)
      武林慶一郎
    • Journal Title

      電気化学会第71回大会,3B05

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上硫化物薄膜の酸化によるZn_<1-x>Mg_xO薄膜の作製2004

    • Author(s)
      大原賢治
    • Journal Title

      第51回応用物理学関係連合講演会,30p-P19-25

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Synthesis of Zn-doped Y_2O_3:Eu fine-particle phosphor by the sol-gel method2004

    • Author(s)
      Hiroko Kominami
    • Journal Title

      Journal of Vacuum Science and Technology, B 22

      Pages: 1386-1389

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 液相反応によるZn_<1-x>Mg_xO蛍光体の合成と発光特性2004

    • Author(s)
      武林慶一郎
    • Journal Title

      電気化学会第71回大会,3B05

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] MgO-TiO_2系蛍光体の合成と発光特性の評価2004

    • Author(s)
      小南裕子
    • Journal Title

      電気化学会第71回大会,3B06

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Luminescent Properties of Zn_<1-x>Mg_xO Thin Films Formed by Oxidation of Sulfide Thin Films on Si Substrates2004

    • Author(s)
      Y.Nakanishi
    • Journal Title

      6^<th> International Conference on Excitonic Processes in Condenced Matter (Excon '04)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of Rare Earth-Doped Zn-Y-O powders Synthesized by Citric Acid Gel Method2004

    • Author(s)
      K.Takebayashi
    • Journal Title

      Proc.of 11^<th> Int.Display Workshops

      Pages: 1143-1146

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structural Properties and Coondition Control of ZnMgO Thin Film by Oxidization of Sulfide on Si Substrates2004

    • Author(s)
      K.Ohara
    • Journal Title

      Proc.of 11th Int.Display Workshops

      Pages: 1147-1150

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathodoluminescence properties of blue-emitting SrGa_2S_4 : Ce thin-films grown by low-temperature process2004

    • Author(s)
      K.Tanaka
    • Journal Title

      J.Appl.Phys. 92

      Pages: 834-837

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Blue emission from CaS : Cu, F thin-film electroluminescsent device fabricated on Si substrate2004

    • Author(s)
      S.Hakamata
    • Journal Title

      Appl.Phys.Lett. 85

      Pages: 3729-3730

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effects of H_2S Treatment on Structual and Luminescent Characteristics of Blue-Emitting (Sr_<1-x>Ca_x)S : Cu, F Thin Films2004

    • Author(s)
      M.Ehara
    • Journal Title

      Jpn.J.App.Phys. 43

      Pages: 7120-7124

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Luminescent properties of SrGa_2S_4 : Sm thin-film phosphors under low-voltage excitation2004

    • Author(s)
      M.Iwamaru
    • Journal Title

      J.Vac.Sci.Technol. B22

      Pages: 1382-1385

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Synthesis of Zn-doped Y_2O_3 : Eu fine-particle phosphor by the sol-gel method2004

    • Author(s)
      H.Kominami
    • Journal Title

      J.Vac.Sci.Technol. B22

      Pages: 1386-1389

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Strong luminescence from dilocation-free GaN nanopillars2004

    • Author(s)
      Y.Inoue
    • Journal Title

      Appl.Phys.Lett. 85

      Pages: 2340-2342

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Synthesis of Zn-doped Y_2O_3:Eu fine-particle phosphor by the sol-gel method2004

    • Author(s)
      Hiroko Kominami
    • Journal Title

      Journal of Vacuum Science and Technology, B 22・3

      Pages: 1386-1389

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 液相反応によるZn_<1-x>Mg_xO蛍光体の合成と発光特性2004

    • Author(s)
      武林慶一郎
    • Journal Title

      電気化学会第71回大会 3B05

    • Related Report
      2004 Annual Research Report
  • [Journal Article] MgO-TiO_2系蛍光体の合成と発光特性の評価2004

    • Author(s)
      小南裕子
    • Journal Title

      電気化学会第71回大会 3B06

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Luminescent Properties of Zn_<1-x>Mg_xO Thin Films Formed by Oxidation of Sulfide Thin Films on Si Substrates2004

    • Author(s)
      Yoichiro Nakanishi
    • Journal Title

      6^<th> International Conference on Excitonic Processes in Condenced Matter (Excon '04)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Evaluation of Rare Earth-Doped Zn-Y-O powders Synthesized by Citric Acid Gel Method2004

    • Author(s)
      Keiichiro Takebayashi
    • Journal Title

      The 11th International Display Workshops, PHp-8

      Pages: 1143-1146

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Structural Properties and Coondition Control of ZnMgO Thin Film by Oxidization of Sulfide on Si Substrates2004

    • Author(s)
      Kenji Ohara
    • Journal Title

      Proceedings of the 11^<th> International Display Workshops

      Pages: 1147-1150

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Si基板上ZnSエピタキシャル薄膜のZnOへの酸化過程2003

    • Author(s)
      三宅亜紀
    • Journal Title

      電子情報通信学会電子ディスプレイ研究会技術研究報告 EID2002-100

      Pages: 57-60

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Synthesis of Zn-doped Y_2O_3:Eu Fine Particle Phosphors by Sol-Gel method2003

    • Author(s)
      Hiroko Kominami
    • Journal Title

      The 16^<th> Int.Vacuum Microelectronics Conference

      Pages: 2-46

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnO薄膜のレーザアニールによる結晶性及び伝導性の制御2003

    • Author(s)
      大原賢治
    • Journal Title

      第23回表面科学講演大会,3A33

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Study on the Structural Transformation Process from ZnS Epitaxial Film Growth on Si Substrate to ZnO Epitaxial Film by Oxidation2002

    • Author(s)
      A.Miyake
    • Journal Title

      Phys.Stat.Sol.(b) 229

      Pages: 829-833

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] p-type ZnO Layer Formation by Excimer Laser Doping2002

    • Author(s)
      T.Aoki
    • Journal Title

      Phys.Stat.Sol.(b) 229

      Pages: 911-914

    • NAID

      110003310775

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnS薄膜の酸化によるエピタキシャルZnO薄膜の形成と励起子発光2002

    • Author(s)
      三宅亜紀
    • Journal Title

      表面科学 23

      Pages: 492-496

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Growth of epitaxial ZnO thin film by oxidation of epitaxial ZnS Thin film on Si(111)2002

    • Author(s)
      A.Miyake
    • Journal Title

      Int.J.Modem Phys.B 15

      Pages: 3861-3864

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] リモートプラズマMOCVD法によるZnO薄膜の成長2002

    • Author(s)
      中村 篤志
    • Journal Title

      第63回応用物理学会学術講演会,24a-YE-12

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of hydrogen plasma radicals in remote plasma assisted MOCVD ZnO growth from diethylzinc and oxygen2002

    • Author(s)
      Y.Shimuzu
    • Journal Title

      2^<nd> Int.Workshop on Zinc Oxide (MRS Workshop)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] The effect of hydrogen plasma radicals in ZnO growth from diethylzinc2002

    • Author(s)
      Y.Shimizu
    • Journal Title

      Proc.of Joint Int.Conf.Advanced Sci.and Technol.by Shizuoka Univ.and Zhejiang Univ.(JICAST 2002)

      Pages: 409-412

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] エキシマーレーザードーピングによるZnO pn接合形成2002

    • Author(s)
      清水克美
    • Journal Title

      電子情報通信学会電子ディスプレイ研究会技術研究報告 EID2002-18

      Pages: 103-108

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnS薄膜の酸化によるZnOエピタキシャル薄膜の形成と発光特性2002

    • Author(s)
      三宅亜紀
    • Journal Title

      東北大学金属材料研究所ワークショップ

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] ZnSの酸化によるSi基板上ZnOエピタキシャル薄膜の界面酸化層2002

    • Author(s)
      三宅亜紀
    • Journal Title

      第49回応用物理学関係連合講演会,28p-ZN-3

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnS薄膜の酸化によるn-ZnOエピタキシャル薄膜の形成2002

    • Author(s)
      近藤祐一
    • Journal Title

      2002年映像情報メディア学会年次大会,3-8

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnOエピタキシャル薄膜の酸化物界面層と発光及び膜質2002

    • Author(s)
      三宅亜紀
    • Journal Title

      第63回応用物理学会学術講演大会,25A-YE-8

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnOエピタキシャル薄膜の形成と励起子発光特性2002

    • Author(s)
      三宅亜紀
    • Journal Title

      静岡大学大学院電子科学研究科研究報告 23

      Pages: 71-74

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Luminescent properties of blue-emtting SrS : Cu, F thin-film EL devices2002

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Phys.Stat.Sol.(b) 229

      Pages: 1011-1014

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Study on the structural transformation process from ZnS epitaxial film grown on Si substrate to ZnO epitaxial film by oxidation2002

    • Author(s)
      A.Miyake
    • Journal Title

      Phys.Stat.Sol.(b) 229

      Pages: 829-833

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Influence of preparation conditions on the structural and luminescent properties of blue-emitting SrGa_2S_4 thin-film phosphors2002

    • Author(s)
      Y.Nakanishi
    • Journal Title

      J.Electrochem.Soc. 149

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Growth of epitaxial thin film by oxidation of epitaxial ZnS thin film on Si(111)2002

    • Author(s)
      A.Miyake
    • Journal Title

      Int.J.Modern Phys.B 15

      Pages: 3861-3864

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of n-type ZnO Thin Film Doped with Al or Ga on Si(111) substrate2001

    • Author(s)
      Y.Kondoh
    • Journal Title

      Proc.Of 21^<st> Int.Display Res.Conf.and 8^<th> Int.Display Workshops

      Pages: 1147-1150

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnO薄膜特性のZnS薄膜成長温度及び熱処理条件依存性2001

    • Author(s)
      三宅亜紀
    • Journal Title

      第48回応用物理学関係連合講演会,30aK10

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] エキシマーレーザードーピングによるp型ZnO層の形成2001

    • Author(s)
      清水克美
    • Journal Title

      第48回応用物理学関係連合講演会,30aK14

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] エキシマーレーザードーピング法によるp型ZnO層の形成2001

    • Author(s)
      清水克美
    • Journal Title

      電子情報通信学会電子デバイス研究会技術研究報告 ED2001・17

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上エピタキシャルZnO薄膜の成長と励起子発光特性2001

    • Author(s)
      三宅亜紀
    • Journal Title

      電子情報通信学会電子ディスプレイ研究会技術研究報告 EID2001・12

      Pages: 31-36

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] UV Emission from Epitaxial ZnO Thin Film on Si(111) Substrate2001

    • Author(s)
      A.Miyake
    • Journal Title

      13^<th> Int.Conf.on Crystal Growth/11^<th> Int. Conf.on Vapor Growth and Epitaxy, 04P-S12-045

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si(111)基板上に成長したn-ZnO薄膜の発光及び電気特性2001

    • Author(s)
      近藤祐一
    • Journal Title

      第62回応用物理学会学術講演会,11aP1-13

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnS薄膜の酸化によるエピタキシャルZnO薄膜の形成と励起子発光2001

    • Author(s)
      三宅亜紀
    • Journal Title

      第12回表面科学講演大会,IC13

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Si基板上ZnSエピタキシャル薄膜の酸化によるZnOエピタキシャル薄膜の形成と励起子発光特性2001

    • Author(s)
      中西洋一郎
    • Journal Title

      日本表面科学会・中部支部研究会

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structure-Property Relationships of Amorphous Hydrogenated Silicon-Carbon Films Produced by Atomic Hydrogen-Induced CVD from a Single-Source Precursor2001

    • Author(s)
      A.M.Wrobel
    • Journal Title

      Chem.Vap.Deposition 6

      Pages: 315-322

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structure and optical properties of (001)GaAs surfaces nitrided in plasma-assisted NH_3 gas2001

    • Author(s)
      G.Shimaoka
    • Journal Title

      Appl.Surf.Sci. 175-176

      Pages: 436-441

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Growth of CdTe islands on ZnTe by hot-wall epitaxy2001

    • Author(s)
      H.Kuwabara
    • Journal Title

      Appl.Surf.Sci. 175-176

      Pages: 643-648

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Ga_2O_3 thin film for oxygen sensor at high temperature2001

    • Author(s)
      M.Ogita
    • Journal Title

      Appl.Surf.Sci. 175-176

      Pages: 721-725

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] n-type and p-type doping techniques for CdTe crystal using excimer laser annealing2001

    • Author(s)
      A.Nakamura
    • Journal Title

      Proc.of 6^<th> Joint Int.Conf.on Advanced Sci.and Techmol.(JICAST2001)

      Pages: 164-167

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Annealing Process of SrGa_2S_4 : Ce Thin Film for Cathodoluminescent Properties

    • Author(s)
      H.Nakajima
    • Journal Title

      Proc.of 21th Int.Display Res.Conf.and 8^<th> Int.Display Workshops (Nagoya, 2001)

      Pages: 1047-1050

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Prparation of n-Type ZnO Thin Film Doped with Al or Ga on Si(111) Substrate

    • Author(s)
      Y.Kondoh
    • Journal Title

      Proc.of 21th Int.Display Res.Conf.and 8^<th> Int.Display Workshops (Nagoya, 2001)

      Pages: 1147-1150

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Analysis of penetration depth of low-energy electrons into phosphors

    • Author(s)
      H.N.Kominami
    • Journal Title

      Extd.Abst.of 1^<st> Int.Conf.on Sci.and Technol.of Emissive Displays and Lighting (San Diego, CA, 2001)

      Pages: 227-230

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Dependence of cathodoluminescent properties of SrGa_2S_4 : Eu thin films on Ga_2S_3/Sr flux ratio during deposition

    • Author(s)
      H.Nakajima
    • Journal Title

      Extd.Abst.of 1^<st> Int.Conf.on Sci.and Technol.of Emissive Displays and Lighting (San Diego, CA, 2001)

      Pages: 239-241

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathodoluminescent properties of rare-earth doped SrGa_2S_4 thinn film phosphors excited with low energy electrons

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Proc.of 2002 Int.Meeting on Information Display (Invited) (Daegu, Korea, 2002)

      Pages: 1015-1019

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of CaS : Cu, F TFEL devices on Si substrates

    • Author(s)
      S.Hakamata
    • Journal Title

      Proc.of 7^<th> Asian Symp.on Information Display (Singapore, 2002)

      Pages: 315-318

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structure and optical properties of electron beam evaporated Y_2O_3 : Eu films

    • Author(s)
      M.M.Sychov
    • Journal Title

      Proc.of 11^<th> Int.Workshop on Inorganic and Organic Electroluminescence and 2002 Int.Conf.on Sci.and Technol.of Emissive Displays and Lighting (Ghent, Belgium, 2002)

      Pages: 97-100

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Luminescent characteristics of blue-emitting (Sr_<1-x>, Ca_x)S : Cu, F solid solution TFEL devices

    • Author(s)
      M.Ehara
    • Journal Title

      Proc.of 11^<th> Int.Workshop on Inorganic and Organic Electroluminescence and 2002 Int.Conf.on Sci.and Technol.of Emissive Displays and Lighting, (Ghent, Belgium, 2002)

      Pages: 351-354

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of H2S for luminescent characteristics of blue-emitting (Sr_<1-x>, Ca_x)S : Cu, F TFEL devices

    • Author(s)
      M.Ehara
    • Journal Title

      Proc.of Int.Display Workshops, (Hiroshima, 2002)

      Pages: 971-974

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of ZnO for structural and CL properties of Y_2O_3 : Tb thin film phosphors

    • Author(s)
      T.Magami
    • Journal Title

      Proc.of Int.Display Workshops, (Hiroshima, 2002)

      Pages: 995-998

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Film properties and cathodoluminescence of Y_2O_2S : Eu thin films

    • Author(s)
      M.M.Sychov
    • Journal Title

      Proc.of Int.Display Workshops, (Hiroshima, 2002)

      Pages: 955-958

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Preparation of fine particle and thin film phosphors for field emission displays

    • Author(s)
      Y.Nakanishi
    • Journal Title

      8^<th> IAMS Int.Symp.-2002 (Invited), (Fukuoka, 2002).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Present Status of Development of FEDs

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Proceedings of International Display Manufacturing Conference (IDMC'03) (Invited), (Taipei, Taiwan, 2003)

      Pages: 71-74

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Cathodoluminescent properties of Y_2O_2S : Eu phosphors synthesized by citric acid gel method

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Proceedings of International Meeting on Information Displays (IMID'03) (Invited), (Daegu, Korea, 2003)

      Pages: 203-206

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Luminescent Properties of Eu-Doped Titanium Oxide Synthesized by Citric Acid Gel Method or Sol-Gel Method for Near UV Excitation

    • Author(s)
      H.Kominami
    • Journal Title

      Conf.Record of 23rd Int.Display Res.Conf.(TDRC'03) (Phoenix, AZ, 2003)

      Pages: 266-269

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Dependence of Structural and Luminescent Characteristics of (Sr_<1-x>Ca_x)S : Cu, F Solid Solution Thin Films on Mixture Ratio

    • Author(s)
      M.Ehara
    • Journal Title

      Conf.Record of 23rd Int.Display Res.Conf.(IDRC'03), (Phoenix, AZ, 2003)

      Pages: 278-281

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Low Voltage Cathodoluminescent Properties of Phosphors Synthesized by Liquid Phase Reaction

    • Author(s)
      H.Kominami
    • Journal Title

      Proc.of 10^<th> Int.Display Workshops (IDW'03) (Invited), (Fukuoka, 2003)

      Pages: 1105-1108

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structural and Luminescent Characteristics of (Sr_<1-x>Ca_x)S : Cu, F TFEL Devices

    • Author(s)
      M.Ehara
    • Journal Title

      Proc.of 10^<th> Int.Display Workshops (IDW'03) (Fukuoka, 2003)

      Pages: 1121-1124

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Fabrication of SrS : Cu, F thin film EL devices with MOS structure on Si substrate

    • Author(s)
      S.Hakamata
    • Journal Title

      Proc.of 10^<th> Int.Display Workshops (IDW'03) (Fukuoka, 2003)

      Pages: 1177-1180

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of ITO Surface Morphology to the Luminescent Property of the Thin Film OLED

    • Author(s)
      Y.Fukushi
    • Journal Title

      Proc.of 10^<th> Int.Display Workshops (IDW'03) (Fukuoka, 2003)

      Pages: 1379-1382

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Synthesis of luminescent properties of MgO-TiO_2 phosphor for NUV Excitation

    • Author(s)
      H.Kominami
    • Journal Title

      Proc.of 12th Int.Workshop on Inorganic and Organic Electroluminescence & 2004 Int.Conf.on Sci.Technol.of Emissive Displays and Lighting (Totonto, Canada, 2004)

      Pages: 104-107

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of sulfur for luminescent properties of CaS : Cu, F TFEL devices

    • Author(s)
      S.Hakamata
    • Journal Title

      Proc.of 12th Int.Workshop on Inorganic and Organic Electroluminescence & 2004 Int.Conf.on Sci.Technol.of Emissive Displays and Lighting (Totonto, Canada, 2004)

      Pages: 232-235

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Low Voltage Cathodoluminescence of SrGa_2S_4 Thin Film Phosphors activated with Rare-Earths

    • Author(s)
      Y.Nakanishi
    • Journal Title

      Proc.of 12th Int.Workshop on Inorganic and Organic Electroluminescence & 2004 Int.Conf on Sci.Technol.of Emissive Displays and Lighting (Totonto, Canada, 2004)

      Pages: 317-320

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of Rare Earth-Doped Zn-Y-O powders Synthesized by Citric Acid Gel Method

    • Author(s)
      K.Takebayashi
    • Journal Title

      11th Int.Display Workshops (Fukuoka, 2004)

      Pages: 1143-1146

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Structural Properties and Coondition Control of ZnMgO Thin Film by Oxidization of Sulfide on Si Substrates

    • Author(s)
      K.Ohara
    • Journal Title

      11th Int.Display Workshops (Fukuoka, 2004)

      Pages: 1147-1150

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] 三宅亜紀: "Si基板上ZnOエピタキシャル薄膜の形成と励起子発光特性"静岡大学大学院電子科学研究科研究報告. 23. 71-74 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上ZnSエピタキシャル薄膜のZnOへの酸化過程"電子情報通信学会技術研究報告. EID2002-100. 57-60 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Hiroko Kominami: "Synthesis of Zn-doped Y_2O_3: Eu Fine Particle Phosphors by Sol-Gel method"The 16^<th> Int.Vacuum Microelectronics Conference. 2-46 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 大原賢治: "Si基板上ZnO薄膜のレーザアニールによる結晶性及び伝導性の制御"第23回表面科学講演大会,3A33. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 武林慶一郎: "液層反応によるZn_<1-x>Mg_xO蛍光体の合成と発光特性"電気化学会第71回大会,3B05. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 大原賢治: "Si基板上硫化物薄膜の酸化によるZn_<1-x>Mg_xO薄膜の作製"第51回応用物理学関係連合講演会. 30p. 19-25 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Aoki, Y.Shimizu: "p-type ZnO laser formation by excimer laser doping"Physics State Solid(b). 229(2). 911-914 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Miyake: "Study on the structural transformation process from ZnS epitaxial film frown on Si substrate to ZnO epitaxial film by oxidation"Physics State Solid(b). 229(2). 829-833 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上ZnS薄膜の酸化にょるエピタキシャルZnO薄慎の形成と励起子発光"表面科学. 23(8). 492-496 (2002)

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      2002 Annual Research Report
  • [Publications] A.Miyake: "Growth of epitaxial ZnO thin film by oxidation of epitaxial ZnS thin film on Si(111)"International Journal of Modern Physics B. 15(28-30). 3861-3864 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 中村篤志: "リモートプラズマMOCVD法によるZnO薄膜の成長"第63回応用物理学会学術講演会24a-YE-1. No.1. 251 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Shimizu: "Effect of hydrogen plasma radicals in remote plasma assisted MOCVD ZnO growth from dyethylzinc and oxygen"2^<nd> International Workshop on Zinc Oxide(MRS Workshop). 70. 70 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Shimizu: "The effect of hydrogen plasma radicals in ZnO growth from dyethylzinc"Proceeding fo Joint International Conference on Advanced Science and Technology by Shizuoka University and Zhejiang University(JICAST2002). 409-412 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Shimizu: "Effect of hydrogen plasma radicals in remote plasma assisted MOCVD ZnO growth from dyethylzinc and oxygen"2^<nd> International Workshop on ZnO. 70 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 清水克美: "エキシマレーザードーピングによるZnOpn接合形成"発光型/非発光型ディスプレイ合同研究会IDY2002-18. 103-108 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上ZnOエピタキシャル薄膜の酸化物界面層と発光及び膜質"第63回応用物理学会学術講演大会25a-YE-8. No.1. 258 (2002)

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      2002 Annual Research Report
  • [Publications] 三宅亜紀: "ZnS酸化によるSi基板上ZnOエピタキシャル薄膜の界面酸化層"第49回応用物理学会関係連合講演会28-ZN-3. No.1. 315 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 近藤祐一: "Si基板上ZnS薄膜の酸化によるn-ZnOエピタキシャルZnO薄膜の形成"2002年映像情報メディア学会年次大会3-8. (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Kondoh: "Preparation of n-type ZnO Thin Film Doped with Al or Ga on Si(III) Substrate"Proc. of 21st Int. Display Res. Conf. in conjunction with 8th Int. Display Workshops. 1147-1150 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上ZnO薄膜特性のZnS薄膜成長温度及び熱処理条件依存性"第48回応用物理学関係連合講演会、30aK10. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 清水克美: "エキシマレーザードーピングによるP型ZnO層の形成"第48回応用物理学関係連合講演会、30pK14. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 清水克美: "エキシマレーザードーピング法によるP型ZnO層の形成"電子情報通信学会電子デバイス研究会技術研究報告. ED2001・17. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上エピタキシャルZnO薄膜の成長と励起子発光特性"電子情報通信学会電子ディスプレイ研究会技術研究報告. EID2001・12. 31-36 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Miyake: "UV Emission from Epitaxial ZnO Thin Film on Si(III) Substrate"13th Int. Conf. on Crystal Growth/11th Int. Conf. on Vapor Growth and Epitaxy, 04p-S12-045. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Miyake: "Study on the Structural Transformation Process from ZnS Epitaxial Film Grown on Si Substrate to ZnO Epitaxial Film by Oxidation"Phys. Stat. Sol. (b). 229・2. 829-833 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Aoki: "p-type ZnO Layer Formation by Excimer Laser Doping"Phys. Stat. Sol. (b). 229・2. 911-914 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 近藤祐一: "Si(III)基板上に成長したn-ZnO薄膜の発光及び電気特性"第62回応用物理学会学術講演会、11aP1-13. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 三宅亜紀: "Si基板上ZnS薄膜の酸化によるエピタキシャルZnO薄膜の形成と励起子発光"第21回表面科学講演大会、1C13. (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 中西洋一郎: "Si基板上ZnSエピタキシャル薄膜の酸化によるZnOエピタキシャル薄膜の形成と励起子発光特性"日本表面科学会・中部支部研究会. (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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