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Research of the fabrication for arbitrary 3D structure devices using synchrotron radiation (SR)

Research Project

Project/Area Number 13450299
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionHimeji Institute of Technology

Principal Investigator

HATTORI Tadashi  Laboratory of Advanced Science and Technology for Industry Himeji Institute of Technology, 高度産業科学技術研究所, 教授 (70326297)

Co-Investigator(Kenkyū-buntansha) MEKARU Harutaka  Laboratory of Advanced Science and Technology for Industry Himeji Institute of Technology, 高度産業科学技術研究所, 助手 (30321681)
UTSUMI Yuichi  Laboratory of Advanced Science and Technology for Industry Himeji Institute of Technology, 高度産業科学技術研究所, 助教授 (80326298)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 2003: ¥2,400,000 (Direct Cost: ¥2,400,000)
Fiscal Year 2002: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2001: ¥10,000,000 (Direct Cost: ¥10,000,000)
KeywordsSynchrotron orbit radiation / LIGA / Micromachine / X-ray mask / Microfabrication / Microsystems / MEMS / NEMS / Micro Mold / ナノ・マイクロファブリケーション / マイクロ・ナノファブリケイション
Research Abstract

LIGA (German acronym for Lithographite Galvanoformung and Abformung) process, that utilizes a useful industrial application of synchrotron radiation (SR), is one of the promising technologies for fabrication of extremely tall three-dimensional (3D) microstructures with a large aspect ratio. Because X ray mask used in the present LIGA process has the uniform thickness of an absorber, the fabrication with flexibility in vertical-directions is very restricted.
In this research, we proposed the new LIGA process using the X-ray mask absorbers with thickness variation in vertical direction. Moreover, this process is verified to give the fabrication with having flexibility in vertical-directions.
10.The lighting-Panel (LP) for liquid crystal display (LCD) with the accurate 3D microstructures were designed simulation tool and actually they were fabricated using the X mask developed by this research The size of optical dot array conical patterns of the height 60μm formed on LP, for achieving high and uniform luminosity has to be less than several hundred and aspect ratio must be optimized

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] Yuichi Utsumi, Tadashi Hattori: "A new approach to Microfabrication and synthesization using synchrotron radiation excited chemical reaction"Microsystem Technologies. Vol.9, No.5. 316-318 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] X.C.Shan, R.Maeda, T.Ikehara, H.Mekaru, T.Hattori: "Fabrication of X-ray masks and applications for optical switch molding"Sensors and Actuators A. Vol.108, Issues 1-3. 224-229 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography"Japan Society of Applied Physics. Vol.42, No.6B. 3807-3810 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 服部正: "次世代アクチュエータの加工法"日本ロボット学会誌. Vol.21, No.7. 748-751 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 銘苅春隆, 服部正, 中村修, 丸山修: "超音波振動によるホットエンボッシングのアシスト処理"超音波TECHNO. Vol.16, No.1. 65-69 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Minamitani, Y.Utsumi, Y.Tanaka, T.Hattori: "3D Microstructure Fabrication for a High Luminosity Lighting-Panel using Synchrotron Radiation"High Aspect Radio Micro Structure Technology 2003. 213-214 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 服部正(共著): "21世紀版薄膜作製応用ハンドブック"株式会社エヌ・ティー・エス. 1330 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yuichi Utsumi, Tadashi Hattori: "A new approach to Microfabrication and synthesization using synchrotron radiation excited chemical reaction"Microsystem Technologies. Vol.9,No.5. 316-318 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] X.C.Shan, Ryutaro Maeda, Tuyoshi Ikehara, Harutaka Mekaru, Tadashi Hattori: "Fabrication of X-ray masks and applications for optical switch molding"Sensors and Actuators A. Vol.108,Issues 1-3. 224-229 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography"The Japan Society of Applied Physics. Vol.42,No.6B. 3807-3810 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tadashi Hattori: "Fabrication Methods of the Next Generation Micro Actuator"Journal of the Robotics Society of Japan. Vol.21,No.7. 748-751 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Harutaka Mekaru, Tadashi Hattori, Osamu Nakamura, Osamu Maruyama: "Assistant processing of hot EMBOSSHINGU by ultrasonic vibration"Ultrasonic Technology. Vol.16,No.1. 65-69 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Megumi Minamitani, Yuichi Utsumi, Yasutaro Tanaka, Tadashi Hattori: "3D Microstructure Fabrication for a High Luminosity Lighting-Panel using Synchrotron Radiation"High Aspect Radio Micro Structure Technology 2003. 213-214 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yuichi Utsumi, Tadashi Hattori: "A new approach to Microfabrication and synthesization using synchrotron radiation excited chemical reaction"Microsystem Technologies. Vol.9, No.5. 316-318 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] X.C.Shan, R.Maeda, T.Ikehara, H.Mekaru, T.Hattori: "Fabrication of X-ray masks and applications for optical switch molding"Sensors and Actuators A. Vol.108, Issies 1-3. 224-229 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Effects of Synchrotron Radiation Spectrum Energy on Polymetyl Methacrylate Photosensitivity to Deep X-ray Lithography"Japan Society of Applied Physics. Vol.42, No.6B. 3807-3810 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 服部正: "次世代アクチュエータの加工法"日本ロボット学会誌. Vol.21, No.7. 748-751 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 銘苅春隆, 服部正, 中村修, 丸山修: "超音波振動によるホットエンボッシングのアシスト処理"超音波TECHNO. Vol.16, No.1. 65-69 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Minamitani, Y.Utsumi, Y.Tanaka, T.Hattori: "3D Microstructure Fabrication for a High Luminosity Lighting-Panel using Synchrotron Radiation"High Aspect Radio Micro Structure Technology 2003. 213-214 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 服部正(共著): "21世紀版薄膜作製応用ハンドブック"株式会社エヌ・ティー・エス. 1330 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 服部 正: "放射光のナノ・マイクロ加工技術への応用"溶接学会誌. 第71巻3号. 135-144 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography of synchrotron radiation"Microsystem Technologies. No.9. 36-40 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Utsumi Yuichi, Kitadani Takeshi, Hattori Tadashi: "Optimization of Nickel Electroplating for High Aspect Ratio LIGA Mold Inserts Fabricated by Synchrotron Radiation from "NewSUBARU""JMSE/AMSE International Conference on Materials and Proceeding 2002. 585-588 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Harutaka Mekaru, Yuichi Utsumi, Tadashi Hattori: "Current Status of LIGA Process at "NewSUBARU""JMSE/AMSE International Conference on Materials and Proceeding 2002. 589-592 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 植田寛康, 福田義博, 瀧口欣司, 服部正: "X線マスクの吸収体厚み制御による微細3次元加工の検討"電気学会総合研究会センサ・マイクロマシン準部門総合研究会資料. 109-112 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 福田義博, 植田寛康, 瀧口欣司, 服部正: "X線マスクの吸収体厚み制御による3次元マイクロ構造体の作製"第16回日本放射光学会年会・放射光科学合同シンポジウム予稿集. 289 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 植田寛康, 才木常正, 銘苅春隆, 内海裕一, 服部正: "光強度分布X線マスクによる微細3次元加工の検討"日本機械学会第9回機械材料・材料加工技術講演会講演論文集. No.01-26. 381-382 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 植田寛康, 才木常正, 銘苅春隆, 内海裕一, 服部正: "放射高強度分布制御による3Dマイクロ加工の検討"日本設備管理学会第4回 微細加工技術に関する研究会. 8-9 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 植田寛康, 才木常正, 服部正: "X線リソグラフィにおける吸収体によるレジストの加工深さ制御"平成14年電気学会全国大会. Vol.3. 194 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 服部 正: "放射光を用いた3次元マイクロ構造創製"日本機械学会 関東支部第8期講演会. WS.4-6. 41-42 (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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