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Design for ultra sensitive oxide semiconductor gas sensor by controlling meso-pore and high order structure

Research Project

Project/Area Number 13450354
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 工業物理化学
Research InstitutionKyushu University

Principal Investigator

YAMAZOE Noboru  Kyushu University, Faculty of Engineering Sciences, Professor, 大学院・総合理工学研究院, 教授 (40037817)

Co-Investigator(Kenkyū-buntansha) SAKAI Go  Kyushu University, Faculty of Engineering Sciences, Research Associate, 大学院・総合理工学研究院, 助手 (40284567)
SHIMANOE Kengo  Kyushu University, Faculty of Engineering Sciences, Associate Professor, 大学院・総合理工学研究院, 助教授 (10274531)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥14,900,000 (Direct Cost: ¥14,900,000)
Fiscal Year 2002: ¥5,000,000 (Direct Cost: ¥5,000,000)
Fiscal Year 2001: ¥9,900,000 (Direct Cost: ¥9,900,000)
KeywordsSemiconductor gas sensor / High order structure / Mesopore / Macropore / SnO_2 / Gas diffusion / Grain size / Hydrothermal treatment / 一次粒子径 / 二次粒子径 / 拡散方程式 / 酸化スズ
Research Abstract

Recently, numerous kinds of gases are emitted from various origins into our living space, working space or outdoors. Many of them, like air pollutants and VOCs (volatile organic compounds), are hazardous to human beings and environments. Most of these gases are present at low concentrations so that extremely good sensing characteristics are requested for their monitoring. It seems imperative to establish sensor design principles on the basis of fundamental understandings of semiconductor gas sensors. In this research project, the influences of gas transport on the gas sensing properties of semiconductor gas sensor are investigated theoretically, based on the diffusion equation assuming Knudsen diffusion and first order surface reaction of a target gas. The followings are found to be important factors in order to realize such high sensitive gas sensors by theoretical study
(1) Control of mesopores where competition between gas diffusion and surface reaction takes place.
(2) Control of size of the secondary particles involving mesopores.
(3) Control of macropores through which gas diffusion is rapid.
The followings are also found in this research project.
(1) Crystallite size of SnO_2 could be enlarged and controlled in the range from 6 nm to 12 nm by controlling preparation procedure of stannic acid gel and hydrothermal treatment conditions.
(2) SnO_2 could be coated thinly on SiO_2 spherical particles by adjusting pH.
(3) Large size pores could be introduced into thin film of SnO_2 by mixing organic reagent.
Besides, aqueous sols of tungsten oxide dehydrate could be prepared by an ion-exchange method. The size of the crystallites could be controlled by washing, centrifugal treatments and/or ultrasonic agitation of the sol, providing a method to control the crystallite size. It was also found that thick film device derived from tungsten oxide dehydrate sol gave an extremely high sensitivity to NO_2.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] G.Sakai, N.Matsunaga, K.Shimanoe, N.Yamazoe: "Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor"Sensors and Actuators B. 80. 125-131 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N.Matsunaga, G.Sakai, K.Shimanoe, N.Yamazoe: "Diffusion equation-based study of thin film semiconductor gas sensor -response transient-"Sensors and Actuators B. 83. 216-221 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G.Sakai, N.-S.Baik, N.Miura, N.Yamazoe: "Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -Dependence of CO and H2 response on film thickness-"Sensors and Actuators B. 77. 116-121 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N.Yamazoe, G.Sakai, N.Matsunaga, N.-S.Baik, K.Shimanoe: "Importance of gas diffusion in semiconductor gas sensor"Chemical sensors for Hostile Environments, Ceramic Transactions. 130. 27-36 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N.Yamazoe, G.Sakai, K.Shimanoe: "Oxide semiconductor gas sensors"Catalysis Survey from Asia. Vol.7,No.1. 63-75 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Choi, G.Sakai, K.Shimanoe, N.Miura, N.Yamazoe: "Preparation of aqueous sols of tungsten oxide dehydrate from sodium tungstate by an ion-exchange method"Sensors and Actuators B. 87. 63-72 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G. Sakai, N. Matsunaga, K. Shimanoe, N. Yamazoe: "Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor"Sensors and Actuators B. 80. 125-131 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N. Matsunaga, G. Sakai, K. Shimanoe, N. Yamazoe: "Diffusion equation-based study of thin film semiconductor gas sensor -response transient-"Sensors and Actuators B. 83. 216-221 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G. Sakai, N. -S. Baik, N. Miura, N. Yamazoe: "Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -Dependence of CO and H_2 response on film thickness-"Sensors and Actuators B. 77. 116-121 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N. Yamazoe, G. Sakai, N. Matsunaga, N.-S. Baik, K. Shimanoe: "Importance of gas diffusion in semiconductor gas sensor"Chemical Sensors for Hostile Environments, Ceramic Transactions. 130. 27-36 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] N. Yamazoe, G. Sakai, K. Shimanoe: "Oxide semiconductor gas sensors"Catalysis Survery from Asia. Vol.7, No.1. 63-75 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Choi, G. Sakai, K. Shimanoe, N. Miura, N, Yamazoe: "Preparation of aqueous sols of tungsten oxide dehydrate from sodium tungstate by an ion-exchange method"Sensors and Actuators B. 87. 63-72 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] G.Sakai, N.Matsunaga, K.Shimanoe, N.Yamazoe: "Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor"Sensors and Actuators B. 80. 125-131 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Matsunaga, G.Sakai, K.Shimanoe, N.Yamazoe: "Diffusion equation-based study of thin film semiconductor gas sensor -response transient-"Sensors and Actuators B. 83. 216-221 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] G.Sakai, N.-S.Baik, N.Miura, N.Yamazoe: "Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -Dependence of CO and H2 response on film thickness-"Sensors and Actuators B. 77. 116-121 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Yamazoe, G.Sakai, N.Matsunaga, N.-S.Baik, K.Shimanoe: "Importance of gas diffusion in semiconductor gas sensor"Chemical sensors for Hostile Environments, Ceramic Transactions. 130. 27-36 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] N.Yamazoe, G.Sakai, K.Shimanoe: "Oxide semiconductor gas sensors"Catalysis Survey from Asia. Vol.7,No.1. 63-75 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Choi, G.Sakai, K.Shimanoe, N.Miura, N.Yamazoe: "Preparation of aqueous solo of tungsten oxide dehydrate from sodium tungstate by an ion-exchange method"Sensors and Actuators B. 87. 63-72 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 酒井 剛, 松永直樹, 島ノ江憲剛, 山添 昇: "SnO_2薄膜センサの感度挙動に対する拡散方程式の適用"触媒. 43・2. 167-169 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Go Sakai, Naoki Matsunaga, Kengo Shimanoe, Noboru Yamazoe: "Gas sensing properties of tin oxide thin films fabricated from hydrothermally treated nanoparticles -Dependence of CO and H_2 response on film thickness-"Sensors and Actuators B.. 77. 116-121 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Go Sakai, Naoki Matsunaga, Kengo Shimanoe, Noboru Yamazoe: "Theory of gas-diffusion controlled sensitivity fr thin film semiconductor gas sensor"Sensors and Actuators B.. 80. 125-131 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 酒井 剛, 松永直樹, 島ノ江憲剛, 山添 昇: "拡散方程式に基づく薄膜型半導体ガスセンサの解析(1)定常感度挙動"Proceedings of the 32nd Chemical Sensor Symposium. 17・A. 1-3 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 松永直樹, 酒井 剛, 島ノ江憲剛, 山添 昇: "拡散方程式に基づく薄膜型半導体ガスセンサの解析(2)過渡応答挙動"Proceedings of the 32nd Chemical Sensor Symposium. 17・A. 4-6 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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