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Development of high energy-resolution soft-X-ray emission spectroscopy microscope

Research Project

Project/Area Number 13554010
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 固体物性Ⅰ(光物性・半導体・誘電体)
Research InstitutionTohoku University

Principal Investigator

TERAUCHI Masami  Tohoku University, Institute of Multidisciplinary, Research for Advanced Materials, Professor, 多元物質科学研究所, 教授 (30192652)

Co-Investigator(Kenkyū-buntansha) SAITOH Koh  Tohoku University, Institute of Multidisciplinary, Research for Advanced Materials, Research Associate, 多元物質科学研究所, 助手 (50292280)
TSUDA Kenji  Tohoku University, Institute of Multidisciplinary, Research for Advanced Materials, Associate Professor, 多元物質科学研究所, 助教授 (00241274)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 2003: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2002: ¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 2001: ¥5,000,000 (Direct Cost: ¥5,000,000)
KeywordsSoft-X-ray emission spectroscopy / Transmission electron microscope / DOS of valence bands / Nano-meter scale area / Cu L-emission spectra / boron nano-belts / 軟X線分光 / L発光スペクトル / ボロンナノワイヤ
Research Abstract

A new grating for a grazing incidence flat-field spectrograph was designed from 400eV to 1200eV with a groove density of 2400 lines/mm. The grating has a two times larger energy dispersion than that of a commercial grating. A new spectrometer chamber was designed to used not only for the new grating but also for commercial gratings. As energy region of 60-1200 eV is accessible by using the new and commercial gratings.
X-ray reflection mirrors were designed to improve X-ray intensity to go into the grating. The mirrors have elliptical curvatures. The material for the mirrors was tungsten of about 100 nm thickness, which was formed on a cleaved natural mica crystal. The length and the width of the mirror were 135 mm and about 10 mm, respectively. Two mirrors were put between the grating and the specimen. Spectral intensity was improved by four times compared with those obtained without the mirror. The effective collection angle 2.8x10^<-3>sr.
The developed soft-X-ray spectrometer attached to a transmission electron microscope (TEM) of JEM-2000FX. Energy dispersions per CCD detector channel (13.5 μm) of this spectrometer are about 0.1eV for Si L-emission (〜100eV), 0.2eV for B K-emission (〜180eV) and 0.7eV for Cu L-emission (〜930 eV). Cu L-emission spectra were obtained with a probe current of 10 nA at an acquisition time of 20 min. A VLS grating with line density of 24001/mm was used. The spectra clearly showed four L-emission peaks of L_α(M_y(3d)→L_<III>(2p)), L_β(M_<IV>(3d)→L_<II>(2p)), L_1(M_I(3s)→L_<III>(2p)) and Lη(M_I(3s)→L_<II>(2p)).
The density of states of boron nano-belts and bundles of carbon nanotubes were obtained by using the X-ray emission spectroscopy microscope.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] M.Terauchi: "Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope"Journal of Electron Microscopy. 50・2. 101-104 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "A sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the density of states of the valence band"Microscopy & Microanalysis. 7・suppl.2. 228-229 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy and Microanalysis. 8・suppl.2. 622-623 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "A New High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy & Microanalysis. 9・suppl.2. 894-895 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Detection of characteristic signals from As doped (less than 1 at.%) regions of silicon by transmission electron microscopy and convergent-beam electron diffraction"J.Electron Microscopy. 52・5. 441-448 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 寺内正己: "透過型電子顕微鏡を用いた電子状態解析"電子顕微鏡. 38・3. 186-191 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Tanaka: "Convergent-Beam Electron Diffraction IV"JEOL. 352 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Development of sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope"Journal of Electron Microscopy. vol.50(2). 101-104 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "A sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the density of states of the valence band"Microscopy & Microanalysis. vol.7, supple.2. 228-229 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy & Microanalysis. vol.8, supple.2. 622-623 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "A New High Energy-resolution Soft-X-my Spectrometer for A Transmission Electron Microscope"Microscopy & Microanalysis. vol.9, supple.2. 894-895 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Detection of characteristic signals from As doped (less than 1 at.%) regions of silicon by transmission electron microscopy and convergent-beam election diffraction"Journal of Electron Microscopy. vol.52(5). 441-448 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "Electronic structure analyses by an analytical transmission electron microscope"Microscopy. vol.38(3). 186-191 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Tanaka: "Convergent-Beam Electron Diffraction IV"JEOL-Maruzen, Tokyo. 352 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Terauchi: "A New High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy & Microanalysis. 9・suppl2. 894-895 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Terauchi: "Detection of characteristic signals from As doped (less than 1 at.%) regions of silicon by transmission electron microscopy and convergent-beam electron diffraction"J.Electron Microscopy. 52・5. 441-448 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 寺内正己: "透過型電子顕微鏡を用いた電子状態解析"電子顕微鏡. 38・3. 186-191 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 寺内正己: "炭素を含まないナノチューブ"パリティ. 8・8. 41-45 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Soga: "Li-and Mg-doping into Icosahedral Boron Crystals, α-and β-Rhombohedral Boron, Targeting High Temperature Superconductivity : Structure and Electronic States"J.Solid State Chem.. 177. 498-506 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Mukai: ""MIRAI-21" ANALYTICAL ELECTRON MICROSCOPE-PERFORMANCE OF THE MONOCHRO MATOR-"Microscopy & Microanalysis. 9・suppl2. 954-955 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Terauchi: "Development of A High Energy-resolution Soft-X-ray Spectrometer for A Transmission Electron Microscope"Microscopy and Microanalysis. 8・suppl 2. 622-623 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.-K.Hong: "Control of crystal polarity in a wurtzite crystal : Zn0 films grown by plasma-assisted molecular-beam epitaxy on GaN"Phys. Rev. B. 65. 115331-1-115331-10 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Ohtake: "Strain-induced surface segregation in In0.5Ga0.5As/GaAs heteroepitaxy"Applied Physics Letters. 80・21. 3931-3933 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 寺内正己: "EELSで何が分かるのか?"日本結晶学会誌. 44・5. 277-283 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 寺内正己: "EELSを用いた電子構造解析"日本結晶学会誌. 44・6. 347-354 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Tanaka: "Convergent-Beam Electron Diffraction IV"JEOL. 352 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Terauchi: "Development of a sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope"Journal of Electron Microscopy. 50・2. 101-104 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Terauchi: "A sub-eV resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the density of states of the valence band"Microscopy & Microanalysis. 7 ・suppl.2. 228-229 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 寺内正己: "電子顕微鏡によるナノ領域の価電子帯DOS測定法の開発"固体物理. 36・5. 29-34 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Komoda: "Selective excitation of a symmetric interface plasmon mode in two close planar SiO_2/Si interface observed by electron energy-loss spectroscopy"Jpn. J. App. Phys.. 40・7. 4512-4515 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Terauchi: "High Energy-Resolution EELS Study of the Electronic Structure of Boron Nitride Cones"American Institute of Physics. CP590. 133-136 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2020-05-15  

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