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Trial Fabrication and Evaluation of Spin Tunnel Magnetoresistive Device

Research Project

Project/Area Number 13555001
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied materials science/Crystal engineering
Research InstitutionTohoku University

Principal Investigator

KUBOTA hitoshi  Tohoku University, Gradate School of Engineering, Research associate, 大学院・工学研究科, 助手 (30261605)

Co-Investigator(Kenkyū-buntansha) KUMAGAI Seiji  Sony, CNC DSC Magnetic Devices Division, Manager, CNC DSC磁気デバイス事業部, 課長(研究職)
MIYAZAKI Terunobu  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (60101151)
ANDO Yasuo  Tohoku University, Graduate School of Engineering, Associate professor, 大学院・工学研究科, 助教授 (60250726)
NAKASHIO Eiji  Sony, CNC DSC Magnetic Devices Division, Researcher, CNC DSC磁気デバイス事業部, 研究員
余 澤中  東北大学, 大学院・工学研究科, 特別研究員
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2002: ¥5,200,000 (Direct Cost: ¥5,200,000)
Fiscal Year 2001: ¥8,500,000 (Direct Cost: ¥8,500,000)
Keywordsfocused ion beam / carbon / tungsten / microfabrication / spin tunnel / magnetoresistance effect / epitaxial film / bias dependence / カーボン膜 / タングステン膜 / 炭素薄膜 / ケミカルベイパーデポジション / マスクパターン / アルゴンイオンエッチング / 強磁性トンネル接合 / 磁気抵抗効果測定 / 原子間力顕微鏡
Research Abstract

Development of micro-fabrication processes of small magnetic tunnel junctions (MTJs) using focused ion beam induced deposition (FIBID) has been examined. FIBID technique was applied to make small carbon or tungsten patterns, those were used as Ar etching masks and/or electrical leads. The deposition tecnique has some advantages: Pattern location can be controlled freely and precisely, pattem shaps a easily designed, pattem height can be controlled widely, and sub-micron patterns should ha easily fabricated. The smallest lateral size of the carbon and tungsten mask patterns deposited were about 100 nm and 140 nm, repectively. The C mask patterns were hard for Ar etching and soft for O_2 ashing. Resistivity of the Wpatterns was enough small, thus, the W patterns can be used as electrical leads. MTJs were fabricated using C masks or W masks/leads. During Ar ion etching, redeposition at side walls of the mask patterns were formed, resulted in short-circuiting. It is necessary to avoid the redeposition to establish the fabrication process of small MTJs using FIBID technique.
To improve the quality of insulating layers in MTJs, we have used epitaxially grown Ag/Cu/Ni-Fe films on Si (111) substrates as bottom electrodes. Epitaxial growth of the trilayers was confirmed using X-ray diffraction and low energy electron diffraction. The MTJs fabricated showed large tunnel magnetoresistance (TMR) ratios of about 50%. The bias dependence of the TMR ratio was greatly improved in those MTJs. The insulating layers grown on the epitaxial bottom electrodes would have fewer defects than the those grown on textured bottom electrodes.
Further experiments are necessary to complete the fabrication process to apply to the MTJs with epitaxially grown bottom electrodes. The switching characteristics of epitaxially grown MTJs with an area of about 100 nm square would be investigated.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (57 results)

All Other

All Publications (57 results)

  • [Publications] 矢尾板和也: "プラズマ酸化法による低抵抗強磁性トンネル接合の作製"日本応用磁気学会誌. 25. 771-774 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Andrew C.C.Yu: "High resolution electron microscopy of Al-oxide barriers in magnetic tunnel junctions"Japanese Journal of Applied Physics. 40. 5058-5060 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Andrew C.C.Yu: "Direct observation of domain structure and magnetization reversal of magnetic thin films using Lorentz transmission electron microscopy"Japanese Journal of Applied Physics. 40. 4891-4895 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Andrew C.C.Yu: "Lorentz transmission electron microscopy and magnetic force microscopy characterization of NiFe/Al-oxide/Co films"Journal of Applied Physics. 91. 780-782 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Andrew C.C.Yu: "Microstructural and magnetic characteristics of IrMn exchange-biased tunnel junction"Journal of Magnetism and Magnetic Materials. 240. 130-133 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Andrew C.C.Yu: "Effect of Ti seed layer on the magnetization reversal process of Co/NiFe/Al-oxide/NiFe junction films"Journal of Applied Physics. 91. 5234-5239 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X.F.Han: "A self-consistent calculation of intrinsic magnetoelectric properties in magnetic tunnel junctions"J. Magn. Magn. Mater.. 239. 167-169 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X.F.Han: "Analysis of intricsic magnetoelectric properties in spin-valve-type tunnel junctions with high magnetoresutance and low resistance"Physical Review B. 63. 224404-4-224404-7 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X.F.Han: "A self-consistent calculation and an Anisotropic Wavelength Cutoff Energy of Spin-wave Spectrum in Magnetic Tunnel junctions"J. Mater. Sci. Technol.. 17. 197-202 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Kubota: "Magnetoresistance and Dipole Shift of Ultrasmall Magnetic Tunnel Junctions Characterized by Conducting Atomic Force Microscopy"Japanese Journal of Applied Physics. 41. L180-L182 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiji Nakashio: "Longitudinal bias method using a long distance exchange coupling field in TMR junction"Journal of Applied Physics. 89. 7256-7358 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiji Nakashio: "Flux guide type tunnel-valve head for tape storage applications"IEEE Transaction on Magnetics. 38. 1925-1927 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 井浦 聡則: "ラジカル酸化法で作製した高耐熱強磁性トンネル接合"日本応用磁気学会誌. 26. 839-842 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuo Ando: "Growth mechanism of thin insulating layer in ferromagnetic tunnel junctions prepared using various oxidation methods"Journal of Physics D. 35. 2415-2421 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hitoshi Kubota: "Hard mask fabrication for MRAM elements using FIB assisted selective CVD"Journal of Applied Physics. 93. 8370-8372 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Ji Hyung Yu: "Magnetic tunnel junctions with high magnetoresistance and small bias voltage dependence using epitaxial NiFe(111) ferromagnetic bottom electrodes"Journal of Applied Physics. 93. 8555-8557 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuo Ando: "Interface characterization of magnetic tunnel junctions by using tunneling spectroscopy"Journal of Applied Physics. 93. 7023-7025 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 井浦 聡則: "下部磁性層を酸化して作製したトンネル接合の高耐熱特性"日本応用磁気学会誌. 27. 303-306 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 宮崎 照宣: "トンネル磁気抵抗効果とスピンエレクトロニクスの展開"固体物理. 38. 109-124 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Yaoita: "Fabrication of low-resistance ferromagnetic tunnel junctions using plasma oxidation"J. Magn. Soc. Jpn.. 25. 771-774 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. C. C. Yu: "High resolution electron microscopy of Al-oxide barriers in magnetic tunnel junctions"Japanese Journal of Applied Physics. 40. 5058-5060 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. C. C. Yu: "Direct observation of domain structure and magnetization reversal of magnetic them using Lorentz transmission electron microscopy"Japanese Journal of Applied Physics. 40. 4891-4895 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. C. C. Yu: "Lorentz transmission electron microscopy and magnetic force microscopy characterization of NiFe/Al-oxido/Co film"Journal of Applied Physics. 91. 780-782 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. C. C. Yu: "Microstructural and magnetic characteristics of lrMn exchange-biased tunnel junction"Journal of Magnetism and Magnetic Materials. 240. 130-133 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. C. C. Yu: "Effect of Ti seed layer on the magnetization reversal process of Co/NiFe/Al-oxide/NiFe junction films"Journal of Applied Physics. 91. 5234-5239 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X. F. Han: "A self-consistent calculation of intrinsic magnetoelectric properties in magnetic tunnel junctions"J. Magn. Magn. Mater.. 239. 167-169 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X. F. Han: "Analysis of intrinsic magnetolectric in spin-vale-type tunnel junctions with high magnetoresistance and low resistance"Physical Review B63. 224404. 1-7 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] X. F. Han: "A self-consistent calculation and an Anisotropic wavelength cutoff energy of spin-wave spectrum in magnetic tunnel junctions"J. Mater. Sci. Technol.. 17. 197-202 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Kubota: "Magnetoresistance and Dipole Shift of Ultrasmall Magnetic Tunnel Junctions Characterized by Conducting Atomic Force Microscopy"Japanese Journal of Applied Physics. 41. L180-L182 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiji Nakashio: "Longitudinal bias method using a long distance exchange coupling field in TMR junction"Journal of Applied Physics. 89. 7356-7358 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Eiji Nakashio: "Flux guide type tunnel-valve head for tape storage applications"IEEE Transaction on Magnetics. 38. 1925-1927 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M. Iura: "Enhancement of thermal stability of ferromagnetic tunnel junctions prepared by the radical oxidation method"J. Magn. Soc. Jpn. 26. 839-842 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Ando: "Growth mechanism of thin insulating layer in ferromagnetic tunnel junctions prepared using various oxidation methods"Journal of Physics D. 35. 2415-2421 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Kubota: "Hand mask fabrication for MRAM elements using FIB assisted selective CVD"Journal of Applied Physics. 93. 8370-8372 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] J. H. Yu: "Magnetic tunnel junctions with high magnetoresistance and small bias voltage dependence using epitaxial NiFe(111) ferromagnetic spectroscopy"Journal of Applied Physics. 93. 8555-8557 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Ando: "Interface characterization of magnetic tunnel junctions by using tunneling spectroscopy"Journal of Applied Physics. 93. 7023-7025 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M. Iura: "Thermal stability of tunnel junctions with additional oxidation at the interface of the bottom electrode"J. Magn. Soc. Jpan.. 27. 303-306 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Miyazaki: "Tunnel magnetoresistance effect and development of spinelectronics"Solid State Physics. 38. 109-124 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 井浦 聡則: "ラジカル酸化法で作製した高耐熱強磁性トンネル接合"日本応用磁気学会誌. 26. 839-842 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Ando: "Growth mechanism of thin insulating layer in ferromagnetic tunnel junctions prepared using various oxidation methods"Journal of Physics D. 35. 2415-2421 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Hitoshi Kubota: "Hard mask fabrication for MRAM elements using FIB assisted selective CVD"Journal of Applied Physics. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Ji Hyung Yu: "Magnetic tunnel junctions with high magnetoresistance and small bias voltage dependence using epitaxial NiFe(111) ferromagnetic bottom electrodes"Journal of Applied Physics. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuo Ando: "Interface characterization of magnetic tunnel junctions by using tunneling spectroscopy"Journal of Applied Physics. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 井浦 聡則: "下部磁性層を酸化して作製したトンネル接合の高耐熱特性"日本応用磁気学会誌. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 宮崎 照宣: "トンネル磁気抵抗効果とスピンエレクトロニクスの展開"固体物理. 38. 109-124 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 矢尾板和也: "プラズマ酸化法による低抵抗強磁性トンネル接合の作製"日本応用磁気学会誌. 25. 771-774 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Andrew C.C.Yu: "High resolution electron microscopy of Al-oxide barriers in magnetic tunnel junctions"Japanese Journal of Applied Physics. 40. 5058-5060 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Andrew C. C. Yu: "Direct observation of domain structure and magnetization reversal of magnetic thin films using Lorentz transmission electron microscopy"Japanese Journal of Applied Physics. 40. 4891-4895 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Andrew C. C. Yu: "Lorentz transmission electron microscopy and magnetic force microscopy characterization of NiFe/Al-oxide/Co films"Journal of Applied Physics. 91. 780-782 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Andrew C. C. Yu: "Microstructural and magnetic characteristics of IrMn exchange-biased tunnel junction"Journal of Magnetism and Magnetic Materials. (in press).

    • Related Report
      2001 Annual Research Report
  • [Publications] Andrew C. C. Yu: "Effect of Ti seed layer on the magnetization reversal process of Co/NiFe/Al-oxide/NiFe junction films"Journal of Applied Physics. (in press).

    • Related Report
      2001 Annual Research Report
  • [Publications] X. F. Han: "A self-consistent calculation of intrinsic magnetoelectric properties in magnetic tunnel junctions"J. Magn. Magn. Mater.. 239(in press). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] X. F. Han: "Analysis of intricsic magnetoelectric properties in spin-valve-type tunnel junctions with high magnetoresutance and low resistance"Physical Review B. 63. 224404-17 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] X. F. Han: "A self-consistent calculation and an Anisotropic Wavelength Cutoff Energy of Spin-wave Spectrum in Magnetic Tunnel Junctions"J. Master. Sci. Technol.. 17. 197-202 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Kubota: "Magnetoresistance and Dipole Shift of Ultrasmall Magnetic Tunnel Junctions Characterized by Conducting Atomic Force Microscopy"Japanese Journal of Applied Physics. 41. L180-L182 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Eiji Nakashio: "Longitudinal bias method using a long distance exchange coupling field in TMR junction"Journal of Applied Physics. 89. 7356-7358 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Eiji Nakashio: "Flux guide type tunnel-valve head for tape storage applications"IEEE Transaction on Magnetics. (in press).

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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