| Project/Area Number |
13555034
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Graduate School of Engineering, Osaka University |
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Principal Investigator |
KATAOKA Toshihiko Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (50029328)
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| Co-Investigator(Kenkyū-buntansha) |
INOUE Haruyuki Osaka University, Graduate School of Engineering, Assistant Professor, 大学院・工学研究科, 助手 (30304009)
OSHIKANE Yasushi Osaka University, Graduate School of Engineering, 大学院・工学研究科, 助手 (40263206)
ENDO Katsuyoshi Osaka University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90152008)
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| Project Period (FY) |
2001 – 2003
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| Project Status |
Completed (Fiscal Year 2003)
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| Budget Amount *help |
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 2003: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2002: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2001: ¥9,800,000 (Direct Cost: ¥9,800,000)
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| Keywords | diffracted Spherical wavefront / point light source / phase shift interferometry / single mode optical fiber / Helium-Neon laser / optical interferometry / absolute shape measurement / repeatability / 光ファイバ / フェムト秒レーザー / 絶対形状計測 / 点光源回折干渉法 / EUVL露光装置 |
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| Research Abstract |
We have developed a novel phase-shifting interferometer using a spherical wavefront, as a reference surface, come out from single-mode optical fibers. This interferometer measures an absolute shape of a distorted spherical wavefront which reflected from a sample concave mirror by using another spherical wavefront. Accuracy of the spherical wavefront is estimated to be below 10^-5-6λ. In principle, this interferometer can perform an extremely accurate measurement of concave surfaces. A key factor for the development was a low-frequency vibration of the system. The effect of the vibration restricted by accepting both phase control system in light source side and an air suspension type table. As a result, a large concave mirror(200mm diameter, 1500mm radius of curvature) was measures by this system. With a newly developed data processing program which can eliminate a systematic error caused by the optical configuration of the interferometer, the absolute shape of the mirror surface was measured with a repeatability of +/-18nmPV.
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