DEVELOPMENT OF ULTRAPRECISION ALIGNMENT TABLE BY MEANS OF WALKING DRIVE
Grant-in-Aid for Scientific Research (B)
|Allocation Type||Single-year Grants |
|Research Institution||NAGOYA UNIVERSITY (2002)|
Kobe University (2001)
SHAMOTO Eiji Nagoya University, Graduate School of Engineering, Professor, 工学研究科, 教授 (20216146)
HINO Rei Kobe University, Mechanical Engineering, Research Associate, 工学部, 助手 (80273762)
NAKAMOTO Takeshi Nagoya University, Graduate School of Engineering, Associate Professor, 工学研究科, 助教授 (30198262)
MORIWAKI Toshimichi Kobe University, Mechanical Engineering, Professor, 工学部, 教授 (00031104)
YAMAUCHI Akira Toray Engineering Co.Ltd., Fine Process Business Unit, Electronics Div.General manager, エレクトロニクス事業部, 主任技師
|Project Period (FY)
2001 – 2002
Completed (Fiscal Year 2002)
|Budget Amount *help
¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 2002: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 2001: ¥2,300,000 (Direct Cost: ¥2,300,000)
|Keywords||Ultraprecision alignment table / Semiconductor production equipment / Piezoelectric actuator / Xyθ table / Positioning device / Vacuum|
The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;
1. Development of walking table
Compact ultraprecision Xyθ table is developed by applying the principle of walking drive. Since adhesives are considered to have negative effects on motion accuracy and also degree of vacuum, the driving blocks are all fabricated without using adhesives.
2. Development of algorithm and software for open loop control
An algorithm and software to drive the developed table by open loop control are developed, and the fundamental characteristics of the driving system are clarified by the driving experiments.
3. Improvement of open loop motion by linear compensation
A linear compensation matrix is identified to compensate the motion errors, and the open loop motion of the walking drive system is improved by utilizing the linear compensation algorithm developed here.
4. Total evaluation of the developed system
The total system developed in the present research including the walking table, driving software, control and compensation software is evaluated through precision positioning experiments, and it is confirmed that the developed system has fine positioning resolution of less than 50 nm, which is resolution of the image processing system employed to measure the position here.
Report (3 results)
Research Products (30 results)