| Project/Area Number |
13555048
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 展開研究 |
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| Research Field |
Fluid engineering
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| Research Institution | Tokyo Metropolitan University |
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Principal Investigator |
OTA Masahiro Tokyo Metropolitan University, Department of Mechanical Engineering, Professor, 大学院・工学研究科, 教授 (80094259)
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| Co-Investigator(Kenkyū-buntansha) |
YAMAGUCHI Yoshiyuki Tokyo Metropolitan University, Department of Mechanical Engineering, Research Associate, 大学院・工学研究科, 助手 (10244419)
MURAKAMI Kazuhiko Tokyo Metropolitan University, Department of Mechanical Engineering, Research Associate, 大学院・工学研究科, 助手 (00281692)
MIZUNUMA Hiroshi Tokyo Metropolitan University, Department of Mechanical Engineering, Associate Profess, 大学院・工学研究科, 助教授 (20117724)
KAWA Tsunemichi Tsukaasa Instrument, CO, Ltd., Director of Pressure Measurement and Bio-engineering, 圧力バイオ研究室, 室長(研究職)
HOSHINO Daisuke Tokyo Metropolitan University, Department of Applied Chemistry, Research Associate, 大学院・工学研究科, 助手 (80106616)
山口 元 東京都立大学, 工学研究科, 助教授 (00087181)
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| Project Period (FY) |
2001 – 2003
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| Project Status |
Completed (Fiscal Year 2003)
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| Budget Amount *help |
¥13,500,000 (Direct Cost: ¥13,500,000)
Fiscal Year 2003: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2002: ¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2001: ¥8,900,000 (Direct Cost: ¥8,900,000)
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| Keywords | Fluid Engineering / Rarefied Gas Dynamics / Molecular Flow / Control Device for Molecular Flow / Numerical Fluid Dynamics / DSMC Method / Vapour Deposition Machine / 希薄気体 / マイクロマシン / ナノスケール / マイクロ流体力学 / ナノスクール / 分子気体力学 / 光マイクロエンジン / 直接シミュレーションモンテカルロ法 |
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| Research Abstract |
The numerical and approach for improving the performance of the control device for molecular gas flow have been done. By using the direct simulation of Monte Carlo method (abbreviated into DSMC method), the deposition rates on glass blade for the control device and rarefied gas flows around the blades are simulated and evaluated. It is revealed that the rate by the DSMC method can estimate accurately the experimental data of deposition rate of carbon molecules on blades in a vacuum deposition machine. By the controlling the axial bearing with a permanent magnet, the rotational rate of the control device for molecular flow can be increased by 2.5 times to 5.5 times.
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