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Study and prototype fabrication of out of plane microactuator

Research Project

Project/Area Number 13555073
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

HATA Seiichi  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Research Associate, 精密工学研究所, 助手 (50293056)

Co-Investigator(Kenkyū-buntansha) ICHIHARA Jun-ichi  Fujitsu Laboratories Ltd.., M-Project, Senior Researcher, Mプロジェクト, 主幹研究員
SHIMOKOHBE Akira  Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (40016796)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,500,000 (Direct Cost: ¥13,500,000)
Fiscal Year 2002: ¥6,400,000 (Direct Cost: ¥6,400,000)
Fiscal Year 2001: ¥7,100,000 (Direct Cost: ¥7,100,000)
KeywordsMEMS / micromachining / thin film / amorphous / metallic glass / electrostatic actuator / information instruments / optical pickup / 光磁気ディスク / 情報機 / 物性
Research Abstract

1.Purposes
In order to make the new out of plane microactuator of thin film metallic glass, this research examined the following items.
(1)Design of new out of plane microactuator.
(2)Examination of fabrication method of the out of plane microactuator with precision 3D shape.
(3)Displacement characteristics evaluation of the of the fabricated microactuator bearing the deployment to an optical pickup in mind.
2.Results
Based on microfabrication and microforming technology of thin film metallic glass, new out of plane microactuator (Micro Lens Actuator : MLA) is designed and fabricated. The measured performance of the MLA is as shown below. Figures in parentheses are specifications.
(1)Stroke : 0.85 μm(1μm)
(2)Driven object : Glass lens, Mass 0.89 mg, Diameter 1mm (Mass 0.89 mg, Diameter 1 mm)
(3)Tilt error : 0.02° (less than 0.8°)
(4)Resonance frequency : 3.54 kHz (more than 1 kHz)
(5)Shock resistance : over 800G (no spec.)
(6)Applied voltage : 50 V (no spec.)
It becomes apparent that the MLA satisfies the specification except the stroke.
3.Future works
It is necessary to a conduct study of productivity and manufacturing process of commercial MLA for optical pickup of the next generation high record density MO drive system. Furthermore, an increase of a stroke and a decrease in drive voltage are aimed at.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (37 results)

All Other

All Publications (37 results)

  • [Publications] Y.LIU, S.HATA, K.WADA, A.SHIMOKOHBE: "Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass"Jpn.J.Appl.Phys.. 40. 5382-5388 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一, 劉 永東, 和田晃一, 下河辺明: "薄膜金属ガラスの成膜と物性"精密工学会誌. 67・10. 1708-1713 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.HATA, Y.LIU, T.KATO, A.SHIMOKOHBE: "Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region"Proceedings of 10th International Conference on Precision Engineering (ICPE). 37-41 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe: "Fabrication of Three-dimensional Micro-structures ; Metallic Glasses and their micro-machining"International Symposium for the 40th Anniversary of the Foundation of the Osaka Electro-communication University. 71-80 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe: "Thin Film Metallic Glasses and Their Application"Abstract of The First International Forum at Honjo Campus, Akita Prefectural University. 13-20 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 下河辺明, 秦 誠一, 劉 永東: "薄膜金属ガラスによるマイクロ構造体の製作とその応用"東京工業大学精密工学研究所第34回シンポジウム「Micro/Nano Mechano Systems」講演予稿集. 23-27 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一, 山田 裕, 市原順一, 下河辺明: "薄膜金属ガラスを用いたマイクロレンズアクチュェータ"2001年度精密工学会秋季大会学術講演会講演論文集. 221 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一, 下河辺明: "薄膜金属ガラスアクチュエータ"精密工学会誌. 68・5. 657-661 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA, Akira SHIMOKOHBE: "A Micro Lens Actuator for Optical Flying Head"Technical Digest of The 15th IEEE International Conference on MEMS 2002. 507-510 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata, Takashi Fukushige, Akira Shimokohbe: "Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass"Proceedings of CPT2002. 162-167 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一, 下河辺明: "新しいMEMS材料としての薄膜金属ガラス"電気学会マイクロマシン・センサシステム研究会資料. 23-27 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一: "驚異の技術マイクロマシン"目黒区社会教育講座テキスト. 1-12 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一: "マイクロマシンの実用化と研究動向の最先端"横浜市工業技術支援センター テクノパートナー推進プロジェクト「先端・機械技術の応用」技術交流会テキスト. 1-16 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一(分担): "マイクロレンズ(アレイ)の超精密加工と量産化技術"技術情報協会. 352 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE: "Thermal, Mechanical Electrical Properties of Pd-based Thin Film Metallic Glass"Jpn. J. Appl. Phys.. 40. 5382-5388 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. Hata, Y. Liu, K. Wada and A. Shimokohbe: "Fabrication of Thin Film Metallic Glasses and Their Properties (in Japanese)"Journal of the Japan Society for Precisian Engineering. 67-10. 1708-1713 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE: "Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region"Proceedings of 10th International Conference on Precision Engineering(ICPE). 37-41 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe: "Fabrication of Three-dimensional Micro-structures ; Metallic Glasses and their micro-machining"International Symposium for the 40th Anniversary of the Foundation of the Osaka Electro-communication University. 71-80 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe: "Thin Film Metallic Glasses and Their Application"Abstract of The First International Forum at Honjo Campus, Akita Prefectural University. 13-20 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akira Shimokohbe, Seiichi Hata, Yondong Liu: "Fabrication of Microstructures made of Thin Film Metallic Glasses and Its Applications (in Japanese)"Proceedings of Micro / Nano Mechano Systems. 33-42 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata, Yutaka Yamada, Jyunichi Ichihara and Akira Shimokohbe: "Micro Lens Actuator made of Thin Film Metallic Glass (in Japanese)"Proceedings of JSPE Autumn Meeting. 221 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hate and Akira Shimokohbe: "Thin Film Metallic Glass Actuators"Journal of the Japan Society for Precision Engineering. 68, [5]. 657-661 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE: "A Micro Lens Actuator for Optical Flying Head"Technical Digest of The 15th IEEE International Conference on MEMS 2002. 507-510 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata, Takashi Fukushige and Akira Shimokohbe: "Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass"Proceedings of CPT2002. 162-167 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata and Akira Shimokohbe: "Thin Film Metallic Glass as a New MEMS Material (in Japanese)"The Papers of Technical Meeting on Micromachine and Sensor System, IEE Japan. 23-27 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata: "Micromachine, It's Amazing Technology (in Japanese) , Textbook of social education course in Meguro Ward"Meguro Ward. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata: "The trend on leading-edge of study and commercialization of micromachines (in Japanese) , Textbook of meeting in Yokohama City Center for Industrial Technology"(2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Seiichi Hata: "Ultra Precision Machining and Commercialization Technology of Micro Lens (Array) (in Japanese)Ltd."Technical Information Institute Co.. Chapter 6 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 秦 誠一, 下河辺明: "薄膜金属ガラスアクチュエータ"精密工学会誌. 68・5. 657-661 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Seiichi Hata, Takashi Fukushige, Akira Shimokohbe: "Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass"Proceedings of CPT2002. 162-167 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 秦誠一, 下河辺明: "新しいMEMS材料としての薄膜金属ガラス"電気学会マイクロマシン・センサシステム研究会資料. 23-27 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 秦 誠一 (分担): "マイクロレンズ(アレイ)の超精密加工と量産化技術"技術情報協会. 320 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.LIU, S.HATA, K.WADA, A.SHIMOKOHBE: "Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass"Jpn. J. Appl. Phys.. 40. 5382-5388 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 秦 誠一, 劉 永東, 和田 晃一, 下河辺明: "薄膜金属ガラスの成膜と物性"精密工学会誌. 67・10. 1708-1713 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.HATA, Y.LIU, T.KATO, A.SHIM OKOHBE: "Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region"Proceedings of 10th International Conference on Precision Engineering (ICPE). 37-41 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA, Akira SHIMOKOHBE: "A Micro Lens Actuator for Optical Flying Head"Technical Digest of The 15th IEEE International Conference on MEMS 2002. 507-510 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 秦 誠一, 山田 裕, 市原順一, 下河辺明: "薄膜金属ガラスを用いたマイクロレンズアクチュエータ"2001年度精密工学会秋季大会学術講演会講演論文集. 221 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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