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visualization of Fermi level pinning sites at metal semiconductor interfaces

Research Project

Project/Area Number 13555088
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Tokyo

Principal Investigator

HASEGAWA Yukio  The University of Tokyo, Institute for Solid State Physics, Associate Professor, 物性研究所, 助教授 (80252493)

Co-Investigator(Kenkyū-buntansha) EGUCHI Toyoaki  The University of Tokyo, Institute for Solid State Physics, Associate Professor, 物性研究所, 助手 (70308196)
HARA Shiro  Natl. Inst. Adv. Ind. Scd. And Technol., Senior Researcher, 主任研究官
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,400,000 (Direct Cost: ¥13,400,000)
Fiscal Year 2002: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2001: ¥9,600,000 (Direct Cost: ¥9,600,000)
Keywordsmetal semiconductor interface / scanning tunneling microscopy / silicon surfaces / interface states / atomic force microscopy / フェルミ準位ピニング / バリスティック電子放射顕微鏡
Research Abstract

We have installed a function of ballistic electron emission microscopy (BEEM) on our ultrahigh vacuum scanning tunneling microscopy and are now checking its performance. We set up a unit composed of electrodes, electrical feedthough, and a transfer rod which are necessary for BEEM, attached it to the ultrahigh vacuum chamber, and checked they work properly. We also developed electronics for controlling the signal and adjusted computer-aided measurement system appropriately for taking the BEEM imaging and measuring I-V spectra.
Since for this project it is very important to prepare metal semiconductor interfaces with a low density of interface states, we set up a glove box for the chemical processing of the samples in which concentration/density of oxygen, water and particle is extremely small. We developed a method to make samples with the ideal interface on silicon samples but for silicon carbide, which we planned to use for this study, we could not find an appropriate condition of the chemical processing for the pinning-less interface samples. We still need to work for that.
We also developed a method of improving spatial resolution of atomic force microscopy (AFM) for the pinning site observation. With an intention of improving force sensitivity of AFM, we worked for reducing electrical noise and controlling the shape of the probe tip, successfully detected a single covalent chemical bonding, and took highly resolved images of silicon surfaces. We also tried for a measurement of surface potential profile imaging and confirmed that the potential imaging is taken with high sensitivity and high spatial resolutions.
We also investigated the ground state structure of silicon surface, which is used to make metal semiconductor interfaces as a substrate. Using low temperature scanning tunneling microscopy (STM) with an accurate temperature measurement at the sample site, we successfully determined the structure.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (13 results)

All Other

All Publications (13 results)

  • [Publications] Toyoaki Eguchi, Y.Hasegawa: "High resolution atomic force microscopic imaging of the Si(111) -7x7 surface : Contribution of short range force to the images"Phys.Rev.Lett.. 89. 266105(1)-266105(4) (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Ono, A.Kamoshida, N.Matsuura, E.Ishikawa, T.Eguchi, Y.Hasegawa: "Dimer buckling of the Si(001)2x1 surface below 10K observed by low-temperature scanning tunneling microscope"Physical Review B, Rapid Communication. (発表予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] M.Ono, A.Kamoshida, N.matsuura, T.Eguchi, Y.Hasegawa: "Arrangement of the dimer structure on the Si(001)2x1 surface observed by low-temperature scanning tunneling microscope"Physica E. (発表予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Hasegawa, T.Eguchi: "Potential Profile around Step Edges of Si Surface Measured by nc-AFM"Appl.Surf.Sci.. 188. 89-94 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y, Hasegawa, and T. Eguchi: "Potential profile around step edges of Si surfaces measured by nc-AFM"Applied Surface Science. 188. 386-390 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toyoaki Eguchi, and Y. Hasegawa: "High resolution atomic force microscopic imaging of the Si(111)-7x7 surface : Contribution of short range force to the images"Phys. Rev. Lett.. 89. 266105 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masanori Ono, A. Kamoshida, N. Matsuura, E. Ishikawa, T. Eguchi, and Y. Hasegawa: "Dimer buckling of the Si(00l)2x1 surface below 10K observed by low-temperature scanning tunneling microscope"Physical Review B, Rapid Communication. accepted. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Masanori Ono, A. Kamoshida, N. Matsuura, T. Eguchi, and Y. Hasegawa: "Arrangement of the dimer structure on the Si(001)2x1 surface observed by low-temperature scanning tunneling microscope"Physica E. accepted.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Toyoaki Eguchi, Y.Hasegawa: "High resolution atomic force microscopic imaging of the Si(111)-7x7 surface : Contribution of short range force to the images"Phys.Rev.Lett.. 89. 266105(1)-266105(4) (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Ono, A.Kamoshida, N.Matsuura, E.Ishikawa, T.Eguchi, Y.Hasegawa: "Dimer buckling of the Si(001)2x1 surface below 10K observed by low-temperature scanning tunneling microscope"Physical Review B, Rapid Communication. (発表予定).

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Ono, A.Kamoshida, N.Matsuura, T.Eguchi, Y.Hasegawa: "Arrangement of the dimer structure on the Si(001)2x1 surface observed by low-temperature scanning tunneling microscope"Physica E. (発表予定).

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Hasegawa, T.Eguchi: "Potential Profile around Step Edges of Si Surface Measured by nc-AFM"Appl.Surf.Sci.. 188. 89-94 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Hasegawa, T.Eguchi: "Potential Profile around step edges of Sisurfaces measured by nc-AFM"Applied Surface Science. (発表予定).

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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