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GaInNAs vertical cavity surface emitting laser arrays for ultra-high speed and parallel data-links

Research Project

Project/Area Number 13555091
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

MIYAMOTO Tomoyuki  Tokyo Institute of Technology, Precision and Intelligence Lab., Associate Professor, 精密工学研究所, 助教授 (70282861)

Co-Investigator(Kenkyū-buntansha) SAKAGUCHI Takahiro  Tokyo Institute of Technology, Precision and Intelligence Lab., Research Assistant, 精密工学研究所, 助手 (70215622)
KOYAMA Fumio  Tokyo Institute of Technology, Precision and Intelligence Lab., Professor, 精密工学研究所, 教授 (30178397)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2003: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2002: ¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2001: ¥6,400,000 (Direct Cost: ¥6,400,000)
Keywordssemiconductor laser / optical network / optical interconnect / quantum well / quantum dot / VCSEL / GaInNAs / epitaxy
Research Abstract

Low cost and high performance lasers are required in next short distance lightwave networks and optical LANs. The vertical cavity surface emitting laser (VCSEL) is important light source and the VCSEL with 1.1-1.6μm of wavelength is suitable for the optical fiber systems. This research is aiming to realize the long wavelength VCSEL for optical data links using GaAs based material.
As GaAs based materials, highly strained GaInAs quantum well (QW), GaInNAs QW, GaInNAs quantum dot (QD) and GaInAsSb QD are grown using CBE, MBE and MOCVD epitaxial techniques for realizing high emission efficiency and long wavelength emission. 1.1-1.2μm emission by GaInAs QWs, 1.2-1.4μm by GaInNAs QWs, and 1.4-1.5μm by GaInAsSb QDs were observed from photoluminescence measurement of grown crystals. These results indicate applicability of GaAs based material for long wavelength lasers. It was also found that GaInNAs QDs were effective in high-density dot formation which is advantageous for improving in the laser characteristics. The edge emitting lasers are grown and fabricated using highly strained GaInAs and GaInNAs QWs and the lasing at 1.2μm and 1.4μm, respectively were observed. In addition, a 1.13μm wavelength VCSEL was fabricated by highly strained GaInAs QWs. The VCSEL was operated under high temperature and the long-distance high-speed tr'ansmission experiment was demonstrated. These initial lasing performances suggest applicability of GaAs based long wavelength material to the high performance VCSELS. Although, the VCSEL beyond 1.2μm of wavelength is not realized, 1.1-1.5μm VCSELS on GaAs will be achieved by improving emission efficiency of crystals by optimization of growth conditions.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (62 results)

All Other

All Publications (62 results)

  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Lasing characteristics of low-threshold GaInNAs lasers grown by metalorganic chemical vapor deposition"Jpn.J.Appl.Phys.. 40/7B. L744-L746 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Makino, T.Miyamoto, 他: "Composition dependence of thermal annealing effect on 1.3μm range GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Jpn.J.Appl.Phys.. 40/11B. 1211-1213 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kageyama, T.Miyamoto, 他: "Temperature Characteristics of λ=1.3μm GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"電子情報通信学会英文論文誌(Trans.IEICE). E85-C/1. 71-78 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence dependence on heterointerface for metalorganic chemical vapor deposition grown GaInNAs/GaAs quantum wells"Appl.Phys.Lett.. 80/6. 962-964 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ikenaga, T.Miyamoto, 他: "1.4μm GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy"Jpn.J.Appl.Phys.. 41/2A. 664-665 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Makino, T.Miyamoto, 他: "Nitrogen composition and growth temperature dependence of growth characteristics for self-assembled GaInNAs/Gas quantum dots by chemical beam epitaxy"Jpn.J.Appl.Phys.. 41/2B. 953-957 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence and lasing characteristics of GaInNAs quantum wells using GaInAs intermediate layers"Jpn.J.Appl.Phys.. 41/2B. 1034-1039 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kondo, T.Miyamoto, 他: "Low threshold current density operation of 1.16 μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn.J.Appl.Phys.. 41/5B. L562-L564 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kondo, T.Miyamoto, 他: "Effect of annealing on highly strained GaInAs/GaAs quantum wells"Jpn.J.Appl.Phys.. 41/6A. L612-L614 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] B.Gouardes, T.Miyamoto, 他: "GaInAs/GaInNAs/GaInAs intermediate layer structure for long wavelength lasers"IEEE Photon.Technol.Lett.. 14/7. 896-898 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Ohta, T.Miyamoto, 他: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. 9/6. 231-233 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Miyamoto, 他: "Wavelength elongation of GaInNAs lasers beyond 1.3 μm"Proc.IEE. 150/1. 59-62 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Makino, T.Miyamoto, 他: "Growth characteristics of GaInNAs/GaAs quantum dots by chemical beam epitaxy"J.Crystal Growth. 256/3-4. 372-377 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Makino, T.Miyamoto, 他: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. 0(c)/4. 1097-1100 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Uchida, T.Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn.J.Appl.Phys.. 42/11. 6883-6886 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kondo, T.Miyamoto, 他: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1 μm GaInAs/GaAs vertical cavity surface emitting laser"Electron.Lett.. 40/1. 65-66 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Matsuura, T.Miyamoto, 他: "Elongation of emission wavelength of GaInAsSb-covered (Ga)InAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/1AB. L82-L84 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence and lasing characteristics of GaInNAs/GaAsP strain-compensated quantum wells"Jpn.J.Appl.Phys.. 43/2B. L267-L270 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Matsuura, T.Miyamoto, 他: "p-type doping characteristics of GaInNAs : Be grown by solid source molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/4A. L433-L435 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "GaInNAs intermediate layer for improvement of lasing characteristics of GaInNAs quantum well lasers"Jpn.J.Appl.Phys.. 43/4A. L453-L455 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Matsuura, T.Miyamoto, 他: "Surfactant effect of Sb on GaInAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/5A. L605-L607 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Improvement in photoluminescence efficiency of GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition for low threshold 1.3 μm range lasers"Jpn.J.Appl.Phys.. (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Kageyama, T.Miyamoto, 他: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J.Appl.Phys.. (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto, et al.: "Lasing characteristics of low-threshold GaInNAs lasers grown by metalorganic chemical vapor deposition"Jpn. J. Appl. Phys.. vol.40, no.7B. L744-L746 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Composition dependence of thermal annealing effect on 1.3μm range GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.40, no.11B. L1211-L1213 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takeo Kageyama, Tomoyuki Miyamoto et al.: "Temperature characteristics of λ=1.3μm GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Trans. IEICE. vol.E85-C, no.1. 71-78 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence dependence on heterointerface for metalorganic chemical vapor deposition grown GaInNAs/GaAs quantum wells"Appl. Phys. Lett.. vol.80, no.6. 962-964 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoshihiko Ikenaga, Tomoyuki Miyamoto et al.: "1.4μm GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.41, no.2A. 664-665 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Nitrogen composition and growth temperature dependence of growth characteristics for self-assembled GaInNAs/Gas quantum dots by chemical beam epitaxy"Jpn. J. Appl. Phys.. vol.41,no.2B. 953-957 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence and lasing characteristics of GaInNAs quantum wells using GaInAs intermediate layers"Jpn. J. Appl. Phys.. vol.41,no.2B. 1034-1039 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Low threshold current density operation of 1.16μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn. J. Appl. Phys.. vol.41,no.5B. L562-L564 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Effect of annealing on highly strained GaInAs/GaAs quantum wells"Jpn. J. Appl. Phys.. vol.41, no.6A. L612-L614 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Eric Gouardes, Tomoyuki Miyamoto et al.: "GaInAs/GaInNAs/GalnAs intermediate layer structure for long wavelength lasers"IEEE Photon. Technol. Lett.. vol.14, no.7. 896-898 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masataka Ohta, Tomoyuki Miyamoto et al.: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. vol.9, no.6,. 231-233 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tomoyuki Miyamoto et al.: "Wavelength elongation of GaInNAs lasers beyond 1.3μm"Proc. IEE. vol.150, no.1. 59-62 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shigeki Makino, Tomoyuki Miyamoto et al.: "Growth characteristics of GaInNAs/GaAs quantum dots by chemical beam epitaxy"J. Crystal Growth. vol.256,no.3-4. 372-377 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Shigeki Makino, Tonioyuki Miyamoto et al.: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. vol.0(c), no.4. 1097-1100 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takeshi Uchida, Tomoyuki Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn. J. Appl. Phys.. vol.42, no.11. 6883-6886 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takashi Kondo, Tomoyuki Miyamoto et al.: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1μm GaInAs/GaAs vertical cavity surface emitting laser"Electron. Lett.. vol.40, no.1. 65-66 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "Elongation of emission wavelength of GaInAsSb-covered (Ga)InAs quantum dots grown by molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.1AB. L82-L84 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Photoluminescence and lasing characteristics of GaInNAs/GaAsP strain-compensated quantum wells"Jpn. J. Appl. Phys.. vol.43, no.2B. L237-L270 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "p-type doping characteristics of GaInNAs : Be grown by solid source molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.4A. L433-L435 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "GaInNAs intermediate layer for improvement of lasing characteristics of GaInNAs quantum well lasers"Jpn. J. Appl. Phys.. vol.43, no.4A. L453-L455 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tetsuya Matsuura, Tomoyuki Miyamoto et al.: "Surfactant effect of Sb on GaInAs quantum dots grown by molecular beam epitaxy"Jpn. J. Appl. Phys.. vol.43, no.5A. L605-L607 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Masao Kawaguchi, Tomoyuki Miyamoto et al.: "Improvement in photoluminescence efficiency of GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition for low threshold 1.3μm range lasers"Jpn. J. Appl. Phys.. (accepted).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takeo Kageyama, Tomoyuki Miyamoto et al.: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J. Appl. Phys.. (accepted). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Miyamoto, 他: "Wavelength elongation of GaInNAs lasers beyond 1.3μm"Proc.IEE. 150/1. 59-62 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Makino, T.Miyamoto, 他: "Growth characteristics of GaInNAs/GaAs quantum dots by chemical beam epitaxy"J.Crystal Growth. 256/3-4. 372-377 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Onomura, T.Miyamoto, 他: "Densely integrated multiple-wavelength vertical-cavity surface-emitting laser array"Jpn.J.Appl.Phys.. 42/5B. L529-L531 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Uchida, T.Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn.J.Appl.Phys.. 42/11. 6883-6886 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Matsuura, T.Miyamoto, 他: "Elongation of emission wavelength of GaInAsSb-covered (Ga)InAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 43/1AB. L82-L84 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Kawaguchi, T.Miyamoto: "Photoluminescence and lasing characteristics of GaInNAs/GaAsP strain-compensated quantum wells"Jpn.J.Appl.Phys.. 43/2B. L267-L270 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Ohta, T.Miyamoto, 他: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. 9/6. 231-233 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence and lasing characteristics of GaInNAs quantum wells using GaInAs intermediate layers"Jpn. J. Appl. Phys.. 41/2B. 1034-1039 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] E.Gouardes, T.Miyamoto, 他: "GaInAs/GaInNAs/GaInAs intermediate layer structure for long wavelength lasers"IEEE Photon. Technol. Lett.. 14/7. 896-898 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Kondo, T.Miyamoto, 他: "Low threshold current density operation of 1.16 μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn. J. Appl. Phys.. 41/5B. L562-L564 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Makino, T.Miyamoto, 他: "Nitrogen composition and growth temperature dependence of growth characteristics for self-assembled GaInNAs/Gas quantum dots by chemical beam epitaxy"Jpn. J. Appl. Phys.. 41/2B. 953-957 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Lasing characteristics of low-threshold GaInNAs lasers grown by metalorganic chemical vapor deposition"Jpn. J. Appl. Phys.. 40/7B. L744-L746 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] S.Makino, T.Miyamoto, 他: "Composition dependence of thermal annealing effect on 1.3μm range GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. 40/11B. 1211-1213 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Kageyama, T.Miyamoto, 他: "Temperature Characteristics of λ=1.3μm GaInNAs/GaAs quantum well lasers grown by chemical beam epitaxy"電子情報通信学会英文論文誌(Trans. IEICE). E85-C/1. 71-78 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Ikenaga, T.Miyamoto, 他: "1.4μm GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy"Jpn. J. Appl. Phys.. 41/2A. 664-665 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] M.Kawaguchi, T.Miyamoto, 他: "Photoluminescence dependence on heterointerface for metalorganic chemical vapor deposition grown GaInNAs/GaAs quantum wells"Appl. Phys. Lett.. 80/6. 962-964 (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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